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18 pages, 19901 KB  
Article
A Novel Polysilicon-Fill-Strengthened Etch-Through 3D Trench Electrode Detector: Fabrication Methods and Electrical Property Simulations
by Xuran Zhu, Zheng Li, Zhiyu Liu, Tao Long, Jun Zhao, Xinqing Li, Manwen Liu and Meishan Wang
Micromachines 2025, 16(8), 912; https://doi.org/10.3390/mi16080912 - 6 Aug 2025
Cited by 1 | Viewed by 613
Abstract
Three-dimensional trench electrode silicon detectors play an important role in particle physics research, nuclear radiation detection, and other fields. A novel polysilicon-fill-strengthened etch-through 3D trench electrode detector is proposed to address the shortcomings of traditional 3D trench electrode silicon detectors; for example, the [...] Read more.
Three-dimensional trench electrode silicon detectors play an important role in particle physics research, nuclear radiation detection, and other fields. A novel polysilicon-fill-strengthened etch-through 3D trench electrode detector is proposed to address the shortcomings of traditional 3D trench electrode silicon detectors; for example, the distribution of non-uniform electric fields, asymmetric electric potential, and dead zone. The physical properties of the detector have been extensively and systematically studied. This study simulated the electric field, potential, electron concentration distribution, complete depletion voltage, leakage current, capacitance, transient current induced by incident particles, and weighting field distribution of the detector. It also systematically studied and analyzed the electrical characteristics of the detector. Compared to traditional 3D trench electrode silicon detectors, this new detector adopts a manufacturing process of double-side etching technology and double-side filling technology, which results in a more sensitive detector volume and higher electric field uniformity. In addition, the size of the detector unit is 120 µm × 120 µm × 340 µm; the structure has a small fully depleted voltage, reaching a fully depleted state at around 1.4 V, with a saturation leakage current of approximately 4.8×1010A, and a geometric capacitance of about 99 fF. Full article
(This article belongs to the Special Issue Photonic and Optoelectronic Devices and Systems, Third Edition)
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15 pages, 3025 KB  
Article
High-Power-Density Miniaturized VLF Antenna with Nanocrystalline Core for Enhanced Field Strength
by Wencheng Ai, Huaning Wu, Lin Zhao and Hui Xie
Nanomaterials 2025, 15(14), 1062; https://doi.org/10.3390/nano15141062 - 9 Jul 2025
Viewed by 738
Abstract
In order to break through the difficulties with a very-low-frequency (VLF) miniaturized antenna with small power capacity and low radiation efficiency, this paper proposes a high-radiation-field-strength magnetic loop antenna based on a nanocrystalline alloy magnetic core. A high-permeability nanocrystalline toroidal core (μ [...] Read more.
In order to break through the difficulties with a very-low-frequency (VLF) miniaturized antenna with small power capacity and low radiation efficiency, this paper proposes a high-radiation-field-strength magnetic loop antenna based on a nanocrystalline alloy magnetic core. A high-permeability nanocrystalline toroidal core (μr = 50,000, Bs = 1.2 T) is used to optimize the thickness-to-diameter ratio (t = 0.08) and increase the effective permeability to 11,000. The Leeds wires, characterized by their substantial carrying capacity, are manufactured through a toroidal winding process. This method results in a 68% reduction in leakage compared to traditional radial winding techniques and enhances magnetic induction strength by a factor of 1.5. Additionally, this approach effectively minimizes losses, thereby facilitating support for kilowatt-level power inputs. A cascaded LC resonant network (resonant capacitance 2.3 μF) and ferrite balun transformer (power capacity 3.37 kW) realize a 20-times amplification of the input current. A series connection of a high-voltage isolation capacitor blocks DC bias noise, guaranteeing the stable transmission of 1200 W power, which is 6 times higher than the power capacity of traditional ring antenna. At 7.8 kHz frequency, the magnetic field strength at 120 m reaches 47.32 dBμA/m, and, if 0.16 pT is used as the threshold, the communication distance can reach 1446 m, which is significantly better than the traditional solution. This design marks the first instance of achieving kilowatt-class VLF effective radiation in a compact 51 cm-diameter magnetic loop antenna, offering a highly efficient solution for applications such as mine communication and geological exploration. Full article
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15 pages, 3286 KB  
Article
Enhanced Sensitivity Microfluidic Microwave Sensor for Liquid Characterization
by Kim Ho Yeap, Kai Bor Tan, Foo Wei Lee, Han Kee Lee, Nuraidayani Effendy, Wei Chun Chin and Pek Lan Toh
Processes 2025, 13(7), 2183; https://doi.org/10.3390/pr13072183 - 8 Jul 2025
Viewed by 832
Abstract
This paper presents the development and analysis of a planar microfluidic microwave sensor featuring three circular complementary split-ring resonators (CSRRs) fabricated on an RO3035 substrate. The sensor demonstrates enhanced sensitivity in characterizing liquids contained in a fine glass capillary tube by leveraging a [...] Read more.
