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Micromachines
Special Issues
Micro-Machining: Challenges and Opportunities
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Micro-Machining: Challenges and Opportunities

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D：Materials and Processing".

Deadline for manuscript submissions: closed (31 May 2018) | Viewed by 88487

Special Issue Editors

Prof. