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Journal: MicromachinesVolume: 9Number: 128
Article: Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic Stiffness
  • Authors:
  • Xianshan Dong1,
  • Shaohua Yang1,2 and
  • Junhua Zhu1
  • et al.
Link: https://www.mdpi.com/2072-666X/9/3/128

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