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Journal: MicromachinesVolume: 12Number: 1072
Article: Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on <111> and <100> Silicon
  • Authors:
  • Sergio Sapienza1,
  • Matteo Ferri1,* and
  • Luca Belsito1
  • et al.
Link: https://www.mdpi.com/2072-666X/12/9/1072

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