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Journal: Sensors, 2023
Volume: 23
Number: 9538
Article:
Thermal Behavior of Biaxial Piezoelectric MEMS-Scanners
Authors:
by
Laurent Mollard, Christel Dieppedale, Antoine Hamelin, Gwenael Le Rhun, Jean Hue, Laurent Frey and Gael Castellan
Link:
https://www.mdpi.com/1424-8220/23/23/9538
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