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Energies 2017, 10(11), 1774; https://doi.org/10.3390/en10111774

Energy-Saving Benefits of Adiabatic Humidification in the Air Conditioning Systems of Semiconductor Cleanrooms

Department of Architectural Engineering, College of Engineering, Hanyang University, 222 Wangsimni-Ro, Seongdong-Gu, Seoul 04763, Korea
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Received: 5 October 2017 / Revised: 31 October 2017 / Accepted: 1 November 2017 / Published: 3 November 2017
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Abstract

This paper aimed to evaluate the applicability of adiabatic humidification in the heating, ventilation, and air conditioning (HVAC) systems of semiconductor cleanrooms. Accurate temperature and humidity control are essential in semiconductor cleanrooms and high energy consumption steam humidification is commonly used. Therefore, we propose an adiabatic humidification system employing a pressurized water atomizer to reduce the energy consumption. The annual energy consumption of three different HVAC systems were analyzed to evaluate the applicability of adiabatic humidification. The studied cases were as follows: (1) CASE 1: a make-up air unit (MAU) with a steam humidifier, a dry cooling coil (DCC), and a fan filter unit (FFU); (2) CASE 2: a MAU with the pressurized water atomizer, a DCC, and a FFU; and (3) CASE 3: a MAU, a DCC, and a FFU, and the pressurized water atomizer installed in the return duct. The energy saving potential of adiabatic humidification over steam humidification has been proved, with savings of 8% and 23% in CASE 2 and CASE 3 compared to CASE 1, respectively. Furthermore, the pressurized water atomizer installed in the return duct exhibits greater energy saving effect than when installed in the MAU. View Full-Text
Keywords: semiconductor cleanroom; make-up air unit; pressurized water atomizer; adiabatic humidification; energy conservation semiconductor cleanroom; make-up air unit; pressurized water atomizer; adiabatic humidification; energy conservation
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Jo, M.-S.; Shin, J.-H.; Kim, W.-J.; Jeong, J.-W. Energy-Saving Benefits of Adiabatic Humidification in the Air Conditioning Systems of Semiconductor Cleanrooms. Energies 2017, 10, 1774.

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