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Materials 2015, 8(11), 7389-7400; doi:10.3390/ma8115390

Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching

Electrical and Computer Engineering Department, The University of Alabama in Huntsville, Huntsville, AL 35899, USA
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Academic Editor: Rafael Luque
Received: 31 July 2015 / Revised: 21 October 2015 / Accepted: 27 October 2015 / Published: 3 November 2015
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Abstract

Nanopore-based analysis is currently an area of great interest in many disciplines with the potential for exceptionally versatile applications in medicine. This work presents a novel step towards fabrication of a single solid-state nanopore (SSSN) in a thin silicon membrane. Silicon nanopores are realized using multistep processes on both sides of n-type silicon-on-insulator (SOI) <100> wafer with resistivity 1–4 Ω·cm. An electrochemical HF etch with low current density (0.47 mA/cm2) is employed to produce SSSN. Blue LED is considered to emit light in a narrow band region which facilitates the etching procedure in a unilateral direction. This helps in production of straight nanopores in n-type Si. Additionally, a variety of pore diameters are demonstrated using different HF concentrations. Atomic force microscopy is used to demonstrate the surface morphology of the fabricated pores in non-contact mode. Pore edges exhibit a pronounced rounded shape and can offer high stability to fluidic artificial lipid bilayer to study membrane proteins. Electrochemically-fabricated SSSN has excellent smoothness and potential applications in diagnostics and pharmaceutical research on transmembrane proteins and label free detection. View Full-Text
Keywords: solid state nanopore; silicon; electrochemical etching; HF; atomic force microscopy solid state nanopore; silicon; electrochemical etching; HF; atomic force microscopy
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Khan, M.S.; Williams, J.D. Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching. Materials 2015, 8, 7389-7400.

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