Special Issue "Glass Micromachining"
A special issue of Micromachines (ISSN 2072-666X).
Deadline for manuscript submissions: closed (31 October 2016)
Prof. Dr. Rolf Wuthrich
Department of Mechanical and Industrial Engineering, Concordia University, 1455 de Maisonneuve Blvd. West, Montreal, QC H3G 1M8, Canada
Website | E-Mail
Phone: +1 514 848 2424 (ext. 3150)
Fax: +1 514 848 3175
Interests: micro- and nano- systems; nano-particle fabrication; micro-machining technologies; green energy converting systems
Glass micromachining is becoming an essential material for optical micro-electro-mechanical-systems (MOEMS), miniaturized total analysis systems (µTAS), and microfluidic devices (e.g., for biosensing). In particular, the machining of smooth, high aspect ratio through glass vias (TGVs) in glass is crucial for the fabrication of interposers in the emerging packaging industry for small consumer electronics. However, glass is challenging to machine, in particular, at the micro-scale. Due to its brittleness, mechanical processes often result in undesired micro-cracks, and its relatively high thermal conductivity challenges the thermal process, which faces the issue of thermally affected zones. Additionally, its amorphous structure makes it difficult to etch high aspect-ratio structures. These challenges stimulate research in industry and academia, and, in recent years, this field has seen major advances.
This special issue seeks reviews, regular research papers and short communication on: (i) new approaches to micro machine glass, (ii) innovative use of existing techniques to address current challenges in glass micro-machining and (iii) opinions on future needs in glass micro-machining in emerging markets.
Prof. Dr. Rolf Wuthrich
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All papers will be peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 1200 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
- glass micro-machining
- glass micro/nano devices
The below list represents only planned manuscripts. Some of these manuscripts have not been received by the Editorial Office yet. Papers submitted to MDPI journals are subject to peer-review.
Title: Micro-hole drilling on glass substrates—A review
Authors: Lucas A. Hof and Jana D. Abou Ziki
Abstract: Glass micromachining is nowadays becoming essential for the fabrication of micro-devices including optical micro-electro-mechanical-systems (MOEMS), miniaturized total analysis systems (µTAS) and microfluidic devices for biosensing. Moreover, glass is RF transparent, making it an excellent material for sensor and energy transmission devices. Advancements are constantly being made in this field, yet machining smooth high-aspect-ratio through glass vias (TGVs) remains challenging due to glass poor machinability. As TGVs are demanded for several micro-devices, research is being immensely carried out on numerous number of glass micro-machining technologies. This paper reviews established and emerging technologies for glass micro-hole drilling describing their principles of operation and characteristics, and their advantages and disadvantages. These technologies are sorted under four machining categories: thermal, chemical, mechanical, and hybrid machining which combines several machining methods. Achieved features by these methods are summarized in a table and presented in two graphs.
Keywords: micro-drilling techniques; glass; micro-devices; micro-fluidics
Title: Plasma milled glass as templates for microfluidic applications
Author: Jesse Greener
Abstract: As microfluidics matures, new demands on production volumes and device complexities will put pressures on manufacturers to search for innovations in microfabrication techniques. In this paper, we evaluate the possibility of using templates based on a new plasma milling technique for polymer devices via curing of elastomers and hot embossing of thermoplastics. Target materials are PDMS. We evaluate this new approach in terms of the quality of template tools and imprinted parts, the ease of use and longevity of templates and the ability to generate 3D features.