- Feature Paper
- Article
Advanced Fabrication of Single-Crystal Diamond Membranes for Quantum Technologies
- Michel Challier,
- Selda Sonusen,
- Arne Barfuss,
- Dominik Rohner,
- Daniel Riedel,
- Johannes Koelbl,
- Marc Ganzhorn,
- Patrick Appel,
- Patrick Maletinsky and
- Elke Neu
Many promising applications of single crystal diamond and its color centers as sensor platform and in photonics require free-standing membranes with a thickness ranging from several micrometers to the few 100 nm range. In this work, we present an app...

