A Novel Deep-Trench Super-Junction SiC MOSFET with Improved Specific On-Resistance

In this paper, a novel 4H-SiC deep-trench super-junction MOSFET (Metal-Oxide-Semiconductor Field-Effect Transistor) with a split-gate is proposed and theoretically verified by Sentaurus TCAD simulations. A deep trench filled with P-poly-Si combined with the P-SiC region leads to a charge balance effect. Instead of a full-SiC P region in conventional super-junction MOSFET, this new structure reduces the P region in a super-junction MOSFET, thus helping to lower the specific on-resistance. As a result, the figure of merit (FoM, BV2/Ron,sp) of the proposed new structure is 642% and 39.65% higher than the C-MOS and the SJ-MOS, respectively.


Introduction
Silicon carbide (SiC), with the advantages of wide-band-gap semiconductors, is widely used in power MOSFET devices to obtain lower on-state resistance (R on ), higher breakdown voltage (BV), and better frequency characteristics [1][2][3][4].With the development of SiC MOSFETs and industry applications, requirements have been raised for SiC MOSFETs, and corresponding new structures have been proposed.Super-junctions are a good candidate device structure and have been introduced into SiC-based MOSFET devices [5][6][7][8].In the charge balance theory of super-junction structures, this structure can break the material limit of the tradeoff between the breakdown voltage and the specific on-resistance (R on,sp ) and achieve a lower R on,sp while keeping the BV in reasonable ranges [9][10][11].
A structure with an ultra-low specific on-resistance of 0.63 mΩ•cm 2 at 1170 V has been successfully fabricated and published [12] and demonstrated the great potential of SiC super-junction (SJ) MOSFETs.At 3300 V, a R on,sp of 3.3 mΩ•cm 2 has been reached as well [13].Meanwhile, novel structures have been published to further improve device performance.A device formed with a high-k material offers a wider charge balance window than a novel SJ MOSFET [14,15] and, hence, reduces manufacturing error.Recently, deeptrench SJ MOSFETs with better short-circuit performance and electric field distribution have also been obtained [16,17].
Among all the studies on SiC SJ MOSFETs, the majority of device structures are based on planar gate MOSFETs, and only a few of them focus on trench-gate structures.Also, all of the structures use a single deep P-SiC in the drift region to provide charge balance effects in their devices.Although increasing the doped N concentration in the n-type drift area can reduce some amount of specific on-resistance, the occupied area limits the possibility of better on-resistance performance.Furthermore, it is difficult to produce SiC SJ MOSFETs with the traditional producing process for silicon MOSFETs because of the low diffusion rate in SiC, and the practicable process is much more complex and expensive.
In this paper, a novel deep-trench split-gate super-junction 4H-SiC MOSFET device structure is proposed and then theoretically verified with a Sentaurus TCAD simulation.The new structure shows a better performance in break-down voltage than a conventional trench MOS, which is comparable to a super-junction MOS, but it has better specific onresistance than both structures, leading to a better FoM.Moreover, the new structure has a lower switching loss and eliminates the need for multiple epitaxial growth steps to form the P region.possibility of better on-resistance performance.Furthermore, it is difficult to produc SJ MOSFETs with the traditional producing process for silicon MOSFETs because low diffusion rate in SiC, and the practicable process is much more complex and e sive.

