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Journal: Sensors, 2008
Volume: 8
Number: 767

Article: Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient
Authors: by Alberto Ballestra, Aurelio Somà and Renato Pavanello
Link: https://www.mdpi.com/1424-8220/8/2/767

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