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Search Results (11)

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Keywords = transparent piezoelectric transducer

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21 pages, 11089 KiB  
Article
Acoustoelectric Effect due to an In-Depth Inhomogeneous Conductivity Change in ZnO/Fused Silica Substrates
by Cinzia Caliendo, Massimiliano Benetti, Domenico Cannatà and Farouk Laidoudi
Sensors 2024, 24(19), 6399; https://doi.org/10.3390/s24196399 - 2 Oct 2024
Viewed by 1048
Abstract
The acoustoelectric (AE) effect induced by the absorption of ultraviolet (UV) light at 365 nm in piezoelectric ZnO films was theoretically and experimentally studied. c-ZnO films 4.0 µm thick were grown by the RF reactive magnetron sputtering technique onto fused silica substrates at [...] Read more.
The acoustoelectric (AE) effect induced by the absorption of ultraviolet (UV) light at 365 nm in piezoelectric ZnO films was theoretically and experimentally studied. c-ZnO films 4.0 µm thick were grown by the RF reactive magnetron sputtering technique onto fused silica substrates at 200 °C. A surface acoustic wave (SAW) delay line was fabricated with two split-finger Al interdigital transducers (IDTs) photolithographically implemented onto the ZnO-free surface to excite and reveal the propagation of the fundamental Rayleigh wave and its third harmonic at about 39 and 104 MHz. A small area of a few square millimeters on the surface of the ZnO layer, in between the two IDTs, was illuminated by UV light at different light power values (from about 10 mW up to 1.2 W) through the back surface of the SiO2 substrate, which is optically transparent. The UV absorption caused a change of the ZnO electrical conductivity, which in turn affected the velocity and insertion loss (IL) of the two waves. It was experimentally observed that the phase velocity of the fundamental and third harmonic waves decreased with an increase in the UV power, while the IL vs. UV power behavior differed at large UV power values: the Rayleigh wave underwent a single peak in attenuation, while its third harmonic underwent a further peak. A two-dimensional finite element study was performed to simulate the waves IL and phase velocity vs. the ZnO electrical conductivity, under the assumption that the ZnO layer conductivity undergoes an in-depth inhomogeneous change according to an exponential decay law, with a penetration depth of 325 nm. The theoretical results predicted single- and double-peak IL behavior for the fundamental and harmonic wave due to volume conductivity changes, as opposed to the AE effect induced by surface conductivity changes for which a single-peak IL behavior is expected. The phenomena predicted by the theoretical models were confirmed by the experimental results. Full article
(This article belongs to the Section Physical Sensors)
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11 pages, 2015 KiB  
Article
Engineering of LiTaO3 Nanoparticles by Flame Spray Pyrolysis: Understanding In Situ Li-Incorporation into the Ta2O5 Lattice
by Pavlos Psathas, Areti Zindrou, Anastasia V. Spyrou and Yiannis Deligiannakis
Nanomaterials 2024, 14(15), 1257; https://doi.org/10.3390/nano14151257 - 27 Jul 2024
Cited by 2 | Viewed by 1904
Abstract
Lithium tantalate (LiTaO3) perovskite finds wide use in pyroelectric detectors, optical waveguides and piezoelectric transducers, stemming from its good mechanical and chemical stability and optical transparency. Herein, we present a method for synthesis of LiTaO3 nanoparticles using a scalable Flame [...] Read more.
