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Journal: Coatings, 2019
Volume: 9
Number: 310

Article: Contamination Particle Behavior of Aerosol Deposited Y2O3 and YF3 Coatings under NF3 Plasma
Authors: by Je-Boem Song, Eunmi Choi, Seong-Geun Oh, Jin-Tae Kim and Ju-Young Yun
Link: https://www.mdpi.com/2079-6412/9/5/310

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