A Direct n+-Formation Process by Magnetron Sputtering an Inter-Layer Dielectric for Self-Aligned Coplanar Indium Gallium Zinc Oxide Thin-Film Transistors

An inter-layer dielectric (ILD) deposition process to simultaneously form the conductive regions of self-aligned (SA) coplanar In-Ga-Zn-O (IGZO) thin-film transistors (TFTs) is demonstrated. N+-IGZO regions and excellent ohmic contact can be obtained without additional steps by using a magnetron sputtering process to deposit a SiOx ILD. The fabricated IGZO TFTs show a subthreshold swing (SS) of 94.16 mV/decade and a linear-region field-effect mobility (μFE) of 23.06 cm2/Vs. The channel-width-normalized source/drain series resistance (RSDW) extracted using the transmission line method (TLM) is approximately as low as 9.4 Ω·cm. The fabricated ring oscillator (RO) with a maximum oscillation frequency of 1.75 MHz also verifies the applicability of the TFTs.


Introduction
Indium-Gallium-Zinc-Oxide (IGZO) thin-film transistors (TFTs) with staggered structures, such as etch-stopper (ES) and back-channel-etched (BCE) structures, have been proven to be useable as circuit devices in flat-panel displays [1,2]. However, due to the overlap between gate and source/drain (S/D) electrodes, these staggered-structure devices inevitably have large parasitic capacitances, which result in a low operating speed of TFT devices. A self-aligned (SA) coplanar structure is a promising solution to overcome this parasitic capacitance problem [3]. Forming conductive n + -IGZO to obtain ohmic contact between active S/D regions and S/D electrodes is an important process for SA coplanar devices. Many methods for this process have been proposed, and the fabricated IGZO devices have good performance. Plasma treatment (Ar, H 2 , etc.) [4,5] and deep-ultraviolet (DUV) irradiation [6] are commonly used. However, these solutions require an extra step, as shown in Figure 1a, which leads to additional process costs. Forming n + -IGZO during the overetching of a SiO 2 gate insulator (GI) is a simple method [7,8]. However, this method is not applicable when the GI-etching plasma can etch IGZO films. Recently, the formation of n + -IGZO regions by simply coating an organic inter-layer dielectric (ILD) has been demonstrated, and a channel-width-normalized S/D series resistance (R SD W) of 24 Ω·cm was obtained [9]. This report shows the possibility of forming n + -IGZO regions during the ILD deposition process. Based on this idea, other novel methods to fabricate low-R SD W SA coplanar IGZO TFTs are worth investigating.
In this work, we use a magnetron sputtering process to deposit a SiO x ILD and simultaneously form n + -IGZO regions for SA coplanar IGZO TFTs. In this way, ILD deposition and n + -formation can be combined into one step, as shown in Figure 1b. The fabricated devices have quite low R SD W. The mechanism of reducing the IGZO film Micromachines 2022, 13, 652 2 of 7 resistivity by the sputtering process is investigated by X-ray photoelectron spectroscopy (XPS) analysis. Ring oscillators (ROs) composed of the fabricated SA coplanar TFTs show good frequency characteristics, which indicates that these TFTs have the potential to be used in high-speed circuits. SiO x is a commonly used insulating layer [10]; moreover, sputtering SiO x and sputtering IGZO can share one piece of sputtering equipment. Considering the material compatibility and equipment compatibility of sputtered SiO x , as well as the reduction in process steps, this sputtering treatment method is expected to become an industrial production technology for SA coplanar IGZO TFTs. In this work, we use a magnetron sputtering process to deposit a SiOx ILD and simultaneously form n + -IGZO regions for SA coplanar IGZO TFTs. In this way, ILD deposition and n + -formation can be combined into one step, as shown in Figure 1b. The fabricated devices have quite low RSDW. The mechanism of reducing the IGZO film resistivity by the sputtering process is investigated by X-ray photoelectron spectroscopy (XPS) analysis. Ring oscillators (ROs) composed of the fabricated SA coplanar TFTs show good frequency characteristics, which indicates that these TFTs have the potential to be used in high-speed circuits. SiOx is a commonly used insulating layer [10]; moreover, sputtering SiOx and sputtering IGZO can share one piece of sputtering equipment. Considering the material compatibility and equipment compatibility of sputtered SiOx, as well as the reduction in process steps, this sputtering treatment method is expected to become an industrial production technology for SA coplanar IGZO TFTs.