Lithium tantalate (LiTaO3) perovskite finds wide use in pyroelectric detectors, optical waveguides and piezoelectric transducers, stemming from its good mechanical and chemical stability and optical transparency. Herein, we present a method for synthesis of LiTaO3 nanoparticles using a scalable Flame Spray Pyrolysis (FSP) technology, that allows the formation of LiTaO3 nanomaterials in a single step. Raman, XRD and TEM studies allow for comprehension of the formation mechanism of the LiTaO3 nanophases, with particular emphasis on the penetration of Li atoms into the Ta-oxide lattice. We show that, control of the High-Temperature Particle Residence Time (HTPRT) in the FSP flame, is the key-parameter that allows successful penetration of the -otherwise amorphous- Li phase into the Ta2O5 nanophase. In this way, via control of the HTPRT in the FSP process, we synthesized a series of nanostructured LiTaO3 particles of varying phase composition from {amorphous Li/Ta2O5/LiTaO3} to {pure LiTaO3, 15–25 nm}. Finally, the photophysical activity of the FSP-made LiTaO3 was validated for photocatalytic H2 production from H2O. These data are discussed in conjunction with the role of the phase composition of the LiTaO3 nanoparticles. More generally, the present work allows a better understanding of the mechanism of ABO3 perovskite formation that requires the incorporation of two cations, A and B, into the nanolattice. Full article
(This article belongs to the Section Energy and Catalysis)
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3 pages, 988 KiB  
Abstract
An Acoustically Transparent Electrical Cap for Piezoelectric Ultrasound Transducers on Silicon
by Gandhika K. Wardhana, Tiago L. Costa and Massimo Mastrangeli
Proceedings 2024, 97(1), 50; https://doi.org/10.3390/proceedings2024097050 - 19 Mar 2024
Cited by 1 | Viewed by 1029
Abstract
Bulk piezoelectric ultrasound transducers on integrated circuits offer unique properties for therapeutic applications of ultrasound neuromodulation. However, current implementations of such transducers are not optimized for the high transmit efficiency required to stimulate neurons. This is mainly due to the challenge of implementing [...] Read more.
Bulk piezoelectric ultrasound transducers on integrated circuits offer unique properties for therapeutic applications of ultrasound neuromodulation. However, current implementations of such transducers are not optimized for the high transmit efficiency required to stimulate neurons. This is mainly due to the challenge of implementing a metal layer on top of the piezoelectric film using microfabrication techniques. Here, we propose a micromachined capping structure providing an electrical connection on top of the piezoelectric film with minimal acoustic losses. The structure can potentially be used as a common ground connection in phased-array ultrasound transducers. Full article
(This article belongs to the Proceedings of XXXV EUROSENSORS Conference)
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9 pages, 4749 KiB  
Communication
A Miniature Multi-Functional Photoacoustic Probe
by Riqiang Lin, Jiaming Zhang, Wen Gao, Xiatian Wang, Shengmiao Lv, Kwok-Ho Lam and Xiaojing Gong
Micromachines 2023, 14(6), 1269; https://doi.org/10.3390/mi14061269 - 19 Jun 2023
Cited by 4 | Viewed by 2477
Abstract
Photoacoustic technology is a promising tool to provide morphological and functional information in biomedical research. To enhance the imaging efficiency, the reported photoacoustic probes have been designed coaxially involving complicated optical/acoustic prisms to bypass the opaque piezoelectric layer of ultrasound transducers, but this [...] Read more.
Photoacoustic technology is a promising tool to provide morphological and functional information in biomedical research. To enhance the imaging efficiency, the reported photoacoustic probes have been designed coaxially involving complicated optical/acoustic prisms to bypass the opaque piezoelectric layer of ultrasound transducers, but this has led to bulky probes and has hindered the applications in limited space. Though the emergence of transparent piezoelectric materials helps to save effort on the coaxial design, the reported transparent ultrasound transducers were still bulky. In this work, a miniature photoacoustic probe with an outer diameter of 4 mm was developed, in which an acoustic stack was made with a combination of transparent piezoelectric material and a gradient-index lens as a backing layer. The transparent ultrasound transducer exhibited a high center frequency of ~47 MHz and a −6 dB bandwidth of 29.4%, which could be easily assembled with a pigtailed ferrule of a single-mode fiber. The multi-functional capability of the probe was successfully validated through experiments of fluid flow sensing and photoacoustic imaging. Full article
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13 pages, 3783 KiB  
Article
UV Sensor Based on Surface Acoustic Waves in ZnO/Fused Silica
by Cinzia Caliendo, Massimiliano Benetti, Domenico Cannatà, Alessio Buzzin, Francesca Grossi, Enrico Verona and Giampiero de Cesare
Sensors 2023, 23(9), 4197; https://doi.org/10.3390/s23094197 - 22 Apr 2023
Cited by 12 | Viewed by 2725
Abstract
Zinc oxide (ZnO) thin films have been grown by radio frequency sputtering technique on fused silica substrates. Optical and morphological characteristics of as-grown ZnO samples were measured by various techniques; an X-ray diffraction spectrum showed that the films exhibited hexagonal wurtzite structure and [...] Read more.
