Search Results (20)

A comprehensive framework for designing a micro-nuclear magnetic resonance (NMR) front-end is presented. Key radio frequency (RF) engineering principles are established to enable efficient excitation and detection of NMR signals. This foundation aims to guide the optimal design of novel handheld NMR devices operating with magnetic fields ($B_0$) below 0.5 Tesla and RF frequencies under 30 MHz. To address the complexities of signal-to-noise ratio optimization in this regime, a specialized metric called the coil performance factor (CPF) is introduced, emphasizing the role of coil design. Through systematic optimization under realistic constraints, an optimal coil configuration maximizing the CPF is identified. This design, with three turns, a coil width of 0.22 mm, and a coil spacing of 0.15 mm, achieves an optimal balance between magnetic field strength, homogeneity, and noise. This work serves as a valuable resource for engineers developing optimized coil designs and RF solutions for handheld NMR devices, providing clear explanations of essential concepts and a practical design methodology. Full article

Rapid detection of a biological agent is essential to anticipate a threat to the protection of biodiversity and ecosystems. Our goal is to miniaturize a magnetic pathogen detection system in order to fabricate an efficient and portable system. The detection device is based on flat, multilayer coils associated with microfluidic structures to detect magnetic nanoparticles linked to pathogen agents. One type of immunological diagnosis is based on the measurement of the magnetic sensitivity of magnetic nanoparticles (MNPs), which are markers connected to pathogens. This method of analysis involves the coupling of antibodies or antigen proteins with MNPs. Among the available magnetic techniques, the frequency mixing method has a definite advantage by making it possible to quantify MNPs. An external magnetic field composed of a low- and a high-frequency field is applied to the sample reservoir. Then, the response signal is measured and analyzed. In this paper, magnetic microcoils are implemented on a multilayer Printed Circuit Board (PCB), and a microfluidics microstructure is designed in connection with the planar coils. Simulation software, COMSOL version 5.3, provides an analytical perspective to choose the number of turns in magnetic coils and to understand the effects of changing the shape and dimensions of the microfluidics microstructure. Full article

Magnetic microgrippers, with their miniaturized size, flexible movement, untethered actuation, and programmable deformation, can perform tasks such as cell manipulation, targeted drug delivery, biopsy, and minimally invasive surgery in hard-to-reach regions. However, common external magnetic-field-driving devices suffer from low efficiency and utilization due to the significant size disparity with magnetic microgrippers. Here, we introduce a microgripper robot (MGR) driven by end electromagnetic and permanent magnet collaboration. The magnetic field generated by the microcoils can be amplified by the permanent magnets and the direction can be controlled by changing the current, allowing for precise control over the opening and closing of the magnetic microgripper and enhancing its operational range. Experimental results demonstrate that the MGR can be flexibly controlled in complex constrained environments and is highly adaptable for manipulating objects. Furthermore, the MGR can achieve planar and antigravity object grasping and transportation within complex simulated human cavity pathways. The MGR’s grasping capabilities can also be extended to specialized tasks, such as circuit connection in confined spaces. The MGR combines the required safety and controllability for in vivo operations, making it suitable for potential clinical applications such as tumor or abnormal tissue sampling and surgical assistance. Full article

The miniaturization of quantum sensors is a popular trend for the development of quantum technology. One of the key components of these sensors is a coil which is used for spin modulation and manipulation. The bi-planar coils have the advantage of producing three-dimensional magnetic fields with only two planes of current confinement, whereas the traditional Helmholtz coils require three-dimensional current distribution. Thus, the bi-planar coils are compatible with the current micro-fabrication process and are quite suitable for the compact design of the chip-scale atomic devices that require stable or modulated magnetic fields. This paper presents a design of a miniature bi-planar coil. Both the magnetic fields produced by the coils and their inhomogeneities were designed theoretically. The magnetic field gradient is a crucial parameter for the coils, especially for generating magnetic fields in very small areas. We used a NMR (Nuclear Magnetic Resonance) method based on the relaxation of ${}^{131}Xe$ nuclear spins to measure the magnetic field gradient in situ. This is the first time that the field inhomogeneities of the field of such small bi-planar coils have been measured. Our results indicate that the designed gradient caused error is 0.08 for the $B_y$ and the $B_x$ coils, and the measured gradient caused error using the nuclear spin relaxation method is $0.09\pm 0.02$, suggesting that our method is suitable for measuring gradients. Due to the poor sensitivity of our magnetometer under a large $B_z$ bias field, we could not measure the $B_z$ magnetic field gradient. Our method also helps to improve the gradients of the miniature bi-planar coil design, which is critical for chip-scale atomic devices. Full article