Experiment
SA coplanar IGZO TFTs are fabricated on a 300-nm-thick thermal silicon dioxide substrate. First, an IGZO film with a thickness of 20 nm is deposited as an active layer by a magnetron sputtering process using an IGZO target with an atomic ratio of In2O3:Ga2O3:ZnO = 1:1:2 mol.%. After depositing 30-nm-thick Al2O3 as a GI by atomic layer deposition (ALD), a 50/50-nm-thick Ti/Cr bilayer is formed as a gate electrode by a lift-off process. By using the gate electrode as a shield layer, the GI can be SA-etched by Ar/BCl3 (10 sccm/40 sccm) plasma etching [11] without an additional photolithography step. This plasma etching must be precisely controlled to avoid etching the IGZO layer since Ar/BCl3 plasma can also etch IGZO films [12]. Diluted acid is used as a wet etchant for patterning the IGZO layer [13]. Then, a SiOx ILD layer with a thickness of 50 nm is deposited by a magnetron sputtering process under an Ar:O2 gas ratio of 20:1 sccm, and, simultaneously, the n + -formation process of the S/D region in the IGZO layer is completed. The SiOx layer is etched by a dry etching process to form contact holes. A 20/80-nm Ti/Au bilayer is deposited as S/D electrodes and patterned by a lift-off process. Finally, a postannealing process is performed at a temperature of 180 °C for 2 h.

Experiment
SA coplanar IGZO TFTs are fabricated on a 300-nm-thick thermal silicon dioxide substrate. First, an IGZO film with a thickness of 20 nm is deposited as an active layer by a magnetron sputtering process using an IGZO target with an atomic ratio of In 2 O 3 :Ga 2 O 3 :ZnO = 1:1:2 mol.%. After depositing 30-nm-thick Al 2 O 3 as a GI by atomic layer deposition (ALD), a 50/50-nm-thick Ti/Cr bilayer is formed as a gate electrode by a lift-off process. By using the gate electrode as a shield layer, the GI can be SA-etched by Ar/BCl 3 (10 sccm/40 sccm) plasma etching [11] without an additional photolithography step. This plasma etching must be precisely controlled to avoid etching the IGZO layer since Ar/BCl 3 plasma can also etch IGZO films [12]. Diluted acid is used as a wet etchant for patterning the IGZO layer [13]. Then, a SiO x ILD layer with a thickness of 50 nm is deposited by a magnetron sputtering process under an Ar:O 2 gas ratio of 20:1 sccm, and, simultaneously, the n + -formation process of the S/D region in the IGZO layer is completed. The SiO x layer is etched by a dry etching process to form contact holes. A 20/80-nm Ti/Au bilayer is deposited as S/D electrodes and patterned by a lift-off process. Finally, a postannealing process is performed at a temperature of 180 • C for 2 h. Figure 1c shows a cross-sectional diagram of the fabricated devices. Figure 1d shows an optical microscope image of a fabricated device with a channel width (W) of 20 µm and a channel length (L) of 10 µm.