This paper presents the development and analysis of a planar microfluidic microwave sensor featuring three circular complementary split-ring resonators (CSRRs) fabricated on an RO3035 substrate. The sensor demonstrates enhanced sensitivity in characterizing liquids contained in a fine glass capillary tube by leveraging a novel configuration: a central 5-split-ring CSRR with a drilled hole to suspend the capillary, flanked by two 2-split-ring CSRRs to improve the band-stop filtering effect. The sensor’s performance is benchmarked against another CSRR-based microwave sensor with a similar configuration. High linearity is observed (R2 > 0.99), confirming its capability for precise ethanol concentration prediction. Compared to the replicated square CSRR design from the literature, the proposed sensor achieves a 35.22% improvement in sensitivity, with a frequency shift sensitivity of 567.41 kHz/% ethanol concentration versus 419.62 kHz/% for the reference sensor. The enhanced sensitivity is attributed to several key design strategies: increasing the intrinsic capacitance by enlarging the effective area and radial slot width to amplify edge capacitive effects, adding more split rings to intensify the resonance dip, placing additional CSRRs to improve energy extraction at resonance, and adopting circular CSRRs for superior electric field confinement. Additionally, the proposed design operates at a lower resonant frequency (2.234 GHz), which not only reduces dielectric and radiation losses but also enables the use of more cost-effective and power-efficient RF components. This advantage makes the sensor highly suitable for integration into portable and standalone sensing platforms. Full article
(This article belongs to the Special Issue Development of Smart Materials for Chemical Sensing)
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10 pages, 2516 KB  
Communication
A Design of a Leaf-Shaped Biomimetic Flexible Wideband Antenna
by Siwei Tan, Linsen Zhang, Qiang Sun, Bo Tang and Qiyang Wang
Electronics 2025, 14(13), 2620; https://doi.org/10.3390/electronics14132620 - 28 Jun 2025
Cited by 1 | Viewed by 515
Abstract
In low-detectability application scenarios such as covert reconnaissance, wildlife behavior observation, and battlefield detection, antennas not only need to have wideband performance but also require good biomimetic camouflage characteristics. To address this issue, this article proposes a leaf-shaped biomimetic flexible wideband antenna. The [...] Read more.
In low-detectability application scenarios such as covert reconnaissance, wildlife behavior observation, and battlefield detection, antennas not only need to have wideband performance but also require good biomimetic camouflage characteristics. To address this issue, this article proposes a leaf-shaped biomimetic flexible wideband antenna. The design concept of the antenna is inspired by the symmetrical vein structure of aquifoliaceae leaves, incorporating vein-like slots into the radiation patch to form multiple inter-slot capacitances, which improves the high-frequency resonance behavior and expands the antenna’s operating bandwidth. In addition, the traditional rectangular grounding plane is replaced with a semi-elliptical shape, optimizing the electric field distribution between the feed line and the radiation part, thereby improving impedance matching. The measured results show that the leaf-shaped antenna achieves a relative bandwidth of 100% (2.4 GHz–7.1 GHz), with its operating frequency bands covering several common communication bands such as n41, n78, n79, and ISM 5.8 GHz, with a maximum gain of 5.4 dBi. Additionally, the leaf-shaped antenna has a good resemblance to the shape of aquifoliaceae leaves. The antenna’s performance remains relatively stable with bending radii of 40 mm, 50 mm, and 60 mm, demonstrating an important role in camouflage application scenarios. Full article
(This article belongs to the Section Microwave and Wireless Communications)
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14 pages, 10262 KB  
Article
A Trident-Fed Wine Glass UWB Antenna Based on Bézier Curve Optimization
by Chheang Ly and Jae-Young Chung
Electronics 2025, 14(13), 2560; https://doi.org/10.3390/electronics14132560 - 24 Jun 2025
Viewed by 463
Abstract
This work introduces a wine glass-shaped planar ultra-wideband (UWB) antenna. The antenna achieves a compact form factor by reducing lateral width through Bézier curve shaping and a trident feed, while maintaining length for low-frequency operation. The wine-glass-shaped radiator increases shunt capacitance and enhances [...] Read more.
