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Proceedings 2017, 1(4), 302; doi:10.3390/proceedings1040302

Microfabrication of Embedding a Flexible Parylene-Based Microelectrode Array within Body-on-a-Chip

Department of Micro Engineering, Kyoto University, Kyoto, Japan
Institute for Integrated Cell-Material Sciences, Kyoto University, Kyoto, Japan
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 24 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
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To study drug response on human heart cells and predict drug induced cardiotoxicity, a microfluidic cell culture device with an integrated microelectrode array (MEA) is a promising approach. Here we integrate flexible MEA into microengineered and microfluidic in vitro human models, known as “Body-on-a-Chip”, during its fabrication. In this work, Au electrodes are covered by two layers of parylene C films, and then embedded in a polydimethylsiloxane (PDMS) layer, resulting in an easy-to-integrate process and compatible with soft-lithography. For a proof of fabrication concept, the impedance of individual electrode-electrolyte interfaces are measured to show a potential for network electrophysiology.
Keywords: microelectrode array; parylene; flexible; PDMS; microfluidics; Body-on-a-Chip microelectrode array; parylene; flexible; PDMS; microfluidics; Body-on-a-Chip
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Omaki, T.; Hirai, Y.; Kamei, K.-I.; Tsuchiya, T.; Tabata, O. Microfabrication of Embedding a Flexible Parylene-Based Microelectrode Array within Body-on-a-Chip. Proceedings 2017, 1, 302.

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