Search Results (70)

The paper presents some design principles of an inductive displacement transducer for measuring the displacement of rock specimens under high hydrostatic pressure. It consists of a single-layer, coreless solenoid mounted directly onto the specimen and connected to an LC oscillator located outside the pressure chamber, in which it serves as the inductive component. The specimen’s deformation changes the coil’s length and inductance, thereby altering the oscillator’s resonant frequency. Paired with a reference coil, the system achieves strain resolution of ~100 nm at pressures exceeding 400 MPa. Sensor design challenges include both electrical parameters (inductance and resistance of the sensor, capacitance of the resonant circuit) and mechanical parameters (number and diameter of coil turns, their positional stability, wire diameter). The basic requirement is to achieve stable oscillations (i.e., a high Q-factor of the resonant circuit) while maintaining maximum sensor sensitivity. Miniaturization of the sensor and minimizing the tensile force at its mounting points on the specimen are also essential. Improvement of certain sensor parameters often leads to the degradation of others; therefore, the design requires a compromise depending on the specific measurement conditions. This article presents the mathematical interdependencies among key sensor parameters, facilitating optimized sensor design. Full article

In high-precision Hemispherical Resonator Gyroscope (HRG) control systems, readout circuit noise critically determines resonator displacement detection precision. Addressing noise issues, this paper compares the noise characteristics and contribution mechanisms of the Transimpedance Amplifier (TIA) and Charge-Sensitive Amplifier (CSA). By establishing a noise model and analyzing circuit bandwidth, the dominant role of feedback resistor thermal noise in the TIA is revealed. These analyses further demonstrate the significant suppression of high-frequency noise by the CSA capacitive feedback network. Simulation and experimental results demonstrate that the measured noise of the TIA and CSA is consistent with the theoretical model. The TIA output noise is 25.8 $\mathsf{\mu }{V}_{\mathrm{rms}}$, with feedback resistor thermal noise accounting for 99.8%, while CSA output noise is reduced to 13.2 $\mathsf{\mu }{V}_{\mathrm{rms}}$, a reduction of 48.8%. Near resonant frequency, the equivalent displacement noise of the CSA is $1.69\times {10}^{-14}\mathrm{m}/\sqrt{\mathrm{Hz}}$, a reduction of 86.7% compared to the TIA’s $1.27\times {10}^{-13}\mathrm{m}/\sqrt{\mathrm{Hz}}$, indicating the CSA is more suitable for high-precision applications. This research provides theoretical guidance and technical references for the topological selection and parameter design of HRG readout circuits. Full article

Capacitive micromachined ultrasonic transducers (CMUTs) have been developed for air-coupled applications to address key challenges such as noise, prolonged ringing, and side-lobe interference. This study introduces an optimized CMUT design that leverages the squeeze-film damping effect to achieve a low-quality factor, enhancing resolution and temporal precision for imaging as one of the suggested airborne application. The device was fabricated using the PolyMUMPs process, ensuring high structural accuracy and consistency. Finite element analysis (FEA) simulations validated the optimized parameters, demonstrating improved displacement, reduced side-lobe artifacts, and sharper main lobes for superior imaging performance. Experimental validation, including Laser Doppler Vibrometer (LDV) measurements of membrane displacement and mode shapes, along with ring oscillation tests to assess Q-factor and signal decay, confirmed the device’s reliability and consistency across four CMUT arrays. Additionally, this study explores the implementation of multi-frequency CMUT arrays, enhancing imaging versatility across different air-coupled applications. By integrating multiple frequency bands, the proposed CMUTs enable adaptable imaging focus, improving their suitability for diverse diagnostic scenarios. These advancements highlight the potential of the proposed design to deliver a superior performance for airborne applications, paving the way for its integration into advanced diagnostic systems. Full article

This paper presents a preliminary investigation into the total dose effects and displacement damage effects on β-Ga₂O₃ Schottky barrier diodes (SBDs) induced by X-rays with an average energy of 8–20 keV and 1 MeV reactor neutrons. The electrical performance of the devices before and after irradiation was evaluated through direct current (I-V) and capacitance–voltage (C-V) measurements. The results indicate that under X-ray irradiation, as the irradiation fluence increases, the forward current density, leakage current, and reverse current density of the devices increase, suggesting a progressive degradation of device performance with higher irradiation fluence. In the case of neutron irradiation, the forward current density decreases, while the leakage current and reverse current density increase with rising irradiation fluence. By employing techniques such as low-frequency noise (LFN) and deep-level transient spectroscopy (DLTS), changes in defect concentrations before and after irradiation were analyzed. It was found that the primary causes of device performance degradation are the interface defects induced by X-ray irradiation and the increased bulk defect concentration caused by neutron irradiation. These findings were further validated through two-dimensional numerical simulations using TCAD tools, providing significant theoretical insights and experimental data to enhance reliability and optimize the design of such devices. Full article