This work introduces a wine glass-shaped planar ultra-wideband (UWB) antenna. The antenna achieves a compact form factor by reducing lateral width through Bézier curve shaping and a trident feed, while maintaining length for low-frequency operation. The wine-glass-shaped radiator increases shunt capacitance and enhances midband impedance matching, as demonstrated by equivalent circuit analysis, while the trident feed improves matching at higher frequencies. This design yields a 92% fractional bandwidth (3.2–8.7 GHz) within a compact volume of 0.37λ0×0.13λ0×0.0013λ0. The prototype is fabricated on two 50-μm-thick polyimide flexible copper-clad laminates (FCCL), and its performance is evaluated in an anechoic chamber. The measured results demonstrate omnidirectional radiation with an efficiency of over 80% across the UWB band. With broad operational range and compactness, the antenna is well-suited for IoT and wearable sensing applications. Full article
(This article belongs to the Section Microwave and Wireless Communications)
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27 pages, 3152 KB  
Article
Validation of a Low-Cost Open-Ended Coaxial Probe Setup for Broadband Permittivity Measurements up to 6 GHz
by Julia Arias-Rodríguez, Raúl Moreno-Merín, Andrea Martínez-Lozano, Germán Torregrosa-Penalva and Ernesto Ávila-Navarro
Sensors 2025, 25(13), 3935; https://doi.org/10.3390/s25133935 - 24 Jun 2025
Viewed by 1179
Abstract
This work presents the validation of a low-cost measurement system based on an open-ended coaxial SMA (SubMiniature version A) probe for the characterization of complex permittivity in the microwave frequency range. The system combines a custom-fabricated probe, a vector network analyzer, and a [...] Read more.
This work presents the validation of a low-cost measurement system based on an open-ended coaxial SMA (SubMiniature version A) probe for the characterization of complex permittivity in the microwave frequency range. The system combines a custom-fabricated probe, a vector network analyzer, and a dedicated software application that implements three analytical models: capacitive, radiation, and virtual transmission line models. A comprehensive experimental campaign was carried out involving pure polar liquids, saline solutions, and biological tissues, with the measurements compared against those obtained using a high-precision commercial probe. The results confirm that the proposed system is capable of delivering accurate and reproducible permittivity values up to at least 6 GHz. Among the implemented models, the radiation model demonstrated the best overall performance, particularly in biological samples. Additionally, reproducibility tests with three independently assembled SMA probes showed normalized deviations below 3%, confirming the robustness of the design. These results demonstrate that the proposed system constitutes a viable alternative for cost-sensitive applications requiring portable or scalable microwave dielectric characterization. Full article
(This article belongs to the Special Issue Advanced Microwave Sensors and Their Applications in Measurement)
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43 pages, 10261 KB  
Review
X-Ray and UV Detection Using Synthetic Single Crystal Diamond
by Maurizio Angelone, Francesca Bombarda, Silvia Cesaroni, Marco Marinelli, Angelo Maria Raso, Claudio Verona and Gianluca Verona-Rinati
Instruments 2025, 9(2), 9; https://doi.org/10.3390/instruments9020009 - 11 Apr 2025
Cited by 3 | Viewed by 3287
Abstract
Diamond is a semiconductor with a large band gap (5.48 eV), high carrier mobility (the highest for holes), high electrical resistance and low capacitance. Thanks to its outstanding properties, diamond-based detectors offer several advantages, among others: high signal-to-noise ratio, fast response, intrinsic pulse-shape [...] Read more.
