Prof. Na Zhou currently serves as a Senior Engineer at
the Institute of Microelectronics at the Chinese Academy of Sciences. She
received her bachelor’s degree in Electronic Information Science and Technology
from Wuhan University in 2006, her master’s degree in Materials Science from
China University of Petroleum (Beijing) in 2009, and her Ph.D. in Condensed
Matter Physics from the Institute of Physics, Chinese Academy of Sciences, in
2013. From April 2013 to May 2016, she worked as a Senior Engineer at Beijing
North Microelectronics (NAURA). Her research interests mainly include advanced
CMOS device processes, advanced MEMS device processes, and MEMS (NEMS) sensor
technology.
Prof. Haiyang Mao is a Researcher at the Institute of
Microelectronics at the Chinese Academy of Sciences. She received her bachelor’s
and master’s degrees from North University of China in 2004 and 2007,
respectively, and her Ph.D. from the Department of Microelectronics, School of
Information Science and Technology, Peking University, in 2011. From September to
November 2008, she was a visiting scholar at the University of California,
Davis. Her research topics mainly include micro-nano-electro-mechanical systems
(MEMS/NEMS) technology, CMOS-MEMS process platforms, infrared sensors,
microfluidic devices, and biochemical sensors.