Device Structure and Work Mechanism
In this paper, a novel deep-trench split-gate super-junction 4H-SiC MOSFET d structure is proposed and then theoretically verified with a Sentaurus TCAD simul The new structure shows a better performance in break-down voltage than a conven trench MOS, which is comparable to a super-junction MOS, but it has better specifi resistance than both structures, leading to a better FoM.Moreover, the new structu a lower switching loss and eliminates the need for multiple epitaxial growth steps to the P region.The proposed structure has two trenches, a shallow one and a deep one.The C (a) and the SJ-MOS (b) have similar shallow gate trench structures with the same w The gate trench is filled with n-type poly-Si and connected to a gate electrode.Sin shallow trench sizes of the C-MOS and SJ-MOS devices are the same, the gate width new structure (c) is smaller compared with the C-MOS and SJ-MOS, which reduc reverse transfer capacitance (Crss), thus leading to a lower gate-drain charge (Qgd) an responding switching loss.The deep trench is filled with P-poly-silicon and connec the source electrode.The deep trench is thinner than the shallow trench and can effec induce a charge balance effect and form a super-junction-like structure.The deep t is protected with a P-SiC region, which also helps to balance the charge with the Nregion.The oxide in the deep trench area provides a coupled charge to the charge ba as well.A conventional SJ-MOS uses half of the cell area as a P-pillar for the super-jun region, which not only narrows the current path but also causes complexity in the cation process.The new structure uses 0.1 µm wide P-poly-silicon and 0.25 µm w SiC instead of a normal SiC pillar; it greatly widens the current path and reduces the and complexity of the fabrication process.Lastly, the P+ region below the gate trench nected to the source electrode is used to protect the gate oxide from the high electric For a better understanding of the charge balance effect provided by the P-poly, a s DTSJ-MOS (d) without a P-SiC region is also compared in this study.The d The proposed structure has two trenches, a shallow one and a deep one.The C-MOS (a) and the SJ-MOS (b) have similar shallow gate trench structures with the same width.The gate trench is filled with n-type poly-Si and connected to a gate electrode.Since the shallow trench sizes of the C-MOS and SJ-MOS devices are the same, the gate width of the new structure (c) is smaller compared with the C-MOS and SJ-MOS, which reduces its reverse transfer capacitance (C rss ), thus leading to a lower gate-drain charge (Q gd ) and corresponding switching loss.The deep trench is filled with P-poly-silicon and connected to the source electrode.The deep trench is thinner than the shallow trench and can effectively induce a charge balance effect and form a super-junction-like structure.The deep trench is protected with a P-SiC region, which also helps to balance the charge with the N-pillar region.The oxide in the deep trench area provides a coupled charge to the charge balance as well.A conventional SJ-MOS uses half of the cell area as a P-pillar for the super-junction region, which not only narrows the current path but also causes complexity in the fabrication process.The new structure uses 0.1 µm wide P-poly-silicon and 0.25 µm wide P-SiC instead of a normal SiC pillar; it greatly widens the current path and reduces the R on,sp and complexity of the fabrication process.Lastly, the P+ region below the gate trench connected to the source electrode is used to protect the gate oxide from the high electric field.For a better understanding of the charge balance effect provided by the P-poly, a similar DTSJ-MOS (d) without a P-SiC region is also compared in this study.The doping concentration of the P-poly in the DTSJ-MOS is 8.7 × 10 17 cm −3 compared with 2.5 × 10 17 cm −3 in the new structure for the charge balance study.The main parameters of the structures are summarized in Table 1.During device simulations, Sentaurus TCAD (Synopsys Inc., Sunnyvale, CA, USA) was used to reveal the electric characteristics.SRH, AUGER, and Okuto Crowwell were used as models to describe trap-assisted recombinations [18][19][20], non-radiative processes, and breakdown analyses, respectively.The simulations were taken under the same R on (1 mΩ) and threshold voltage (V th ) (2 V) at a temperature of 300 K for all structures.