Diamond is a semiconductor with a large band gap (5.48 eV), high carrier mobility (the highest for holes), high electrical resistance and low capacitance. Thanks to its outstanding properties, diamond-based detectors offer several advantages, among others: high signal-to-noise ratio, fast response, intrinsic pulse-shape discrimination capabilities for distinguishing different types of radiation, as well as operation in pulse and current modes. The mentioned properties meet most of the demanding requests that a radiation detection material must fulfil. Diamond detectors are suited for detecting almost all types of ionizing radiation including X-ray and UV photons, resulting also in blindness to visible photons and are used in a wide range of applications including ones requiring the capability to withstand harsh environments. After reviewing the fundamental physical properties of synthetic single crystal diamond (SCD) grown by microwave plasma enhanced chemical vapor deposition (MWPECVD) technique and the basic principles of diamond-photon interactions and detection, the paper focuses on SCD detectors developed for X-ray and UV detection, discussing their configurations, construction techniques, advantages, and drawbacks. Applications ranging from X-ray detection around accelerators to UV detection for fusion plasmas are addressed, and future trends are highlighted too. Full article
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18 pages, 5794 KB  
Article
A Novel Capacitive Model of Radiators for Building Dynamic Simulations
by Francesco Calise, Francesco Liberato Cappiello, Luca Cimmino, Massimo Dentice d’Accadia and Maria Vicidomini
Thermo 2025, 5(1), 9; https://doi.org/10.3390/thermo5010009 - 11 Mar 2025
Cited by 1 | Viewed by 1731
Abstract
This study addresses the critical challenge of performing a detailed calculation of energy savings in buildings by implementing suitable actions aiming at reducing greenhouse gas emissions. Given the high energy consumption of buildings’ space heating systems, optimizing their performance is crucial for reducing [...] Read more.
This study addresses the critical challenge of performing a detailed calculation of energy savings in buildings by implementing suitable actions aiming at reducing greenhouse gas emissions. Given the high energy consumption of buildings’ space heating systems, optimizing their performance is crucial for reducing their overall primary energy demand. Unfortunately, the calculations of such savings are often based on extremely simplified methods, neglecting the dynamics of the emitters installed inside the buildings. These approximations may lead to relevant errors in the estimation of the possible energy savings. In this framework, the present study presents a novel 0-dimensional capacitive model of a radiator, the most common emitter used in residential buildings. The final scope of this paper is to integrate such a novel model within the TRNSYS 18simulation environment, performing a 1-year simulation of the overall building-space heating system. The radiator model is developed in MATLAB 2024b and it carefully considers the impact of surface area, inlet temperature, and flow rate on the radiator performance. Moreover, the dynamic heat transfer rate of the capacitive radiator is compared with the one returned by the built-in non-capacitive model available in TRNSYS, showing that neglecting the capacitive effect of radiators leads to an incorrect estimation of the heating consumption. During the winter season, with a heating system turned on from 8 a.m. to 4 p.m. and from 6 p.m. to 8 p.m., the thermal energy is underestimated by roughly 20% with the commonly used non-capacitive model. Full article
(This article belongs to the Special Issue Innovative Technologies to Optimize Building Energy Performance)
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16 pages, 5242 KB  
Article
Microwave-Assisted Preparation of Hierarchical Porous Carbon Aerogels Derived from Food Wastes for Supercapacitors
by Zijun Dong, Tong Li, Xinghe Xu, Yi Chen, Jiemei Fu and Shichang Sun
Nanomaterials 2025, 15(5), 387; https://doi.org/10.3390/nano15050387 - 2 Mar 2025
Cited by 1 | Viewed by 1342
Abstract
Preparing carbon aerogel in an eco-friendly and inexpensive manner remains a significant challenge. The carbon aerogels derived from food waste (FWCAs) with a three-dimensional connected network structure are successfully synthesized using microwave radiation. The as-prepared FWCA-4 (The KOH/C ratio is 4) has a [...] Read more.
