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Journal: Materials, 2021
Volume: 14
Number: 128
Article:
Fabrication of SiC Sealing Cavity Structure for All-SiC Piezoresistive Pressure Sensor Applications
Authors:
by
Lihuan Zhao, Haiping Shang, Dahai Wang, Yang Liu, Baohua Tian and Weibing Wang
Link:
https://www.mdpi.com/1996-1944/14/1/128
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