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Open AccessArticle

The Investigation of a SAW Oxygen Gas Sensor Operated at Room Temperature, Based on Nanostructured ZnxFeyO Films

1
Science and Technology on Plasma Physics Laboratory, Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, Sichuan, China
2
School of Physical Science and Technology, Southwest Jiaotong University, Key Laboratory of Advanced Technology of Materials, (Ministry of Education), Chengdu 610031, China
3
Collaborative Innovation Center of IFSA (CICIFSA), Shanghai Jiao Tong University, Shanghai 200240, China
*
Authors to whom correspondence should be addressed.
Sensors 2019, 19(13), 3025; https://doi.org/10.3390/s19133025
Received: 13 May 2019 / Revised: 12 June 2019 / Accepted: 13 June 2019 / Published: 9 July 2019
(This article belongs to the Collection Gas Sensors)
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PDF [9249 KB, uploaded 9 July 2019]
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Abstract

In this paper, we report a wireless gas sensor based on surface acoustic waves (SAW). For room temperature detection of oxygen gas, a novel nanostructured ZnxFeyO gas-sensitive film was deposited on the surface of a SAW resonator by an oblique magnetron co-sputtering method. The measurements of X-ray diffraction (XRD) and a scanning electron microscope (SEM) showed that the crystal phase composition and the microstructures of ZnxFeyO films were significantly affected by the content of Fe. The experimental results showed that the sensors had a good response to O2 at room temperature. The max frequency shift of the sensors reached 258 kHz as the O2 partial pressure was 20%. Moreover, X-ray photoelectron spectroscopy (XPS) was performed to analyze the role of Fe in the sensitization process of the ZnxFeyO film. In addition, the internal relationship between the Fe content of the film and the sensitivity of the sensor was presented and discussed. The research indicates that the nanostructured ZnxFeyO film has a good potential for room temperature O2 gas detection applications. View Full-Text
Keywords: ZnxFeyO nanostructures; oxygen gas sensor; room temperature; surface acoustic wave ZnxFeyO nanostructures; oxygen gas sensor; room temperature; surface acoustic wave
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Shu, L.; Jiang, T.; Xia, Y.; Wang, X.; Yan, D.; Wu, W. The Investigation of a SAW Oxygen Gas Sensor Operated at Room Temperature, Based on Nanostructured ZnxFeyO Films. Sensors 2019, 19, 3025.

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