A smart capacitive transducer (SCT) for high-frequency vibration (HFV) measurements was developed, featuring self-calibration for the improvement of measurement accuracy. Measurements using this transducer are performed by positioning it over a thin (10 µm) dielectric layer on a conductive surface. This method was shown to be a non-contact vibration measurement technique for solid surfaces at frequencies over 10 kHz. Auto-calibration is performed every time the SCT is placed on the object being measured. This reduces the influence of positioning and the object’s surface properties on the measurement results. For the transducer’s auto-calibration, a predefined vibration of the measurement electrode is induced. This is achieved using a waveguide excited by a piezo element. The diameter of the developed SCT is 5 mm, with a frequency range of 10 kHz to 1 MHz, an object HFV amplitude measurement resolution of several picometers, and a repeatability error of several percent. Full article

Extensometers are critical instruments for accurately measuring small displacements in terrain deformation monitoring. Conventional extensometers often employ eddy current displacement sensors or differential transformer sensors, which are constrained by structural limitations that hinder their ability to meet high-precision requirements. The capacitive micro-displacement sensor has a high precision of up to 0.1 µm, but it is typically limited by its measurement range, making it unsuitable for directly capturing rapidly changing geological phenomena such as earthquakes and landslides. This range limitation can result in exceedance and measurement errors, severely compromising the reliability and timeliness of the data. To address these challenges, this study introduces a novel design for a full-range capacitive sensor extensometer powered by a high-precision ultrasonic motor. The system integrates an ultrasonic motor with high-sensitivity capacitive sensors, enhanced by a grating scale and PID control algorithms. By enabling real-time signal processing and adaptive correction, the proposed design ensures a wide measurement range while significantly improving the measurement stability and accuracy. Laboratory experiments and field validations confirm the extensometer’s performance, achieving a resolution of 2.0 × 10⁻¹¹ strain, a linearity of 0.024%, and a calibration repeatability of 0.06%. These results meet the stringent requirements of terrain deformation observation and establish the extensometer as a robust solution for micro-displacement measurements. This innovative design enhances the reliability of terrain deformation monitoring and contributes to the advancement of rock mechanics observation technologies. Full article

Force–displacement transducers are key components in in situ nanoindentation systems. The current existing capacitance-type transducers adopted in state-of-the-art commercial in situ nanoindentation systems are restricted by limited maximum ranges, and strain gauge-type transducers in the current in situ nanoindentation systems have the limitation of low resolution and high values of mass. In the paper, we propose a mechanical design and improvement of a low-mass strain gauge-type force–displacement transducer capable of performing high resolution in situ nanoindentation measurements. The transducer mainly consisted of a parallelogram-shaped flexure hinge and two strain gauges. Air resolution, in situ resolution, and mass experiments reported an air force resolution of 5 μN, an in situ force resolution of 5 μN inside a scanning electron microscope (SEM), and a mass of 6.53 g of such a strain gauge-type load–displacement transducer. Then, the transducer was assembled into a newly developed in situ nanoindentation–atomic force microscope (AFM) hybrid system and a newly developed in situ nanoindentation system. The proposed design successfully performed nanoindentation measurements inside SEM. Based on the results, the proposed strain gauge-type transducer shows great advantages compared to the current state-of-the-art transducers. Full article

A hypothesis that the generally accepted value of the LiPON conductivity should be attributed to the absorption and displacement currents is substantiated. The reason is a small contribution of the drift current due to field screening by the electric double layer. The basis for this assumption is the measurement of the LiPON absorption capacitance, according to which its dielectric constant is about 10⁶. An alternative equivalent circuit containing a non-ideal absorption element is proposed and its impedance is calculated. It is shown that the Bode diagrams of the alternative circuit approximate the experimental curves well. Parameters and the magnitude of electric field screening are calculated based on a proposed model of a double electric layer. Considering the screening effect, the drift conductivity of LiPON is obtained, which is in good agreement with the data on lithium concentration and ion mobility. Full article

