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Journal: Sensors, 2008
Volume: 8
Number: 767
Article:
Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient
Authors:
by
Alberto Ballestra, Aurelio Somà and Renato Pavanello
Link:
https://www.mdpi.com/1424-8220/8/2/767
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