Simulation Results and Discussion
Figure 2a shows the electric field distribution alone from a to a' in the vertical direction, which is 0.5 µm from the cell's left border.It can be seen that the electric field of the CMOS structure goes down when it closes to the drain electrode, while the other three structures keep it flat until it reaches the substrate, which indicates the charge balance effect exists in all of the three structures.Figure 2b compares the off-state characteristics of the structures.The BV values of the C-MOS, SJ-MOS, DTSJ-MOS, and new structure are 1113 V, 1809 V, 1690 V, and 1717 V, respectively.The high-doped P-poly in both the DTSJ-MOS and the new structure offers a charge balance effect together with the n-type SiC region, which forms a lateral electric field in the off-state and hence results in high breakdown voltage.Moreover, the P-SiC region surrounding the deep trench of the new structure further depletes the n-type pillar and is enhanced with the charge balance effect.However, the super-junction area is shorter than the SJ-MOS one, which causes a breakdown in the charge balance area of the p+ region under the shallow gate trench and leads to a lower BV.
Figure 3 shows the electric field distributions of the C-MOS, SJ-MOS, DTSJ-MOS, and new structure in the off-state when avalanche breakdowns occur.Based on earlier research [21], a maximum oxide electric field (E MOX ) of 2.7 MV/cm was estimated to maintain a lifetime of more than 10 years in a blocking state.The E MOX values of the four structures were 2.2 MV/cm, 6.4 MV/cm, 4.3 MV/cm, and 2.7 MV/cm, respectively.In the C-MOS and SJ-MOS, the E MOX appeared at the bottom corners of the gate trench; in the case of the DTSJ-MOS, it appears evenly at the side wall of the deep trench; and in the new structure, it occurs at the bottom corner of the deep trench.In the DTSJ-MOS and the new structure, the gate oxide is well protected by the P+ region, and the deep-trench oxide of the two structures is affected by the lateral electric fields because of the charge balance effect, which leads to a lower electric field.Since the deep trench is surrounded by a P-pillar at the bottom of the deep trench of the new structure, the charge balance is broken due to the enhanced electric field at the bottom.However, it also attracts the electric field, protecting the gate oxide from the high electric field peak.Meanwhile, the P-pillar helps the P+ region to distract the electric field, further protecting the gate trench.The SJ-MOS has the highest peak value of the electric field due to a lack of protection for the gate oxide, while the C-MOS and the new structure both have E MOX values under 2.7 MV/cm.Without the protection of the P-pillar, the peak electric field in the DTSJ-MOS is much higher than the new structure, and it is difficult to work with in real situations, whereas the new device has a compromise between the SJ-MOS and DTSJ-MOS.Therefore, the DTSJ-MOS will not be further discussed in the later discussions.Also, because of the charge balance effect provided by the super-junction structures, the electric potentials of the SJ-MOS, DTSJ-MOS, and new device are much more even than the C-MOS.Figure 3 shows the electric field distributions of the C-MOS, SJ-MOS, DTSJ-MOS, and new structure in the off-state when avalanche breakdowns occur.Based on earlier research [21], a maximum oxide electric field (EMOX) of 2.7 MV/cm was estimated to maintain a lifetime of more than 10 years in a blocking state.The EMOX values of the four structures were 2.2 MV/cm, 6.4 MV/cm, 4.3 MV/cm, and 2.7 MV/cm, respectively.In the C-MOS and SJ-MOS, the EMOX appeared at the bottom corners of the gate trench; in the case of the DTSJ-MOS, it appears evenly at the side wall of the deep trench; and in the new structure, it occurs at the bottom corner of the deep trench.In the DTSJ-MOS and the new structure, the gate oxide is well protected by the P+ region, and the deep-trench oxide of the two structures is affected by the lateral electric fields because of the charge balance effect, which leads to a lower electric field.Since the deep trench is surrounded by a P-pillar at the bottom of the deep trench of the new structure, the charge balance is broken due to the enhanced electric field at the bottom.However, it also attracts the electric field, protecting the gate oxide from the high electric field peak.Meanwhile, the P-pillar helps the P+ region to distract the electric field, further protecting the gate trench.The SJ-MOS has the highest peak value of the electric field due to a lack of protection for the gate oxide, while the C-MOS and the new structure both have EMOX values under 2.7 MV/cm.Without the protection of the P-pillar, the peak electric field in the DTSJ-MOS is much higher than the new structure, and it is difficult to work with in real situations, whereas the new device has a compromise between the SJ-MOS and DTSJ-MOS.Therefore, the DTSJ-MOS will not be further discussed in the later discussions.Also, because of the charge balance effect provided by the super-junction structures, the electric potentials of the SJ-MOS, DTSJ-MOS, and new device are much more even than the C-MOS.Figure 4a shows the relationship between the Npoly, NP-pillar, and BV of the new structure when the NN-pillar is set as 9.5 × 10 16 cm −3 .Because of the limitation in size control during the fabrication process, the widths of the deep trench and the P-pillar are set as 0.2 µm and 0.24 µm.For each Npoly, there must be a specific NP-pillar to reach the best BV.With an increase or decrease in