Evaluation of Warpage and Residual Stress of Precision Glass Micro-Optics Heated by Carbide-Bonded Graphene Coating in Hot Embossing Process
1
Sino-German College of Intelligent Manufacturing, Shenzhen Technology University, Shenzhen 518118, Guangdong, China
2
School of Mechanical Engineering, Hefei University of Technology, Hefei 230009, Anhui, China
*
Author to whom correspondence should be addressed.
Nanomaterials 2021, 11(2), 363; https://doi.org/10.3390/nano11020363
Received: 30 December 2020
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Revised: 25 January 2021
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Accepted: 26 January 2021
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Published: 1 February 2021
(This article belongs to the Special Issue Synthesis, Functionalization and Applications of Nanocarbons)
A newly developed hot embossing technique which uses the localized rapid heating of a thin carbide-bonded graphene (CBG) coating, greatly reduces the energy consumption and promotes the fabrication efficiency. However, because of the non-isothermal heat transfer process, significant geometric deviation and residual stress could be introduced. In this paper, we successfully facilitate the CBG-heating-based hot embossing into the fabrication of microlens array on inorganic glass N-BK7 substrate, where the forming temperature is as high as 800 °C. The embossed microlens array has high replication fidelity, but an obvious geometric warpage along the glass substrate also arises. Thermo-mechanical coupled finite element modelling of the embossing process is conducted and verified by the experimental results. Based on trial and error simulations, an appropriate compensation curvature is determined and adopted to modify the geometrical design of the silicon wafer mold. The warpage of the re-embossed microlens array is significantly decreased using the compensated mold, which demonstrates the feasibility of the simulation-oriented compensation scheme. Our work would contribute to improving the quality of optics embossed by this innovative CBG-heating-based hot embossing technique.
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Keywords:
carbide-bonded graphene; hot embossing; thermal effects
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MDPI and ACS Style
Li, L.; Zhou, J. Evaluation of Warpage and Residual Stress of Precision Glass Micro-Optics Heated by Carbide-Bonded Graphene Coating in Hot Embossing Process. Nanomaterials 2021, 11, 363. https://doi.org/10.3390/nano11020363
AMA Style
Li L, Zhou J. Evaluation of Warpage and Residual Stress of Precision Glass Micro-Optics Heated by Carbide-Bonded Graphene Coating in Hot Embossing Process. Nanomaterials. 2021; 11(2):363. https://doi.org/10.3390/nano11020363
Chicago/Turabian StyleLi, Lihua, and Jian Zhou. 2021. "Evaluation of Warpage and Residual Stress of Precision Glass Micro-Optics Heated by Carbide-Bonded Graphene Coating in Hot Embossing Process" Nanomaterials 11, no. 2: 363. https://doi.org/10.3390/nano11020363
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