A novel design of a MEMS (Micro-Electromechanical System) capacitive accelerometer fabricated by surface micromachining, with a structure enabling precise auto-calibration during operation, is presented. Precise auto-calibration was introduced to ensure more accurate acceleration measurements compared to standard designs. The standard mechanical structure of the accelerometer (seismic mass integrated with elastic suspension and movable plates coupled with fixed plates forming a system of differential sensing capacitors) was equipped with three movable detection electrodes coupled with three fixed electrodes, thus creating three atypical tunneling displacement transducers detecting three specific positions of seismic mass with high precision, enabling the auto-calibration of the accelerometer while it was being operated. Auto-calibration is carried out by recording the accelerometer indication while the seismic mass occupies a specific position, which corresponds to a known value of acting acceleration determined in a pre-calibration process. The diagram and the design of the mechanical structure of the accelerometer, the block diagram of the electronic circuits, and the mathematical relationships used for auto-calibration are presented. The results of the simulation studies related to mechanical and electric phenomena are discussed. Full article

Nitrides are the leading semiconductor material used for the fabrication of high electron mobility transistors (HEMTs). They exhibit piezoelectric properties, which, coupled with their high mechanical stiffness, expand their versatile applications into the fabrication of piezoelectric devices. Today, due to advances in device technology that result in a reduction in the size of individual transistor elements and due to increased structural complexity (e.g., multi-gate transistors), the integration of piezoelectric materials into HEMTs leads to an interesting occurrence, namely acoustic emission from the transistor gate due to piezoelectric effects. This could affect the device’s performance, reliability, and durability. However, this phenomenon has not yet been comprehensively described. This paper aims to examine this overlooked aspect of AlGaN/GaN HEMT operation, that is, the acoustic emission from the gate region of the device induced by piezoelectric effects. For this purpose, dedicated test structures were designed, consisting of two narrow 1.7 μm-wide metallization strips placed at distances ranging from 5 μm to 200 μm fabricated in AlGaN/GaN heterostructures to simulate and examine the gate behavior of the HEMT transistor. For comparison, the test device structures were also fabricated on sapphire, which is not a piezoelectric material. Measurements of acoustic and electrical interactions in the microwave range were carried out using the “on wafer” method with Picoprobe’s signal–ground–signal (SGS)-type microwave probes. The dependence of reflectance |S11| and transmittance |S21| vs. frequency was investigated, and the coupling capacitance was determined. An equivalent circuit model of the test structure was developed, and finite element method simulation was performed to study the distribution of the acoustic wave in the nitride layers and substrate for different frequencies using Comsol Multiphysics software. At frequencies up to 2–3 GHz, the formation of volume waves and a surface wave, capable of propagating over long distances (in the order of tens of micrometers) was observed. At higher frequencies, the resulting distribution of displacements as a result of numerous reflections and interferences was more complicated. However, there was always the possibility of a surface wave occurrence, even at large distances from the excitation source. At small gate distances, electrical interactions dominate. Above 100 µm, electrical interactions are comparable to acoustic ones. With further increases in distance, weakly attenuated surface waves will dominate. Full article

A woven textile capacitive sensor array fully integrated on a car seat is presented to detect the driver’s position. The sensor array consists of two planar interdigital capacitive sensors located on the base and the backrest of the seat. With this sensor array, the position of the driver can be continually measured in real time with potential detection for events such as back detaching or buttocks displacement, which could indicate a risk of traffic accidents. Full article

This treatise studies a microoptoelectromechanical accelerometer (MOEMA) with an optical measuring transducer built according to the optical tunneling principle (evanescent coupling). The work discusses the design of the accelerometer’s microelectromechanical sensing element (MSE) and states the requirements for the design to achieve a sensitivity threshold of 1 µg m/s² at a calculated eigenvalue of the MSE. The studies cover the selection of the dimensions, mass, eigenfrequency and corresponding stiffness of the spring suspension, gravity-induced cross-displacements. The authors propose and experimentally test an optical transducer positioning system represented by a capacitive actuator. This approach allows avoiding the restrictions in the fabrication of the transducer conditioned by the extremely high aspect ratio of deep silicon etching (more than 100). The designed MOEMA is tested on three manufactured prototypes. The experiments show that the sensitivity threshold of the accelerometers is 2 µg. For the dynamic range from minus 0.01 g to plus 0.01 g, the average nonlinearity of the accelerometers’ characteristics ranges from 0.7% to 1.62%. For the maximum dynamic range from minus 0.015 g to plus 0.05 g, the nonlinearity ranges from 2.34% to 2.9%, having the maximum deviation at the edges of the regions. The power gain of the three prototypes of accelerometers varies from 12.321 mW/g to 26.472 mW/g. The results provide broad prospects for the application of the proposed solutions in integrated inertial devices. Full article