Npoly, the NP-pillar must decrease or increase accordingly.The tradeoff between the Npoly and NP-pillar follows the charge balance rule.For a conventional super-junction MOSFET, the charge balance effect can be described in the equation below: Here, NN-pillar and NP-pillar stand for the doping concentration of the N-pillar and the Ppillar, and WN-pillar and WP-pillar represent the widths of the N-pillar and P-pillar.However, the new device is more suitable for the revised equation, as follows: N pillar N pillar P pillar P pillar P poly P poly c Here, the parameter Qc stands for the coupling charge, with an uncertain number around 1.3 × 10 13 cm −2 .The reason might be a coupling effect happening in the deep trench oxide.Figure 4a shows the relationship between the N poly , N P-pillar, and BV of the new structure when the N N-pillar is set as 9.5 × 10 16 cm −3 .Because of the limitation in size control during the fabrication process, the widths of the deep trench and the P-pillar are set as 0.2 µm and 0.24 µm.For each N poly , there must be a specific N P-pillar to reach the best BV.With an increase or decrease in N poly , the N P-pillar must decrease or increase accordingly.The tradeoff between the N poly and N P-pillar follows the charge balance rule.For a conventional super-junction MOSFET, the charge balance effect can be described in the equation below: (i) Figure 5 shows the first quadrant I-V characteristics of the three structures.The gate voltage (Vgs) is 15 V.The Ron,sp for the new device is 0.93 mΩ•cm 2 , which is about 67.93% lower than the 2.9 mΩ•cm 2 of the C-MOS and 35.41% lower than the 1.44 mΩ•cm 2 of the SJ-MOS.The doping concentration of the N-pillar for the SJ-MOS and new structure is 9.5 × 10 16 cm −3 compared with 7.5 × 10 15 cm −3 for the C-MOS.A lower concentration greatly increases the total electron current in the drift region and results in a significant reduction in Ron,sp.At the same time, the new structure uses thin P-poly-silicon within a deep trench to replace the conventional P-SiC pillar in the SJ-MOS; the current path is further enlarged, which leads to a much lower Ron,sp.Here, N N-pillar and N P-pillar stand for the doping concentration of the N-pillar and the P-pillar, and W N-pillar and W P-pillar represent the widths of the N-pillar and P-pillar.However, the new device is more suitable for the revised equation, as follows: Here, the parameter Q c stands for the coupling charge, with an uncertain number around 1.3 × 10 13 cm −2 .The reason might be a coupling effect happening in the deep trench oxide.
Figure 4b-d show electric field distributions when the N poly changes from 2.5 × 10 17 cm −3 to 3.5 × 10 17 cm −3 while keeping the concentration of N P-pillar at 4.3 × 10 17 cm −3 .Figure 4e-g shows the electric field distributions when the N poly changes from 2.1 × 10 17 cm −3 to 3.1 × 10 17 cm −3 while keeping the concentration of N P-pillar at 4.7 × 10 17 cm −3 .The figures show that the effect of charge balance in the new structure is similar to the conventional super-junction MOSFET.The peak electric field occurs at the bottom of the deep trench, which is mainly affected by the distribution of p-type doping.Figure 4h shows the relationship between the E MOX , R on, sp, and N P-pillar .With the increasing N P-pillar , the field protection for the deep trench becomes stronger, and hence, the E MOX decreases.When the N P-pillar is lower than 4.7 × 10 17 cm −3 (which means that the N poly is higher than 2.5 × 10 17 cm −3 ), the E MOX will be over 2.7 MV/cm and becomes unacceptable.However, the R on,sp rises slowly with the N P-pillar , which indicates that the N P-pillar has little effect on R on,sp .Also, to make full use of P-poly and increase the manufacturing window of the P-pillar, the N poly should be as high as possible.As a result, we selected the values of N poly and N P-pillar to be 2.5 × 10 17 cm −3 and 4.7 × 10 17 cm −3 , respectively.
Figure 4i shows a comparison of the simulation results and calculation results of the relationship between the N P-pillar and N poly .The values of the N P-pillar and N poly are chosen when the BV of the proposed structure reaches its maximum.As can be seen from the figure, the trends of the two curves are basically the same, which means that both the simulation results and calculation results prove that there is a charge balance effect in the proposed structure.
Figure 5 shows the first quadrant I-V characteristics of the three structures.The gate voltage (V gs ) is 15 V.The R on,sp for the new device is 0.93 mΩ•cm 2 , which is about 67.93% lower than the 2.9 mΩ•cm 2 of the C-MOS and 35.41% lower than the 1.44 mΩ•cm 2 of the SJ-MOS.The doping concentration of the N-pillar for the SJ-MOS and new structure is 9.5 × 10 16 cm −3 compared with 7.5 × 10 15 cm −3 for the C-MOS.A lower concentration greatly increases the total electron current in the drift region and results in a significant reduction in R on,sp .At the same time, the new structure uses thin P-poly-silicon within a deep trench to replace the conventional P-SiC pillar in the SJ-MOS; the current path is further enlarged, which leads to a much lower R on,sp .  .This is because the deep trench connected to the source electrode enlarges the overlapping area of the gate and source electrode.The Qgd value of the new device is about 83.02% less than the one for the C-MOS and 62.73% less than the one for the SJ-MOS.In a super-junction structure, when the drain-source voltage (Vds) is not large enough to fully deplete the P-region, the gate-drain capacitance (Cgd) is shielded by the junction capacitance formed through the N-pillar and P-pillar, so the Crss is small.At a high Vds, the P-pillar is fully depleted; the shielding effect is weakened; and, hence, the Crss will rise again.In the new device, the deep P-poly trench, together with the P-pillar, plays the role of shielding gate in the split-gate trench MOS and helps to shield the gate trench from the drain electrode.With the increasing Vds, the P-pillar is depleted first, and then, the Crss and output capacitance (Coss) rise, which limits the rising turn-on current under the high Vds and reduces the oscillation of the turn-on waveform.Meanwhile, the thin gate decreases the related area between the gate and the drain, and it further reduces the Cgd and finally lowers the Qgd.With the same V th , the height of the miller plateau of the three structures is the same.The new device takes the longest time to reach the Miller plateau, which indicates that it has the largest gate-source capacitance (C gs ).This is because the deep trench connected to the source electrode enlarges the overlapping area of the gate and source electrode.The Q gd value of the new device is about 83.02% less than the one for the C-MOS and 62.73% less than the one for the SJ-MOS.In a super-junction structure, when the drain-source voltage (V ds ) is not large enough to fully deplete the P-region, the gate-drain capacitance (C gd ) is shielded by the junction capacitance formed through the N-pillar and P-pillar, so the C rss is small.At a high V ds , the P-pillar is fully depleted; the shielding effect is weakened; and, hence, the C rss will rise again.In the new device, the deep P-poly trench, together with the P-pillar, plays the role of shielding gate in the split-gate trench MOS and helps to shield the gate trench from the drain electrode.With the increasing V ds , the P-pillar is depleted first, and then, the C rss and output capacitance (C oss ) rise, which limits the rising turn-on current under the high V ds and reduces the oscillation of the turn-on waveform.Meanwhile, the thin gate decreases the related area between the gate and the drain, and it further reduces the C gd and finally lowers the Q gd .The switching characteristics of the structures are shown in Figure 7.The simulation was applied with a typical testing circuit with an inductive load, as shown in Figure 7c.As can be seen, the turn-on and turn-off times of the new device are significantly shorter than the ones for the C-MOS and close to the values for the SJ-MOS due to the low Qgd.Because of the high switching speed, the dIds/dt of the new structure is higher than the other structures.The switching loss of the different structures is shown in Figure 8.The turn-on and turn-off losses of the new device are 0.51 mJ and 1.09 mJ, respectively.In comparison, the turn-on and turn-off losses for the C-MOS are 4.76 mJ and 7.48 mJ.For the SJ-MOS, the values are 0.58 mJ and 0.88 mJ.As a result, the total switching loss of the new device is fair to the SJ-MOS and about 79.45% less than the one for the C-MOS.It is thus demonstrated that the new device has a superior switching character.The switching characteristics of the structures are shown in Figure 7.The simulation was applied with a typical testing circuit with an inductive load, as shown in Figure 7c.As can be seen, the turn-on and turn-off times of the new device are significantly shorter than the ones for the C-MOS and close to the values for the SJ-MOS due to the low Q gd .Because of the high switching speed, the dI ds /dt of the new structure is higher than the other structures.The switching loss of the different structures is shown in Figure 8.The turn-on and turn-off losses of the new device are 0.51 mJ and 1.09 mJ, respectively.In comparison, the turn-on and turn-off losses for the C-MOS are 4.76 mJ and 7.48 mJ.For the SJ-MOS, the values are 0.58 mJ and 0.88 mJ.As a result, the total switching loss of the new device is fair to the SJ-MOS and about 79.45% less than the one for the C-MOS.It is thus demonstrated that the new device has a superior switching character.
The short-circuit characteristics of the devices are shown in Figure 9.The V ds is set as 800 V, and the V gs is 15 V.The saturation current of the new device is 1480 A, which is higher than 1395 A for the SJ-MOS and lower than 1553 A for the C-MOS.The JFET area for the new structure is much wider than the SJ-MOS, and it weakens the current-limiting ability since the current path is greatly enlarged.However, both of the two super-junction structures show better short-circuit abilities than the C-MOS, and the P-pillar offers a pinch-off function during the short-circuit period.Considering the low R on,sp achieved by the new device, its short-circuit ability is acceptable.Table 2 summarizes the main electrical characteristics of the structures.The short-circuit characteristics of the devices are shown in Figure 9.The Vds is set as 800 V, and the Vgs is 15 V.The saturation current of the new device is 1480 A, which is higher than 1395 A for the SJ-MOS and lower than 1553 A for the C-MOS.The JFET area for the new structure is much wider than the SJ-MOS, and it weakens the current-limiting ability since the current path is greatly enlarged.However, both of the two super-junction structures show better short-circuit abilities than the C-MOS, and the P-pillar offers a pinch-off function during the short-circuit period.Considering the low Ron,sp achieved by the new device, its short-circuit ability is acceptable.Table 2 summarizes the main electrical characteristics of the structures.

