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Proceedings 2017, 1(4), 324; doi:10.3390/proceedings1040324

MEMS Sensors Based on Very Thin LTCC

1
National research center Kurchatov institute, Moscow, Russia
2
LLC NIIIT, Ostec, Moscow, Russia
3
National research nuclear university MEPhI (Moscow Engineering Physics Institute), Moscow, Russia
4
ITMO University, Saint-Petersburg, Russia
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 16 August 2017
Download PDF [893 KB, uploaded 27 August 2017]

Abstract

The application of thin LTCC is a very interesting and promising approach to the fabrication of ceramic MEMS gas sensors. The attempts to use this material were restricted till now by the thickness of commercial material (>50 μm). In this work, we found a possibility to fabricate thin LTCC membranes (20–30 μm) stretched on a frame made of 100 μm thick LTCC. Aerosol jet printed Pt microheater and laser cutting of the membrane gave a cantilever shaped microhotplate with hot spot of about 300 × 300 μm. Power consumption of the heater is ~150 mW at 450 °C.
Keywords: gas sensor; ceramic MEMS; LTCC; ink/aerosol jet printing gas sensor; ceramic MEMS; LTCC; ink/aerosol jet printing
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Vasiliev, A.A.; Nisan, A.V.; Potapov, G.N.; Samotaev, N.N.; Oblov, K.Y.; Ivanova, A.V. MEMS Sensors Based on Very Thin LTCC. Proceedings 2017, 1, 324.

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