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Proceedings 2017, 1(4), 283; doi:10.3390/proceedings1040283

Humidity Sensitivity and Coil Design of a High-Precision Eddy-Current Displacement Sensor

Electronic Instrumentation Laboratory, Delft University of Technology, Mekelweg 4, 2628CD Delft, The Netherlands
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
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Published: 28 August 2017
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Abstract

Unlike capacitive displacement sensors, Eddy-Current Displacement Sensors (ECDSs) possess an inherently low sensitivity to environmental conditions, such as the humidity of the ambient air. By elevating the excitation frequency it is possible to mitigate their major limitations regarding stability and resolution, making them of interest for high-precision displacement sensing. However, by increasing the excitation frequency, ECDSs become less immune to environmental conditions, due to the inevitable parasitic capacitance of the sensing coil. In this work, we formulate a requirement for the minimum Self-Resonance Frequency (SRF) of the coil, based on the specified humidity variation and the allowable displacement error. This requirement provides an input for the design of the high-precision ECDS probe.
Keywords: displacement sensor; eddy-current sensor; parasitic capacitance; self-resonance frequency; humidity sensitivity; planar coil displacement sensor; eddy-current sensor; parasitic capacitance; self-resonance frequency; humidity sensitivity; planar coil
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Vogel, J.G.; Chaturvedi, V.; Nihtianov, S. Humidity Sensitivity and Coil Design of a High-Precision Eddy-Current Displacement Sensor. Proceedings 2017, 1, 283.

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