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Journal: Materials, 2025
Volume: 18
Number: 1671
Article:
Substrate Bias-Driven Structural and Mechanical Evolution of AlCrN and AlCrSiN Coatings via Reactive Magnetron Sputtering
Authors:
by
Du-Cheng Tsai, Rong-Hsin Huang, Zue-Chin Chang, Erh-Chiang Chen, Yen-Lin Huang and Fuh-Sheng Shieu
Link:
https://www.mdpi.com/1996-1944/18/7/1671
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