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Proceedings 2017, 1(4), 326; doi:10.3390/proceedings1040326

Fabrication of Hybrid Microfluidic System on Transparent Substrates for Electrochemical Applications

Institute of Technical Physics and Materials Science, Centre for Energy Research, HAS, Budapest, Hungary
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
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Published: 8 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
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Abstract

In this work the critical aspects of the process sequence developed for fabrication of hybrid polymer microfluidic systems integrating metal electrode pattern and precisely aligned microfluidic structure are discussed in details. Glass and polycarbonate were considered as primary transparent substrate materials for metal (Au, Pt) electrode deposition and the microchannels were formed in multi-layered SU-8 negative photoresist. Poly(dimethylsiloxane) (PDMS) layer was proposed as cover layer to ensure proper sealing and sample inlet formation.
Keywords: microfluidics; transparent substrate; SU-8; lithography; bonding microfluidics; transparent substrate; SU-8; lithography; bonding
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Holczer, E.; Hakkel, O.; Fürjes, P. Fabrication of Hybrid Microfluidic System on Transparent Substrates for Electrochemical Applications. Proceedings 2017, 1, 326.

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