Preparing carbon aerogel in an eco-friendly and inexpensive manner remains a significant challenge. The carbon aerogels derived from food waste (FWCAs) with a three-dimensional connected network structure are successfully synthesized using microwave radiation. The as-prepared FWCA-4 (The KOH/C ratio is 4) has a large specific surface area (1470 m2/g), pore volume (0.634 m3/g), and a high degree of graphitization. Band-like lattice stripes with a spacing of 0.34 nm, corresponding to the graphite plane, are observed. A high specific capacitance of 314 F/g at 1.0 A/g and an excellent capacitance retention (>90% after 10,000 cycles) make the FWCA-4 suitable for high-performance supercapacitor electrode materials. Furthermore, the specific surface area and pore volume of FWCA-4 are larger and the degree of graphitization is higher than in ordinary porous carbon derived from food waste (FWPC). The assembled symmetrical solid capacitor from FWCA-4 exhibits a maximum energy density of approximately 179.9 W/kg in neutral ion electrolytes. Thus, food waste is successfully used to prepare carbon aerogels through a gelation process using microwave radiation. The recycling of waste biomass is achieved, and the results provide insights for the preparation of carbon aerogels using biomass. Full article
(This article belongs to the Special Issue Nanomaterials for Sustainable Green Energy)
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19 pages, 3582 KB  
Article
Comparative Analysis of the Selected Photoreceiver Input Stages in Terms of Noise
by Krzysztof Achtenberg and Zbigniew Bielecki
Sensors 2025, 25(5), 1359; https://doi.org/10.3390/s25051359 - 23 Feb 2025
Viewed by 1464
Abstract
Semiconductor radiation detectors usually use a specific signal conditioning circuit, ensuring the required detection system parameters. This paper details the noise properties of specific input stages in photoreceivers that detect various types of radiation. For this purpose, the popular silicon PIN photodiode (BPW34) [...] Read more.
Semiconductor radiation detectors usually use a specific signal conditioning circuit, ensuring the required detection system parameters. This paper details the noise properties of specific input stages in photoreceivers that detect various types of radiation. For this purpose, the popular silicon PIN photodiode (BPW34) and two different types of low-noise operational amplifiers (AD797A and ADA4625-1) were used. In the presented experiments, noise measurements were provided for voltage and transimpedance amplifiers operating in input stages, comparing their noise and bandwidths. This made it possible to obtain results for bipolar junction transistor (BJT)- and field-effect transistor (FET)-based input stages of circuity, cooperating directly with a photodiode. Analyzing the obtained characteristics and considering the photodiode operation mode, it is evident that the transimpedance amplifier and photoconductive mode should be considered a typical first-choice solution. In some cases, the performances, such as bandwidth and noise, may be similar to those of voltage. Nevertheless, the bias method used in TIA and feedback compensation can also affect the resulting output noise spectral characteristics due to the photodiode and other capacitances existing in the circuit. In the case of a high transimpedance, the FET-based op-amps ensure lower output noise than the BJT-based ones due to the significantly lower current noise. The simple radiation detector with two-channel differential TIA was also proposed and tested based on the results obtained. Full article
(This article belongs to the Section Electronic Sensors)
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14 pages, 3597 KB  
Article
TCAD Simulation Study of Electrical Performance of a Novel High-Purity Germanium Drift Detector
by Mingyang Wang, Zheng Li, Bo Xiong and Yongguang Xiao
Micromachines 2025, 16(2), 229; https://doi.org/10.3390/mi16020229 - 17 Feb 2025
Cited by 3 | Viewed by 1162
Abstract
High-purity germanium (HPGe) detectors occupy a prominent position in fields such as radiation detection and aerospace because of their excellent energy resolution and wide detection range. To achieve a broader detection range, conventional HPGe detectors often need to be expanded to cubic-centimeter-scale volumes. [...] Read more.
High-purity germanium (HPGe) detectors occupy a prominent position in fields such as radiation detection and aerospace because of their excellent energy resolution and wide detection range. To achieve a broader detection range, conventional HPGe detectors often need to be expanded to cubic-centimeter-scale volumes. However, this increase in volume leads to a large detector area, which in turn increases the detector capacitance, affecting the detector’s noise level and performance. To address this issue, this study proposes a novel high-purity germanium drift detector (HPGeDD). The design features a small-area central collecting cathode surrounded by concentric anode rings, with a resistive chain interposed between the anode rings to achieve self-dividing voltage. This design ensures that the detector’s capacitance is only related to the area of the central collecting cathode, independent of the overall active area, thus achieving a balance between a small capacitance and large active area. Electrical performance simulations of the novel detector were conducted using the semiconductor simulation software Sentaurus TCAD (P-2019.03). The results show a smooth electric potential distribution within the detector, forming a lateral electric field, as well as a lateral hole drift channel precisely directed toward the collecting cathode. Furthermore, simulations of heavy ion incidence were performed to investigate the detector’s carrier collection characteristics. The simulation results demonstrate that the HPGeDD exhibits advantages such as fast signal response and short collection time. The design proposal presented in this study offers a new solution to the problem of excessive capacitance in conventional HPGe detectors, expands their application scope, and provides theoretical guidance for subsequent improvements, optimizations, and practical manufacturing. Full article
(This article belongs to the Special Issue Photonic and Optoelectronic Devices and Systems, Third Edition)
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17 pages, 15611 KB  
Article
A Reading Range- and Frequency-Reconfigurable Antenna for Near-Field and Far-Field UHF RFID Applications
by Chenyang Song and Zhipeng Wu
Sensors 2025, 25(2), 408; https://doi.org/10.3390/s25020408 - 11 Jan 2025
Cited by 1 | Viewed by 1926
Abstract
In radio frequency identification (RFID), differences in spectrum policies and tag misreading in different countries are the two main issues that limit its application. To solve these problems, this article proposes a composite right/left-handed transmission line (CRLH-TL)-based reconfigurable antenna for ultra-high frequency near-field [...] Read more.