Carbon nanotube–glue composite gel-based surface-type elastic sensors with a cylindrical shape deformable (flexible) metallic body were fabricated for tactile pressure and compressive displacement sensing. The fabrication of the sensors was performed using the rubbing-in technique. The effect of the pressure and the compressive displacement on the capacitance and the impedance of the sensors were investigated at various frequencies (in the range of 1 kHz to 200 kHz). It was found that under the effect of pressure from 0 to 9 g/cm², the capacitance increased by 1.86 and 1.78 times, while the impedance decreased by 1.84 and 1.71 times at the frequencies of 1 kHz to 200 kHz, respectively. The effect of displacement on the impedance and the capacitance of the device was also investigated at various frequencies from 1 kHz to 200 kHz. The results showed that under the effect of compressive displacement up to 25 µm, the impedance of the sensors decreased on average by 1.19 times, while the capacitance increased by 1.09 times, accordingly. The frequency response of the displacement sensor showed that it matched with the low-pass filter. The obtained results are explained based on changes in the shape and geometrical parameters of the cylindrical-shaped conductive body. These results have also been explained on the basis of the distance between the conductive plates of the capacitive sensors during compression, which takes place under the effect of applied pressure or displacement. Moreover, the design of the sensors is simple and easy to fabricate, and their use is also earthy. The fabricated sensors have great potential for commercialization. Full article

The presence of strong ambient vibrations could have a negative impact on applications such as high precision inertial navigation and tilt measurement due to the vibration rectification error (VRE) of the accelerometer. In this paper, we investigate the origins of the VRE using a self-developed MEMS accelerometer equipped with an area-variation-based capacitive displacement transducer. Our findings indicate that the second-order nonlinearity coefficient is dependent on the frequency but the VRE remains constant when the displacement amplitude of the excitation is maintained at a constant level. This frequency dependence of nonlinearity is a result of several factors coupling with each other during signal conversion from acceleration to electrical output signal. These factors include the amplification of the proof mass’s amplitude as the excitation frequency approaches resonance, the nonlinearity in capacitance-displacement conversion at larger displacements caused by the fringing effect, and the offset of the mechanical suspension’s equilibrium point from the null position of the differential capacitance electrodes. Through displacement transducer and damping optimization, the second-order nonlinearity coefficient is greatly reduced from mg/g${}^2$ to $\mathsf{\mu }$g/g${}^2$. Full article

To enhance the accuracy of micro-Newton thrust measurements via a torsion pendulum, addressing microgravity coupling effects caused by platform tilt and pendulum mass eccentricity is crucial. This study focuses on analyzing and minimizing these effects by alleviating reference surface tilt and calibrating the center of mass during thrust measurements. The study introduced analysis techniques and compensation measures. It first examined the impact of reference tilt and center of mass eccentricity on the stiffness and compliance of the torsion pendulum by reconstructing its dynamic model. Simscape Multibody was initially employed for numerical analysis to assess the dynamic coupling effects of the tilted pendulum. The results showed the influence of reference tilt on the stiffness and compliance of the torsion pendulum through simulation. An inverted pendulum was developed to amplify the platform’s tilt angle for microgravity drag-free control. Center of mass calibration can identify the gravity coupling caused by the center of mass position. Based on the displacement signal from the capacitive sensor located at the end of the inverted pendulum, which represents the platform’s tilt angle, the pendulum’s vibration at 0.1 mHz was reduced from 5.7 $\mathsf{\mu }$m/Hz^1/2 to 0.28 $\mathsf{\mu }$m/Hz^1/2 by adjusting the voltage of piezoelectric actuator. Finally, a new two-stage torsion pendulum structure was proposed to decouple the tilt coupling buried in both pitch and roll angle. The study utilized theoretical models, numerical analysis, and experimental testing to validate the analysis methods and compensation measures for microgravity coupling effects in torsion pendulums. This led to a reduction in low-frequency noise caused by ground vibrations and thermal strains, ultimately improving the micro-Newton thrust measurement accuracy of the torsion pendulum through the platform’s drag-free control. Full article