Results and Discussion
The fabricated SA coplanar IGZO TFTs are measured using an Agilent B1500A semiconductor parameter analyzer in a dark box. Figure 2a shows the transfer characteristics and gate leakage characteristics of the TFT with W = 10 µm and L = 15 µm at drain voltages (V DS ) of 0.1 and 7 V. The transfer curves exhibit excellent device performance with a low gate leakage current characteristic. The transistor parameters of the device presented in Figure 2a can be estimated from the linear-region transfer curve (V DS = 0.1 V). The turn-on voltage (V on ) and subthreshold swing (SS) are estimated to be −0.3 V and 94.16 mV/decade, respectively. The field-effect mobility (µ FE ) can be calculated from the transfer curve in the linear region (V DS = 0.1 V) using the following equation [6]: where L is the channel length, g m is the transconductance, I D is the drain current, V GS is the gate voltage, W is the channel width, C i is the capacitance per unit area of gate oxide, and V DS is the drain bias (0.1 V). According to this equation, the calculated µ FE of the presented device is approximately 23.06 cm 2 /Vs. In addition, the average µ FE and SS of the 37 devices under test (DUTs) are approximately 21.37 cm 2 /Vs and 100.35 mV/decade, respectively. Figure 2b shows the output characteristics of the same TFT under varying gate voltage (V GS ) from 0 V to 8 V. The output curves exhibit a good saturation characteristic at large V DS and good ohmic behavior at low V DS , which means that the IGZO film of the fabricated device has good ohmic contact with the S/D electrodes.
an optical microscope image of a fabricated device with a channel width (W) of 20 a channel length (L) of 10 μm.

Results and Discussion
The fabricated SA coplanar IGZO TFTs are measured using an Agilent B150 iconductor parameter analyzer in a dark box. Figure 2a shows the transfer charac and gate leakage characteristics of the TFT with W = 10 μm and L = 15 μm at drain (VDS) of 0.1 and 7 V. The transfer curves exhibit excellent device performance wi gate leakage current characteristic. The transistor parameters of the device pres Figure 2a can be estimated from the linear-region transfer curve (VDS = 0.1 V). The voltage (Von) and subthreshold swing (SS) are estimated to be −0.3 V and 94.16 mV respectively. The field-effect mobility (μFE) can be calculated from the transfer cur linear region (VDS = 0.1 V) using the following equation [6]:  Figure 2b shows the output characteristics of the same TFT under varying gate (VGS) from 0 V to 8 V. The output curves exhibit a good saturation characteristic VDS and good ohmic behavior at low VDS, which means that the IGZO film of the fa device has good ohmic contact with the S/D electrodes. The S/D series resistance (RSD) is extracted by using the transmission line (TLM) [6,14]. In this method, the total resistance (RTOT) of a fabricated device is g The S/D series resistance (R SD ) is extracted by using the transmission line method (TLM) [6,14]. In this method, the total resistance (R TOT ) of a fabricated device is given by V DS /I DS from the transfer curve in the linear region. R TOT can be expressed by the following equation [6]: where R ch is the channel resistance, L is the designed channel length, ∆L is the difference between the designed channel length and the actual channel length, C i is the capacitance per unit area of gate oxide, W is the channel width, and V th is the threshold voltage. According to this equation, when L − ∆L = 0, R SD equals R TOT . Therefore, by fitting the R TOT -L relationship of the TFTs with a fixed W and varying V GS , the fitted lines will intersect at the point of L − ∆L = 0, and the y-axis value of this point will be R SD . Figure 2c shows  Table 1 shows the comparison of the R SD W extracted from IGZO TFTs with different n +formation processes. The R SD W value of this work is the smallest among these works, which further proves that the excellent ohmic properties of the fabricated TFTs in this work are competitive in the field of IGZO TFTs. Table 1. Benchmark of minimum R SD W for IGZO TFTs with different n + -formation processes.

