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Journal: MicromachinesVolume: 13Number: 779
Article: High Quality-Factor and Spectrum-Clean AlN Lamb-Wave Resonators with Optimized Lateral Reflection Boundary Conditions and Transducer Design
- Authors:
- Haiyan Sun1,2,
- Shitao Lv1,2 and
- Aoyu Zhang1
- et al.
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