In this paper, a new analytical method to achieve the maximum signal-to-noise ratio (SNR) of a micro search coil magnetometer (µSCM) is presented. A planar spiral inductor was utilized to miniaturize conventional bulky search coil magnetometers. First, dimensional analysis was applied to identify three dimensionless parameters for the µSCM’s key performance indices (sensitivity (S_e), noise, and SNR). The effect of the parameters on the µSCM’s performance was carefully investigated, and a novel 4D nomogram was developed. Furthermore, an SNR analysis considering noise sources of a low-noise amplifier was performed. By combining the results from the nomogram and the effect of the noise sources from the amplifier circuit, optimum values for the dimensionless parameters were calculated. According to the calculation results, the dominant noise source varied with an increase in the track width ratio to the outer diameter. Seven different samples were fabricated by a single-mask lithography process. The sensitivity of 1612 mV/mT was demonstrated at a 50 Hz input magnetic field, which was better than the previous µSCM (S_e = 6.5 mV/mT) by more than 2 orders of magnitude. Finally, one of the fabricated µSCMs was employed to measure the online power consumption of a personal computer while different types of software were running. Full article

The recent development of micro-fabrication technologies has provided new methods for researchers to design and fabricate micro metal coils, which will allow the coils to be smaller, lighter, and have higher performance than traditional coils. As functional components of electromagnetic equipment, micro metal coils are widely used in micro-transformers, solenoid valves, relays, electromagnetic energy collection systems, and flexible wearable devices. Due to the high integration of components and the requirements of miniaturization, the preparation of micro metal coils has received increasing levels of attention. This paper discusses the typical structural types of micro metal coils, which are mainly divided into planar coils and three-dimensional coils, and the characteristics of the different structures of coils. The specific preparation materials are also summarized, which provides a reference for the preparation process of micro metal coils, including the macro-fabrication method, MEMS (Micro-Electro-Mechanical System) processing technology, the printing process, and other manufacturing technologies. Finally, perspectives on the remaining challenges and open opportunities are provided to help with future research, the development of the Internet of Things (IoTs), and engineering applications. Full article

This paper presents the design of on-chip micro-antennas for package-scale galvanic isolators based on RF planar coupling. A step-by-step design procedure is proposed, which aims at the maximization of the weak electromagnetic coupling between the RX and TX antennas integrated on side-by-side co-packaged chips to enable both high isolation rating and common-mode transient immunity thanks to the high dielectric strength and low capacitive parasitics of a molding compound-based galvanic barrier, respectively. Micro-antenna design guidelines are drawn, highlighting the main relationship between coil coupling performance and their layout parameters, which are often in contrast with respect to traditional integrated inductor ones. Full article

With the rapid development of micro-electro-mechanical systems (MEMSs), the demand for glass microstructure is increasing. For the purpose of achieving high quality and stable machining of glass microstructures with a high aspect ratio, ultrasonic vibration is applied into the micro-wire electrochemical discharge machining (WECDM), which is proposed as ultrasonic vibration-assisted WECDM with a micro helical electrode. Firstly, the formation of a gas film on the surface of the helical electrode in WECDM machining is simulated, meaning the thickness of the gas film can be reduced by adding suitable ultrasonic amplitude, thus reducing the critical voltage, then the machining localization and stability were enhanced. Then, the micro helical electrode with a diameter of 100 μm is used to carry out sets of experiments that study the influence of ultrasonic amplitude, machining voltage, duty factor, pulse frequency, and feed rate on the slit width. The experimental results show that the machining stability and quality are significantly improved by adding suitable ultrasonic amplitude. When the amplitude was 5.25 μm, the average slit width was reduced to 128.63 μm with a decrease of 20.78%. Finally, with the optimized machining parameters, micro planar coil structure and microcantilever structure with a high aspect ratio were fabricated successfully on the glass plate. It is proved that ultrasonic vibration-assisted WECDM with the micro helical electrode method can meet the requirements of high aspect ratio microstructure machining for hard and brittle materials. Full article

We present a retrospective of unique micro-fabrication problems and solutions that were encountered through over 10 years of retinal prosthesis product development, first for the Boston Retinal Implant Project initiated at the Massachusetts Institute of Technology and at Harvard Medical School’s teaching hospital, the Massachusetts Eye and Ear—and later at the startup company Bionic Eye Technologies, by some of the same personnel. These efforts culminated in the fabrication and assembly of 256+ channel visual prosthesis devices having flexible multi-electrode arrays that were successfully implanted sub-retinally in mini-pig animal models as part of our pre-clinical testing program. We report on the processing of the flexible multi-layered, planar and penetrating high-density electrode arrays, surgical tools for sub-retinal implantation, and other parts such as coil supports that facilitated the implantation of the peri-ocular device components. We begin with an overview of the implantable portion of our visual prosthesis system design, and describe in detail the micro-fabrication methods for creating the parts of our system that were assembled outside of our hermetically-sealed electronics package. We also note the unique surgical challenges that sub-retinal implantation of our micro-fabricated components presented, and how some of those issues were addressed through design, materials selection, and fabrication approaches. Full article

