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Journal: MicromachinesVolume: 13Number: 802
Article: Optimization of Optical Phase Profile in Beam Deflector with Advanced Simulation Method for High Diffraction Efficiency
  • Authors:
  • Andrey Manko1,†,
  • Young Kim2,† and
  • Aleksander Morozov1,3
  • et al.
Link: https://www.mdpi.com/2072-666X/13/5/802

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