- Article
Flow-velocity Microsensors Based on Semiconductor Fieldeffect Structures
- Arshak Poghossian,
- Tatsuo Yoshinobu and
- Michael J. Schöning
A time-of-flight-type flow-velocity sensor employing the in-situ electrochemically generation of ion-tracers is developed. The sensor consists of an ion generator and two downstream-placed pH-sensitive Ta2O5-gate ISFETs (ion-sensitive field-effect tr...