In radio frequency identification (RFID), differences in spectrum policies and tag misreading in different countries are the two main issues that limit its application. To solve these problems, this article proposes a composite right/left-handed transmission line (CRLH-TL)-based reconfigurable antenna for ultra-high frequency near-field and far-field RFID reader applications. The CRLH-TL is achieved using a periodically capacitive gap-loaded parallel plate line. By deploying the CRLH-TL operating at zeroth-order resonance, a loop antenna with in-phase radiating current is obtained, which contributes to a strong and uniform H-field and a horizontally polarized omnidirectional radiation pattern. By introducing additional tunable components, frequency and reading range reconfigurabilities are enabled. The frequency tuning range is from 833 MHz to 979 MHz, which covers the worldwide UHF RFID band. Moreover, each operation mode has a narrow frequency band, which means it can operate without violating different countries’ radio frequency policy and reduce the design difficulty of designing multiple versions of a reader. Both the near-field interrogation zone and maximum far-field reading distance of the antenna are adjustable. The near-field interrogation zone is 400 mm × 400 mm × 50 mm and can be further confined. The tuning range for far-field reading distance is from 2.71 m to 0.35 m. Full article
(This article belongs to the Special Issue RFID and Zero-Power Backscatter Sensors)
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10 pages, 4829 KB  
Article
X-Ray Performance of SiC NPN Radiation Detector
by Jing Wang, Leidang Zhou, Liang Chen, Silong Zhang, Fangbao Wang, Tingting Fan, Zhuo Chen, Song Bai and Xiaoping Ouyang
Micromachines 2025, 16(1), 2; https://doi.org/10.3390/mi16010002 - 24 Dec 2024
Cited by 2 | Viewed by 1296
Abstract
In this paper, a silicon carbide (SiC) phototransistor based on an open-base structure was fabricated and used as a radiation detector. In contrast to the exposed and thin sensitive region of traditional photo detectors, the sensitive region of the radiation detector was much [...] Read more.
In this paper, a silicon carbide (SiC) phototransistor based on an open-base structure was fabricated and used as a radiation detector. In contrast to the exposed and thin sensitive region of traditional photo detectors, the sensitive region of the radiation detector was much thicker (30 μm), ensuring the high energy deposition of radiation particles. The response properties of the fabricated SiC npn radiation detector were characterized by high-energy X-ray illumination with a maximum X-ray photon energy of 30 keV. The SiC npn detector featured stable and clear response to the X-ray within 0.0766 Gy∙s−1 to 0.766 Gy∙s−1 below 300 V. Due to to the low leakage current of less than 1 nA and the fully depleted sensitive region, the bipolar-transistor-modeled SiC npn detector exhibited a clear common-emitter current gain of 5.85 at 200 V (under 0.383 Gy∙s−1), where the gain increased with bias voltage due to the Early effect and reached 7.55 at 300 V. In addition, the transient response of the SiC npn detector revealed a longer delay time than the SiC diode of the same size, which was associated with the larger effective capacitance of the npn structure. The npn detector with internal gain showed great potential in radiation detection. Full article
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10 pages, 4180 KB  
Proceeding Paper
The Influence of MIM Metamaterial Absorbers on the Thermal and Electro-Optical Characteristics of Uncooled CMOS-SOI-MEMS Infrared Sensors
by Moshe Avraham, Mikhail Klinov and Yael Nemirovsky
Eng. Proc. 2024, 82(1), 11; https://doi.org/10.3390/ecsa-11-20442 - 25 Nov 2024
Cited by 1 | Viewed by 913
Abstract
Uncooled infrared (IR) sensors, including bolometers, thermopiles, and pyroelectrics, have traditionally dominated the market. Nevertheless, a new innovative technology, dubbed the TMOS sensor, has emerged. It is based on CMOS-SOI-MEMS (complementary-metal-oxide-semiconductor silicon-on-insulator micro-electromechanical systems) fabrication. This pioneering technology utilizes a suspended, micro-machined, thermally [...] Read more.