Reference n + -Formation Process R SD W min (Ω·cm)
[8] Overetch SiO 2 GI 21.8 [9] Organic ILD 24 [16] H 2 plasma treatment 75.5 [5] Ar plasma treatment 128 [17] UV irradiation 27 This work Sputtered ILD 9.4 The mechanism of reducing the IGZO resistivity by sputtering treatment is also investigated using XPS analysis. The O 1s peaks of IGZO films without and after sputtering treatment are shown in Figure 3a,b, respectively. The peak is fitted by three Gaussian distributions, centered at the low binding energy peak (O L ) of 530.15 eV, the medium binding energy peak (O M ) of 531.25 eV, and the high binding energy peak (O H ) of 532.4 eV. O L is related to the oxygen in the metal-oxide bond (M-O), which forms the stable amorphous structure of IGZO films [18]. O M can be assigned to oxygen vacancies (O V ), which are generally considered to be donor defects [6,19]. O H is commonly attributed to the oxygen in hydroxide (O-H), which is associated with shallow donors [6,18,20]. Compared to the 19.6% concentration of O V in the untreated IGZO film in Figure 3a, the O V concentration of the IGZO film after sputtering treatment significantly increases to 55.88%. The dissociation energies of Si-O, Ga-O, In-O, and Zn-O bonds are 799 kJ/mol, 374 kJ/mol, 346 kJ/mol, and <250 kJ/mol, respectively [21]. During the sputtering deposition of the SiO x ILD, the ion bombardment breaks the M-O bonds in the IGZO film. Since the oxygen content in the sputtering atmosphere is very low (<4 mol%) and the Si-O bond exhibits a larger dissociation energy, Si may take away the oxygen ions in the IGZO film. This process can be represented by the following equation: of the IGZO film after sputtering treatment significantly increases to 55.88%. The dissociation energies of Si-O, Ga-O, In-O, and Zn-O bonds are 799 kJ/mol, 374 kJ/mol, 346 kJ/mol, and <250 kJ/mol, respectively [21]. During the sputtering deposition of the SiOx ILD, the ion bombardment breaks the M-O bonds in the IGZO film. Since the oxygen content in the sputtering atmosphere is very low (<4 mol%) and the Si-O bond exhibits a larger dissociation energy, Si may take away the oxygen ions in the IGZO film. This process can be represented by the following equation: SiOx + InGaZnO4 → SiOx+n + InGaZnO4-n + n × OV (3) This reaction could be the mechanism for the increase in the OV concentration after sputtering deposition. Generally, OV are considered to act as donor defects in IGZO films that supply electron carriers for conduction [19,22], and an increase in the OV concentration in IGZO films usually means high conductivity. Therefore, sputtering SiOx as the ILD of SA coplanar IGZO TFTs can effectively form ohmic contact between the IGZO-S/D region and the S/D electrode. To demonstrate the usability of the proposed SA coplanar IGZO TFTs, inverters and ROs consisting of the fabricated devices are also measured [23,24]. Figure 4a shows the voltage transfer characteristic (VTC) and corresponding cross current of the inverter with a beta ratio (β) of 9/1. Specifically, the W/L ratios of the load TFT (WL/LL) and driving TFT (WD/LD) are 50 μm/10 μm and 450 μm/10 μm, respectively. The inset of Figure 4a shows a schematic of the inverter. This inverter shows good level conversion at a supply voltage (VDD) of 5 V. Figure 4b shows an optical microscope image of the fabricated seven-stage RO with a buffer inverter. The buffer inverter is connected to the "OUT" pad for measuring the output signal of the RO. During the measurement, a constant voltage signal of different values is applied on the "VDD" pad, and the "GND" pad is connected to a ground signal. An oscilloscope is used to detect the output signal through the "OUT" pad. Figure 4c shows the RO frequency (fOSC) measured under different VDD varying from 5 V to 25 V. As VDD increases, fOSC increases accordingly. When VDD = 5 V, the measured fOSC is 105.8 kHz. A maximum fOSC of 1.75 MHz is measured when VDD = 25 V. According to Figure 4c, the frequency of the fabricated RO exhibits a linear correlation with the supply voltage. Figure 4d shows the waveform of the output signal with a maximum frequency of 1.75 MHz detected by the oscilloscope. The inset of Figure 4d shows the waveform after zooming in. The smooth transition between high level and low level observed from the waveform indicates that the measured RO can work stably, which means that the fabricated TFTs are suitable for the application of high-speed IGZO TFT circuits.  This reaction could be the mechanism for the increase in the O V concentration after sputtering deposition. Generally, O V are considered to act as donor defects in IGZO films that supply electron carriers for conduction [19,22], and an increase in the O V concentration in IGZO films usually means high conductivity. Therefore, sputtering SiO x as the ILD of SA coplanar IGZO TFTs can effectively form ohmic contact between the IGZO-S/D region and the S/D electrode.
To demonstrate the usability of the proposed SA coplanar IGZO TFTs, inverters and ROs consisting of the fabricated devices are also measured [23,24]. Figure 4a shows the voltage transfer characteristic (VTC) and corresponding cross current of the inverter with a beta ratio (β) of 9/1. Specifically, the W/L ratios of the load TFT (W L /L L ) and driving TFT (W D /L D ) are 50 µm/10 µm and 450 µm/10 µm, respectively. The inset of Figure 4a shows a schematic of the inverter. This inverter shows good level conversion at a supply voltage (V DD ) of 5 V. Figure 4b shows an optical microscope image of the fabricated seven-stage RO with a buffer inverter. The buffer inverter is connected to the "OUT" pad for measuring the output signal of the RO. During the measurement, a constant voltage signal of different values is applied on the "VDD" pad, and the "GND" pad is connected to a ground signal. An oscilloscope is used to detect the output signal through the "OUT" pad. Figure 4c shows the RO frequency (f OSC ) measured under different V DD varying from 5 V to 25 V. As V DD increases, f OSC increases accordingly. When V DD = 5 V, the measured f OSC is 105.8 kHz. A maximum f OSC of 1.75 MHz is measured when V DD = 25 V. According to Figure 4c, the frequency of the fabricated RO exhibits a linear correlation with the supply voltage. Figure 4d shows the waveform of the output signal with a maximum frequency of 1.75 MHz detected by the oscilloscope. The inset of Figure 4d shows the waveform after zooming in. The smooth transition between high level and low level observed from the waveform indicates that the measured RO can work stably, which means that the fabricated TFTs are suitable for the application of high-speed IGZO TFT circuits.

