Special Issue "Micromachined Tools for Nanoscale Science and Technology"

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A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (31 January 2013)

Special Issue Editor

Guest Editor
Prof. Dr. Jürgen Brugger
Institute of Microengineering, Ecole Polytechnique Fédérale de Lausanne (EPFL), Station 17, CH-1015 Lausanne, Switzerland
Website: http://people.epfl.ch/juergen.brugger
E-Mail: juergen.brugger@epfl.ch
Interests: MEMS / nanotechnology; rapid prototyping; nanopatterning& inkjet printing; mesoscopic self-assembly; CMOS electronics for NMR& ESR; scanning probe technology

Special Issue Information

Dear Colleagues,

Micrometer scale devices and systems form natural links between the macroscopic world and the nanoscale dimensions. Consequently, micromachines and in particular MEMS and Microsystems have in the last twenty years significantly contributed to establish an impressive and flexible toolbox to directly access the molecular and atomic scale by various means. One of the advantages of using such micro-electro-mechanical devices and systems is that they often rely on near-field interactions (in contrast to far-field methods using relatively large equipment). Examples not only concern advanced scanning probe systems with improved performances in terms of resolution and speed. They also include novel patterning tools enabling cost-efficient nanolithography. One important aspect when miniaturizing tools into the sub-micron regime are sensing and actuating solutions, as conventional approaches reach their limit in their signal-to-noise ratio. This special issue invites contribution that cover this rich, but well-focused research field on micromachined tools and devices aimed for nanoscience and nanotechnology. We also invite contributions on e.g. new materials to build the microtools such as polymers, functional oxides, nano-composites, etc. as well as associated manufacturing process (e.g. film deposition, etching, printing, molding).

Prof. Dr. Jürgen Brugger
Guest Editor

Submission

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. Papers will be published continuously (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are refereed through a peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed Open Access quarterly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 500 CHF (Swiss Francs). English correction and/or formatting fees of 250 CHF (Swiss Francs) will be charged in certain cases for those articles accepted for publication that require extensive additional formatting and/or English corrections.

Keywords

  • advanced scanning probe systems
  • parallel probe systems
  • nano-electro-mechanical-systems (NEMS)
  • self-sensing NEMS systems
  • nanolithography using micromachined nanotools
  • nanomaterials for micromachined nanotools
  • NEMS and CMOS integration

Published Papers (4 papers)

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Displaying article 1-4
p. 370-377
by , , , ,  and
Micromachines 2013, 4(4), 370-377; doi:10.3390/mi4040370
Received: 5 May 2013; in revised form: 27 July 2013 / Accepted: 10 October 2013 / Published: 15 October 2013
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(This article belongs to the Special Issue Micromachined Tools for Nanoscale Science and Technology)
p. 215-231
by , , ,  and
Micromachines 2013, 4(2), 215-231; doi:10.3390/mi4020215
Received: 28 February 2013; in revised form: 16 May 2013 / Accepted: 17 May 2013 / Published: 3 June 2013
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(This article belongs to the Special Issue Micromachined Tools for Nanoscale Science and Technology)
p. 157-167
by , ,  and
Micromachines 2013, 4(2), 157-167; doi:10.3390/mi4020157
Received: 30 January 2013; in revised form: 3 March 2013 / Accepted: 7 April 2013 / Published: 17 April 2013
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(This article belongs to the Special Issue Micromachined Tools for Nanoscale Science and Technology)
p. 90-102
by , , , , ,  and
Micromachines 2013, 4(1), 90-102; doi:10.3390/mi4010090
Received: 5 November 2012; in revised form: 18 December 2012 / Accepted: 5 March 2013 / Published: 14 March 2013
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(This article belongs to the Special Issue Micromachined Tools for Nanoscale Science and Technology)
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Last update: 27 August 2012

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