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Keywords = heater metallisation

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15 pages, 276 KiB  
Article
High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
by Jan Spannhake, Olaf Schulz, Andreas Helwig, Angelika Krenkow, Gerhard Müller and Theodor Doll
Sensors 2006, 6(4), 405-419; https://doi.org/10.3390/s6040405 - 7 Apr 2006
Cited by 85 | Viewed by 23663
Abstract
Micromachined thermal heater platforms offer low electrical power consumptionand high modulation speed, i.e. properties which are advantageous for realizing non-dispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report oninvestigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated byemploying [...] Read more.
Micromachined thermal heater platforms offer low electrical power consumptionand high modulation speed, i.e. properties which are advantageous for realizing non-dispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report oninvestigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated byemploying different kinds of metallic and semiconductor heater materials. Our resultsclearly reveal the superior high-temperature performance of semiconductor over metallicheater materials. Long-term stable emitter operation in the vicinity of 1300 K could beattained using heavily antimony-doped tin dioxide (SnO2:Sb) heater elements. Full article
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