MeV Cluster Ion Beam–Material Interaction
Abstract
:1. Introduction
- Reduction of the kinetic energy per atom at a given accelerated voltage.
- Suppression of the charge-up effect at ion implantation.
- Performance of high-density particle irradiation.
2. Model for Production of Cluster-Ion Beam
2.1. Production of Carbon Cluster Ion Beams
2.2. Estimation of Cross Sections
2.3. Calculated Cross Sections and Charged Fraction
3. Model for Electronic Stopping Power and Related Quantities
3.1. Cluster Average Charge
3.2. Electronic Stopping for a Cluster Ion
3.3. Dielectric Functions
3.4. Polarization Force
3.5. Coulomb Explosion of Constituent Ions
4. Calculated Results on Penetration of Cluster Ions
4.1. Average Charge and Energy Loss of Cluster Ions
Comparison with Experimental Data
4.2. Energy Loss of Cluster Ions
4.3. Average Charge and Energy Loss of a Fullerene Ion
Average Charge of a CC60 Ion
4.4. Relation between the Electronic Stopping Power and the Secondary Electron Yield
5. Conclusions
Funding
Data Availability Statement
Conflicts of Interest
Appendix A
References
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(A) | Linear | Triangle | (B) | Center | Edge |
---|---|---|---|---|---|
Exp. | 1.96 ± 0.03 | 1.89 ± 0.02 | Exp. | 1.86 ± 0.04 | 2.01 ± 0.03 |
Calc. | 1.91 | 1.89 | Calc. | 1.88 | 1.93 |
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Kaneko, T. MeV Cluster Ion Beam–Material Interaction. Quantum Beam Sci. 2022, 6, 6. https://doi.org/10.3390/qubs6010006
Kaneko T. MeV Cluster Ion Beam–Material Interaction. Quantum Beam Science. 2022; 6(1):6. https://doi.org/10.3390/qubs6010006
Chicago/Turabian StyleKaneko, Toshiaki. 2022. "MeV Cluster Ion Beam–Material Interaction" Quantum Beam Science 6, no. 1: 6. https://doi.org/10.3390/qubs6010006