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Journal: Materials, 2020
Volume: 13
Number: 4818
Article:
Investigation of Factors Influencing the Occurrence of 3C-Inclusions for the Thick Growth of on-Axis C-Face 4H-SiC Epitaxial Layers
Authors:
by
Keiko Masumoto, Kazutoshi Kojima and Hiroshi Yamaguchi
Link:
https://www.mdpi.com/1996-1944/13/21/4818
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