Zinc oxide (ZnO) thin films have been grown by radio frequency sputtering technique on fused silica substrates. Optical and morphological characteristics of as-grown ZnO samples were measured by various techniques; an X-ray diffraction spectrum showed that the films exhibited hexagonal wurtzite structure and were c-axis-oriented normal to the substrate surface. Scanning electron microscopy images showed the dense columnar structure of the ZnO layers, and light absorption measurements allowed us to estimate the penetration depth of the optical radiation in the 200 to 480 nm wavelength range and the ZnO band-gap. ZnO layers were used as a basic material for surface acoustic wave (SAW) delay lines consisting of two Al interdigitated transducers (IDTs) photolithographically implemented on the surface of the piezoelectric layer. The Rayleigh wave propagation characteristics were tested in darkness and under incident UV light illumination from the top surface of the ZnO layer and from the fused silica/ZnO interface. The sensor response, i.e., the wave velocity shift due to the acoustoelectric interaction between the photogenerated charge carriers and the electric potential associated with the acoustic wave, was measured for different UV power densities. The reversibility and repeatability of the sensor responses were assessed. The time response of the UV sensor showed a rise time and a recovery time of about 10 and 13 s, respectively, and a sensitivity of about 318 and 341 ppm/(mW/cm2) for top and bottom illumination, respectively. The ZnO/fused silica-based SAW UV sensors can be interrogated across the fused silica substrate thanks to its optical transparency in the UV range. The backlighting interrogation can find applications in harsh environments, as it prevents the sensing photoconductive layer from aggressive environmental effects or from any damage caused by cleaning the surface from dust which could deteriorate the sensor’s performance. Moreover, since the SAW sensors, by their operating principle, are suitable for wireless reading via radio signals, the ZnO/fused-silica-based sensors have the potential to be the first choice for UV sensing in harsh environments. Full article
(This article belongs to the Special Issue Piezoelectric Resonator-Based Sensors)
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15 pages, 4801 KiB  
Article
An Ultrasonic Target Detection System Based on Piezoelectric Micromachined Ultrasonic Transducers
by Mingze Gao, Zhihao Tong, Zhipeng Wu and Liang Lou
Micromachines 2023, 14(3), 683; https://doi.org/10.3390/mi14030683 - 19 Mar 2023
Cited by 1 | Viewed by 2840
Abstract
In this paper, an ultrasonic target detection system based on Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) is proposed, which consists of the PMUTs based ultrasonic sensor and the sensor system. Two pieces of 3 × 3 PMUTs arrays with the resonant frequency of 115 [...] Read more.
In this paper, an ultrasonic target detection system based on Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) is proposed, which consists of the PMUTs based ultrasonic sensor and the sensor system. Two pieces of 3 × 3 PMUTs arrays with the resonant frequency of 115 kHz are used as transmitter and receiver of the PMUTs-based ultrasonic sensor. Then, the sensor system can calculate the target’s position through the signal received by the above receiver. The static and dynamic performance of the proposed prototype system are characterized on black, white, and transparent targets. The experiment results demonstrated that the proposed system can detect targets of different colors, transparencies, and motion states. In the static experiments, the static location errors of the proposed system in the range of 200 mm to 320 mm are 0.51 mm, 0.50 mm and 0.53 mm, whereas the errors of a commercial laser sensor are 2.89 mm, 0.62 mm, and N\A. In the dynamic experiments, the experimental materials are the targets with thicknesses of 1 mm, 1.5 mm, 2 mm and 2.5 mm, respectively. The proposed system can detect the above targets with a maximum detection error of 4.00%. Meanwhile, the minimum resolution of the proposed system is about 0.5 mm. Finally, in the comprehensive experiments, the proposed system successfully guides a robotic manipulator to realize the detecting, grasping, and moving of a transparent target with 1 mm. This ultrasonic target detection system has demonstrated a cost-effective method to detect targets, especially transparent targets, which can be widely used in the detection and transfer of glass substrates in automated production lines. Full article
(This article belongs to the Special Issue Design, Fabrication and Testing of MEMS/NEMS, 2nd Edition)
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10 pages, 2440 KiB  
Communication
Wavefront Shaping-Assisted Forward-Viewing Photoacoustic Endomicroscopy Based on a Transparent Ultrasound Sensor
by Tianrui Zhao, Mengjiao Zhang, Sebastien Ourselin and Wenfeng Xia
Appl. Sci. 2022, 12(24), 12619; https://doi.org/10.3390/app122412619 - 9 Dec 2022
Cited by 13 | Viewed by 2475
Abstract
Photoacoustic endoscopy (PAE) can provide 3D functional, molecular and structural information of tissue deep inside the human body, and thus could be well suited for guiding minimally invasive procedures such as tumour biopsy and fetal surgery. One of the major challenges in the [...] Read more.
