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Journal: Micromachines, 2026
Volume: 17
Number: 587
Article:
Misalignment Decoupling and Tilt-to-Length Suppression in a Micro-Actuated Beam Steering Mechanism via Nonlinear Cyclic Modulation
Authors:
by
Yang Li, Changkang Fu, Hongming Zhang, Hongyang Guo, Zhiqiang Zhao, Mengyang Zhao, Ruihong Gao, Qiang Wang, Chen Wang, Caiwen Ma, Dong He and Yongmei Huang
Link:
https://www.mdpi.com/2072-666X/17/5/587
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