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Journal: Processes, 2022
Volume: 10
Number: 1280

Article: Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor
Authors: by Lung-Jieh Yang, Reshmi Waikhom, Horng-Yuan Shih and Yi-Kuen Lee
Link: https://www.mdpi.com/2227-9717/10/7/1280

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