Photoacoustic endoscopy (PAE) can provide 3D functional, molecular and structural information of tissue deep inside the human body, and thus could be well suited for guiding minimally invasive procedures such as tumour biopsy and fetal surgery. One of the major challenges in the development of miniature PAE probes, in particular, forward-viewing PAE probes, is the integration of a sensitive and broadband ultrasound sensor with the light delivery and scanning system into a small footprint. In this work, we developed a forward-viewing PAE probe enabling optical-resolution microscopy imaging based on a transparent ultrasound sensor coated on the distal end of a multimode optical fibre. The transparent sensor comprised a transparent polyvinylidene fluoride (PVDF) thin film coated with indium tin oxide (ITO) electrodes with a diameter of 2 mm. Excitation laser light was focused and raster-scanned across the facet of the probe tip through the multimode fibre and the PVDF-ITO thin film via wavefront shaping. The sensor had an optical transmission rate of 55–72% in the wavelength range of 400 to 800 nm, a centre frequency of 17.5 MHz and a −10 dB bandwidth of 25 MHz. Singular value decomposition was used to remove a prominent trigger-induced noise, which enabled imaging close to the probe tip with an optically defined lateral resolution of 2 µm. The performance of the imaging probe was demonstrated by obtaining high-fidelity photoacoustic microscopy images of carbon fibres. With further optimisation of the sensitivity, the probe promises to guide minimally invasive procedures by providing in situ, in vivo characterisation of tissue. Full article
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19 pages, 33495 KiB  
Review
A Review of Transparent Sensors for Photoacoustic Imaging Applications
by Danyang Ren, Yizhe Sun, Junhui Shi and Ruimin Chen
Photonics 2021, 8(8), 324; https://doi.org/10.3390/photonics8080324 - 10 Aug 2021
Cited by 47 | Viewed by 7631
Abstract
Photoacoustic imaging is a new type of noninvasive, nonradiation imaging modality that combines the deep penetration of ultrasonic imaging and high specificity of optical imaging. Photoacoustic imaging systems employing conventional ultrasonic sensors impose certain constraints such as obstructions in the optical path, bulky [...] Read more.
Photoacoustic imaging is a new type of noninvasive, nonradiation imaging modality that combines the deep penetration of ultrasonic imaging and high specificity of optical imaging. Photoacoustic imaging systems employing conventional ultrasonic sensors impose certain constraints such as obstructions in the optical path, bulky sensor size, complex system configurations, difficult optical and acoustic alignment, and degradation of signal-to-noise ratio. To overcome these drawbacks, an ultrasonic sensor in the optically transparent form has been introduced, as it enables direct delivery of excitation light through the sensors. In recent years, various types of optically transparent ultrasonic sensors have been developed for photoacoustic imaging applications, including optics-based ultrasonic sensors, piezoelectric-based ultrasonic sensors, and microelectromechanical system-based capacitive micromachined ultrasonic transducers. In this paper, the authors review representative transparent sensors for photoacoustic imaging applications. In addition, the potential challenges and future directions of the development of transparent sensors are discussed. Full article
(This article belongs to the Special Issue Photoacoustic Imaging and Systems)
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24 pages, 2562 KiB  
Review
Photoacoustic Imaging with Capacitive Micromachined Ultrasound Transducers: Principles and Developments
by Jasmine Chan, Zhou Zheng, Kevan Bell, Martin Le, Parsin Haji Reza and John T.W. Yeow
Sensors 2019, 19(16), 3617; https://doi.org/10.3390/s19163617 - 20 Aug 2019
Cited by 36 | Viewed by 9996
Abstract
Photoacoustic imaging (PAI) is an emerging imaging technique that bridges the gap between pure optical and acoustic techniques to provide images with optical contrast at the acoustic penetration depth. The two key components that have allowed PAI to attain high-resolution images at deeper [...] Read more.
