Special Issue "Glass Micromachining and Applications of Glass"

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A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (31 December 2012)

Special Issue Editor

Guest Editor
Dr. Marko T. Blom
Micronit Microfluidics BV, Colosseum 15, 7521 PV Enschede, The Netherlands
Website: http://www.micronit.com
E-Mail: marko.blom@micronit.com
Phone: +31 53 850 6 850
Fax: +31 53 850 6 851
Interests: lab-on-a-chip; microfluidics; MEMS; bioMEMS; glass micromachining

Special Issue Information

Dear Colleagues,

Although glass machining techniques have been around for some time, micromachining of glass is relatively new. Adoption of technologies from the silicon MEMS field such as wet chemical etching and micro powderblasting has led to glass-specific, wafer-scale and thereby cost-effective manufacturing processes. This combination of cost-effective and high accuracy machining in turn has led to a whole range of new application areas for glass devices, such as glass lab-on-a-chip, high optical quality flowcells, microreactors and hermetic packaging of sensors.

Obviously, the development of machining techniques has been and still is progressing further, for instance enabling high aspect ratio laser machining of structure types that would otherwise be impossible. For this reason we invite submission of papers, both on glass micromachining techniques in the broadest sense and on applications of glass microfabrication. This latter could include, but is not limited to: lab-on-a-chip, flowcells, microreactors, microchip capillary electrophoresis, wafer-scale packaging and glass MEMS.

Dr. Marko T. Blom
Guest Editor

Keywords

  • glass micromachining and microfabrication
  • lab-on-a-chip
  • flowcells
  • glass MEMS
  • capillary electrophoresis
  • microreactors
  • laser structuring of glass
  • (hermetic) wafer-scale packaging

Published Papers (4 papers)

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Displaying article 1-4
p. 149-156
by  and
Micromachines 2013, 4(2), 149-156; doi:10.3390/mi4020149
Received: 25 January 2013; in revised form: 26 March 2013 / Accepted: 26 March 2013 / Published: 2 April 2013
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(This article belongs to the Special Issue Glass Micromachining and Applications of Glass)
p. 128-137
by ,  and
Micromachines 2013, 4(2), 128-137; doi:10.3390/mi4020128
Received: 31 December 2012; in revised form: 28 January 2013 / Accepted: 1 March 2013 / Published: 27 March 2013
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(This article belongs to the Special Issue Glass Micromachining and Applications of Glass)
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p. 67-79
by , , ,  and
Micromachines 2013, 4(1), 67-79; doi:10.3390/mi4010067
Received: 4 January 2013; in revised form: 16 February 2013 / Accepted: 20 February 2013 / Published: 13 March 2013
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(This article belongs to the Special Issue Glass Micromachining and Applications of Glass)
p. 604-614
by , , , ,  and
Micromachines 2012, 3(4), 604-614; doi:10.3390/mi3040604
Received: 6 August 2012; in revised form: 28 August 2012 / Accepted: 17 September 2012 / Published: 28 September 2012
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(This article belongs to the Special Issue Glass Micromachining and Applications of Glass)
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Last update: 27 February 2014

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