The design, analysis, and simulation of a new Micro-electromechanical System (MEMS) gyroscope based on differential tunneling magnetoresistance sensing are presented in this paper. The device is driven by electrostatic force, whereas the Coriolis displacements are transferred to intensity variations of magnetic fields, further detected by the Tunneling Magnetoresistance units. The magnetic fields are generated by a pair of two-layer planar multi-turn copper coils that are coated on the backs of the inner masses. Together with the dual-mass structure of proposed tuning fork gyroscope, a two-stage differential detection is formed, thereby enabling rejection of mechanical and magnetic common-mode errors concurrently. The overall conception is described followed by detailed analyses of proposed micro-gyroscope and rectangle coil. Subsequently, the FEM simulations are implemented to determine the mechanical and magnetic characteristics of the device separately. The results demonstrate that the micro-gyroscope has a mechanical sensitivity of 1.754 nm/°/s, and the micro-coil has a maximum sensitivity of 41.38 mOe/µm. When the detection height of Tunneling Magnetoresistance unit is set as 60 µm, the proposed device exhibits a voltage-angular velocity sensitivity of 0.131 mV/°/s with a noise floor of 7.713 × 10⁻⁶°/s/$\sqrt{\mathrm{Hz}}$ in the absence of any external amplification. Full article

In this study, a microfluidic chip with integrated coil was designed and fabricated for the aim of effectively trapping magnetic nanobeads (Adembeads^®, 300 nm) and measuring the chip’s temperature during the working time. In addition, a reversible technique of bonding Polydimethylsiloxane (PDMS) channels was presented. This bonding process used a coating layer of CYTOP^®product as a protection, insulation and low-adhesion layer. The reversible packaging technique allows the bottom substrate to be reused, possibly equipped with sensors, and to use a disposable microchannels network. The FE method was employed to calculate the magnetic field and power consumption by the ANSYS^® version 12.1 software. Merit factors were defined in order to synthetically represent the ability of the simulated coil to trap beads for a unit power consumption, i.e. a given heat generation. The simulation results propose a new approach to optimize the design criteria in fabricating planar microcoils. The optimal microcoils were fabricated and then used to realize a magnetic immunoassay in a microfluidic chip. The aim was to integrate these microcoils into a lab-on-chip and obtain a fast and highly sensitive biological element detection. Full article

This paper reports the design, simulation and experimental study of a linear magnetic microactuator for portable electronic equipment and microsatellite high resolution remote sensing technology. The linear magnetic microactuator consists of a planar microcoil, a supporter and a microspring. Its bistable mechanism can be kept without current by external permanent magnetic force, and can be switched by the bidirectional electromagnetic force. The linearization and threshold of the bistable mechanism was optimized by topology structure design of the microspring. The linear microactuator was then fabricated based on non-silicon technology and the prototype was tested. The testing results indicated that the bistable mechanism was realized with a fast response of 0.96 ms, which verified the simulation and analysis. Full article

The aim of this work is to develop a completely integrated Lab-On-Chip (LOC) for easy, rapid and cost-effective immunoassays. The pathogen sensing system is composed of a microfluidic channel surrounded by planar microcoils which are responsible for the emission and the detection of magnetic fields. The system allows the detection and quantification of superparamagnetic beads used for immunoassays in a “sandwich” antigen-antibody configuration. Multiphysics simulations have been achieved and preliminary experimental results have allowed to validate the structure. Full article

The fabrication of electroplated planar copper microcoils for telemetric orthodontic applications is presented. A set of microcoils with overall dimensions of 2 × 2.5 × 0.5 mm³, track widths down to 5 μm and turn numbers up to 35 were fabricated on glass substrates. The coils were electrically characterized and assembled via flip-chip bonding onto a stress-mapping CMOS chip for smart orthodontic brackets. The passive system was successfully read out telemetrically with a reader microcoil for a coil-coil distance of 1 mm at 13.56 MHz. The digital signal representing the measured stress values was extracted telemetrically using a commercially available RFID reader. Full article

In this paper, we describe the fabrication of miniaturized flexible Radio frequency RF microcoil for Nuclear Magnetic Resonance (NMR), which have been constructed based on Micro Electro Mechanical Systems (MEMS) technology. 3D Electromagnetic numerical simulations of the physical properties of this microcoil were conducted using Multiphysics software. Numerical simulation shows that the rectangular microantenna (500 × 1000 μm²) on kapton substrate has efficient results in terms of magnetic field, inductance, magnetic energy and resistive losses. This micro-coil is fabricated with three mask levels on polyimide substrate using micromoulding technology. Full article