Photoacoustic imaging (PAI) is an emerging imaging technique that bridges the gap between pure optical and acoustic techniques to provide images with optical contrast at the acoustic penetration depth. The two key components that have allowed PAI to attain high-resolution images at deeper penetration depths are the photoacoustic signal generator, which is typically implemented as a pulsed laser and the detector to receive the generated acoustic signals. Many types of acoustic sensors have been explored as a detector for the PAI including Fabry–Perot interferometers (FPIs), micro ring resonators (MRRs), piezoelectric transducers, and capacitive micromachined ultrasound transducers (CMUTs). The fabrication technique of CMUTs has given it an edge over the other detectors. First, CMUTs can be easily fabricated into given shapes and sizes to fit the design specifications. Moreover, they can be made into an array to increase the imaging speed and reduce motion artifacts. With a fabrication technique that is similar to complementary metal-oxide-semiconductor (CMOS), CMUTs can be integrated with electronics to reduce the parasitic capacitance and improve the signal to noise ratio. The numerous benefits of CMUTs have enticed researchers to develop it for various PAI purposes such as photoacoustic computed tomography (PACT) and photoacoustic endoscopy applications. For PACT applications, the main areas of research are in designing two-dimensional array, transparent, and multi-frequency CMUTs. Moving from the table top approach to endoscopes, some of the different configurations that are being investigated are phased and ring arrays. In this paper, an overview of the development of CMUTs for PAI is presented. Full article
(This article belongs to the Section Physical Sensors)
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11 pages, 2471 KiB  
Article
Single Transparent Piezoelectric Detector for Optoacoustic Sensing—Design and Signal Processing
by Elias Blumenröther, Oliver Melchert, Jonas Kanngießer, Merve Wollweber and Bernhard Roth
Sensors 2019, 19(9), 2195; https://doi.org/10.3390/s19092195 - 12 May 2019
Cited by 19 | Viewed by 4831
Abstract
In this article, we present a simple and intuitive approach to create a handheld optoacoustic setup for near field measurements. A single piezoelectric transducer glued in between two sheets of polymethyl methacrylate (PMMA) facilitates nearfield depth profiling of layered media. The detector electrodes [...] Read more.
In this article, we present a simple and intuitive approach to create a handheld optoacoustic setup for near field measurements. A single piezoelectric transducer glued in between two sheets of polymethyl methacrylate (PMMA) facilitates nearfield depth profiling of layered media. The detector electrodes are made of indium tin oxide (ITO) which is both electrically conducting as well as optically transparent, enabling an on-axis illumination through the detector. By mapping the active detector area, we show that it matches the design form precisely. We also present a straightforward approach to determine the instrument response function, which allows to obtain the original pressure profile arriving at the detector. To demonstrate the validity of this approach, the measurement on a simple test sample is deconvolved with the instrument response function and compared to simulation results. Except for the sputter instrumentation, all required materials and instruments as well as the tools needed to create such a setup are available to standard scientific laboratories. Full article
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Germany)
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11 pages, 840 KiB  
Article
Light-Intensity-Induced Characterization of Elastic Constants and d33 Piezoelectric Coefficient of PLZT Single Fiber Based Transducers
by Lucjan Kozielski, Jiri Erhart and Frank Jörg Clemens
Sensors 2013, 13(2), 2419-2429; https://doi.org/10.3390/s130202419 - 12 Feb 2013
Cited by 6 | Viewed by 8736
Abstract
Enhanced functionality of electro-optic devices by implementing piezoelectric micro fibers into their construction is proposed. Lanthanum-modified lead zirconate titanate (PLZT) ceramics are known to exhibit high light transparency, desirable electro-optic properties and fast response. In this study PLZT fibers with a diameter of [...] Read more.
Enhanced functionality of electro-optic devices by implementing piezoelectric micro fibers into their construction is proposed. Lanthanum-modified lead zirconate titanate (PLZT) ceramics are known to exhibit high light transparency, desirable electro-optic properties and fast response. In this study PLZT fibers with a diameter of around 300 microns were produced by a thermoplastic processing method and their light-induced impedance and piezoelectric coefficient were investigated at relatively low light intensity (below 50 mW/cm2). The authors experimentally proved higher performance of light controlled microfiber transducers in comparison to their bulk form. The advantage of the high surface area to volume ratio is shown to be an excellent technique to design high quality light sensors by using fibrous materials. The UV absorption induced change in elastic constants of 3% and 4% for the piezoelectric coefficient d33. Full article
(This article belongs to the Special Issue Piezoelectric Sensors and Actuators)
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