Tian, B.; Shang, H.; Zhao, L.; Wang, D.; Liu, Y.; Wang, W.
Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor. Sensors 2021, 21, 379.
https://doi.org/10.3390/s21020379
AMA Style
Tian B, Shang H, Zhao L, Wang D, Liu Y, Wang W.
Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor. Sensors. 2021; 21(2):379.
https://doi.org/10.3390/s21020379
Chicago/Turabian Style
Tian, Baohua, Haiping Shang, Lihuan Zhao, Dahai Wang, Yang Liu, and Weibing Wang.
2021. "Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor" Sensors 21, no. 2: 379.
https://doi.org/10.3390/s21020379
APA Style
Tian, B., Shang, H., Zhao, L., Wang, D., Liu, Y., & Wang, W.
(2021). Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor. Sensors, 21(2), 379.
https://doi.org/10.3390/s21020379