Proposed Fabrication Process
Regarding the feasibility of the new structure, a fabrication process is proposed in Figure 10.Compared with the SJ-MOS, the fabrication of the new structure is much easier to process because there is no need for a large p-SiC area.First, the N drift region is formed by epitaxial growth on a N+ substrate.Then, the P well and the N source area are made through ion implantation.Then, a shallow trench is fabricated by ICP (Inductively Coupled Plasma) etching, and the P+ protect area is formed by vertical implantation.After that, thermal oxidation is performed on the shallow trench.By filling it with n-type polysilicon, a gate trench is formed.Then, we etch again to form a deep trench and implant to

Proposed Fabrication Process
Regarding the feasibility of the new structure, a fabrication process is proposed in Figure 10.Compared with the SJ-MOS, the fabrication of the new structure is much easier to process because there is no need for a large p-SiC area.First, the N drift region is formed by epitaxial growth on a N+ substrate.Then, the P well and the N source area are made through ion implantation.Then, a shallow trench is fabricated by ICP (Inductively Coupled Plasma) etching, and the P+ protect area is formed by vertical implantation.After that, thermal oxidation is performed on the shallow trench.By filling it with n-type poly-silicon, a gate trench is formed.Then, we etch again to form a deep trench and implant to form a deep P-pillar.Thermal oxidation forms a deep trench oxide layer.Finally, the deep trench is filled with P-poly and connected to the source electrode through the metal layer, and the device is formed.