Conclusions
A direct n + -region formation process for SA coplanar IGZO TFTs is proposed and studied. By employing magnetron sputtering to both deposit the SiOx ILD layer and reduce the resistivity of the IGZO S/D regions, ohmic contact between the IGZO layer and the S/D metal electrode can be simply obtained without additional steps or equipment. The fabricated TFTs exhibit excellent performance, with Von, SS, and linear-region μFE of −0.3 V, 94.16 mV/decade, and 23.06 cm 2 /Vs, respectively. By using the TLM, the extracted minimum RSDW is approximately 9.4 Ω·cm. XPS analysis reveals that the improved conductivity of IGZO films can be attributed to the significant increase in OV concentration. The fabricated inverter shows good level conversion. The measured maximum fOSC of the RO output waveform can reach 1.75 MHz with a smooth transition. Because of the process compatibility and excellent device performance, the fabrication technology proposed in this work is expected to be applied in the production of high-speed TFT circuits and flatpanel displays.

Data Availability Statement:
The data that support the findings of this study are available from the

Conclusions
A direct n + -region formation process for SA coplanar IGZO TFTs is proposed and studied. By employing magnetron sputtering to both deposit the SiO x ILD layer and reduce the resistivity of the IGZO S/D regions, ohmic contact between the IGZO layer and the S/D metal electrode can be simply obtained without additional steps or equipment. The fabricated TFTs exhibit excellent performance, with V on , SS, and linear-region µ FE of −0.3 V, 94.16 mV/decade, and 23.06 cm 2 /Vs, respectively. By using the TLM, the extracted minimum R SD W is approximately 9.4 Ω·cm. XPS analysis reveals that the improved conductivity of IGZO films can be attributed to the significant increase in O V concentration. The fabricated inverter shows good level conversion. The measured maximum f OSC of the RO output waveform can reach 1.75 MHz with a smooth transition. Because of the process compatibility and excellent device performance, the fabrication technology proposed in this work is expected to be applied in the production of high-speed TFT circuits and flat-panel displays.