Uncooled infrared (IR) sensors, including bolometers, thermopiles, and pyroelectrics, have traditionally dominated the market. Nevertheless, a new innovative technology, dubbed the TMOS sensor, has emerged. It is based on CMOS-SOI-MEMS (complementary-metal-oxide-semiconductor silicon-on-insulator micro-electromechanical systems) fabrication. This pioneering technology utilizes a suspended, micro-machined, thermally insulated transistor to directly convert absorbed infrared radiation into an electrical signal. The miniaturization of IR sensors, including the TMOS, is crucial for seamless integration into wearable and mobile technologies. However, this presents a significant challenge: balancing size reduction with sensor sensitivity. Smaller sensor footprints can often lead to decreased signal capture and, consequently, diminished performance. Metamaterial advancements offer a promising solution to this challenge. These engineered materials exhibit unique electromagnetic properties that can potentially boost sensor sensitivity while enabling miniaturization. The strategic integration of metamaterials into sensor design offers a pathway towards compact, high-sensitivity IR systems with diverse applications. This study explores the impact of electro-optical metal-insulator-metal (MIM) metamaterial absorbers on the thermal and electro-optical characteristics of CMOS-SOI-MEMS sensors in the mid-IR region. We target the key thermal properties critical to IR sensor performance: thermal conductance (Gth), thermal capacitance (Cth), and thermal time constant (τth). This study shows how material selection, layer thickness, and metamaterial geometry fill-factor affect the sensor’s thermal performance. An analytical thermal model is employed alongside 3D finite element software for precise numerical simulations. Full article
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10 pages, 2849 KB  
Article
Effects of 10 keV Electron Irradiation on the Performance Degradation of SiC Schottky Diode Radiation Detectors
by Jinlu Ruan, Liang Chen, Leidang Zhou, Xue Du, Fangbao Wang, Yapeng Zhang, Penghui Zhao and Xiaoping Ouyang
Micromachines 2024, 15(11), 1331; https://doi.org/10.3390/mi15111331 - 30 Oct 2024
Cited by 2 | Viewed by 1231
Abstract
The silicon carbide (SiC) Schottky diode (SBD) detector in a SiC hybrid photomultiplier tube (HPMT) generates signals by receiving photocathode electrons with an energy of 10 keV. So, the performance of the SiC SBD under electron irradiation with an energy of 10 keV [...] Read more.
The silicon carbide (SiC) Schottky diode (SBD) detector in a SiC hybrid photomultiplier tube (HPMT) generates signals by receiving photocathode electrons with an energy of 10 keV. So, the performance of the SiC SBD under electron irradiation with an energy of 10 keV has an important significance for the application of the SiC-HPMT. However, studies on 10 keV radiation effects on the SiC SBDs were rarely reported. In this paper, the performance degradation of the SiC SBDs irradiated by 10 keV electrons at different fluences was investigated. After the irradiation, the forward current of the SiC SBDs increased, and the turn-on voltage decreased with the irradiation fluences until 1.6 × 1016 cm−2. According to the capacitance–voltage (C-V) curves, the effective doping concentration increased slightly after the irradiation, and an obvious discrepancy of C-V curves occurred below 5 V. Moreover, as a radiation detector, the peak position of the α-particles’ amplitude spectrum changed slightly, and the energy resolution was also slightly reduced after the irradiation due to the high collection charge efficiency (CCE) still being larger than 99.5%. In addition, the time response of the SiC SBD to the 50 ns pulsed X-ray was almost not affected by the irradiation. The results indicated that the performance degradation of the SiC SBD irradiated at the fluence of 1.5 × 1017 cm−2 would not result in a deterioration of the properties of the SiC-HPMT and showed an important significance for the supplement of the radiation resistance of the SiC SBD radiation detector. Full article
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