Conclusions
In this paper, a novel 4H-SiC-based deep-trench super-junction MOSFET with a splitgate is proposed, and the device's properties are confirmed by using Sentaurus TCAD simulations.The novel structure shows a better tradeoff between the break-down voltage and the specific on-resistance.The new device can achieve an excellent FoM value, which is about 642% higher than the value for a C-MOS and 39.65% higher than the value for an SJ-MOS.Meanwhile, the deep trench in the new structure helps to reduce the Qgd.Finally, a feasible fabrication process with the advantage of a much easier process than the one for a SiC super-junction structure is proposed.

Conclusions
In this paper, a novel 4H-SiC-based deep-trench super-junction MOSFET with a splitgate is proposed, and the device's properties are confirmed by using Sentaurus TCAD simulations.The novel structure shows a better tradeoff between the break-down voltage and the specific on-resistance.The new device can achieve an excellent FoM value, which is about 642% higher than the value for a C-MOS and 39.65% higher than the value for an SJ-MOS.Meanwhile, the deep trench in the new structure helps to reduce the Q gd .Finally, a feasible fabrication process with the advantage of a much easier process than the one for a SiC super-junction structure is proposed.

Figure
Figure 1a-d show cross-sectional views of a conventional trench MOSFET (C-MOS), a trench gate super-junction MOSFET (SJ-MOS), a deep-trench super-junction MOSFET (DTSJ-MOS), and the new device structure.The C-MOS and the SJ-MOS are conventional structures.All of the four structures are shown with the same cross-section areas.

FigureFigure 1 .
Figure 1a-d show cross-sectional views of a conventional trench MOSFET (C-M a trench gate super-junction MOSFET (SJ-MOS), a deep-trench super-junction MO (DTSJ-MOS), and the new device structure.The C-MOS and the SJ-MOS are conven structures.All of the four structures are shown with the same cross-section areas.

Figure 2 .
Figure 2. (a) Electric field distributions in the vertical direction.(b) The off-state characteristics.

Micromachines 2024 , 14 Figure 5 .
Figure 5. First quadrant I-V characteristics of the C-MOS, SJ-MOS, and new structure.

Figure
Figure 6a,b show the gate charge curves of the devices and the simulation circuit.With the same Vth, the height of the miller plateau of the three structures is the same.The new device takes the longest time to reach the Miller plateau, which indicates that it has the largest gate-source capacitance (Cgs).This is because the deep trench connected to the source electrode enlarges the overlapping area of the gate and source electrode.The Qgd value of the new device is about 83.02% less than the one for the C-MOS and 62.73% less than the one for the SJ-MOS.In a super-junction structure, when the drain-source voltage (Vds) is not large enough to fully deplete the P-region, the gate-drain capacitance (Cgd) is shielded by the junction capacitance formed through the N-pillar and P-pillar, so the Crss is small.At a high Vds, the P-pillar is fully depleted; the shielding effect is weakened; and, hence, the Crss will rise again.In the new device, the deep P-poly trench, together with the P-pillar, plays the role of shielding gate in the split-gate trench MOS and helps to shield the gate trench from the drain electrode.With the increasing Vds, the P-pillar is depleted first, and then, the Crss and output capacitance (Coss) rise, which limits the rising turn-on current under the high Vds and reduces the oscillation of the turn-on waveform.Meanwhile, the thin gate decreases the related area between the gate and the drain, and it further reduces the Cgd and finally lowers the Qgd.

Figure 5 .
Figure 5. First quadrant I-V characteristics of the C-MOS, SJ-MOS, and new structure.

Figure
Figure6a,b show the gate charge curves of the devices and the simulation circuit.With the same V th , the height of the miller plateau of the three structures is the same.The new device takes the longest time to reach the Miller plateau, which indicates that it has the largest gate-source capacitance (C gs ).This is because the deep trench connected to the source electrode enlarges the overlapping area of the gate and source electrode.The Q gd value of the new device is about 83.02% less than the one for the C-MOS and 62.73% less than the one for the SJ-MOS.In a super-junction structure, when the drain-source voltage (V ds ) is not large enough to fully deplete the P-region, the gate-drain capacitance (C gd ) is shielded by the junction capacitance formed through the N-pillar and P-pillar, so the C rss is small.At a high V ds , the P-pillar is fully depleted; the shielding effect is weakened; and, hence, the C rss will rise again.In the new device, the deep P-poly trench, together with the P-pillar, plays the role of shielding gate in the split-gate trench MOS and helps to shield the gate trench from the drain electrode.With the increasing V ds , the P-pillar is depleted first, and then, the C rss and output capacitance (C oss ) rise, which limits the rising turn-on current under the high V ds and reduces the oscillation of the turn-on waveform.Meanwhile, the thin gate decreases the related area between the gate and the drain, and it further reduces the C gd and finally lowers the Q gd .

Figure 6 .
Figure 6.(a) Gate charge characteristics for the C-MOS, SJ-MOS, and new structure.(b) Test circuit.

Figure 6 .
Figure 6.(a) Gate charge characteristics for the C-MOS, SJ-MOS, and new structure.(b) Test circuit.

Figure 7 .
Figure 7. (a) The turn-on waveforms of the structures.(b) The turn-off waveforms of the structures.(c) Double pulse test circuits.Figure 7. (a) The turn-on waveforms of the structures.(b) The turn-off waveforms of the structures.(c) Double pulse test circuits.

Figure 7 .
Figure 7. (a) The turn-on waveforms of the structures.(b) The turn-off waveforms of the structures.(c) Double pulse test circuits.Figure 7. (a) The turn-on waveforms of the structures.(b) The turn-off waveforms of the structures.(c) Double pulse test circuits.

Figure 8 .
Figure 8.The switching-loss properties for various device structures.

Figure 8 .Figure 9 .
Figure 8.The switching-loss properties for various device structures.

Figure 9 .
Figure 9. (a) The short-circuit waveforms for three different structures.(b) The short-circuit test circuits.

Figure 10 .
Figure 10.The key fabrication process: (a) Form a P well and N+ source.(b) Use ICP etching to form a shallow trench.(c) Form a P+ region through ion implantation.(d) Use thermal oxidation to form gate oxide.(e) Deposit gate poly-silicon.(f) Use ICP etching to form a deep trench.(g) Form a Ppillar through ion implantation.(h) Use thermal oxidation to form a deep trench oxide.(i) Fill the deep trench with P-poly.(j) Deposit the metal.

Figure 10 .
Figure 10.The key fabrication process: (a) Form a P well and N+ source.(b) Use ICP etching to form a shallow trench.(c) Form a P+ region through ion implantation.(d) Use thermal oxidation to form gate oxide.(e) Deposit gate poly-silicon.(f) Use ICP etching to form a deep trench.(g) Form a P-pillar through ion implantation.(h) Use thermal oxidation to form a deep trench oxide.(i) Fill the deep trench with P-poly.(j) Deposit the metal.

Table 1 .
Main parameters used in the simulation.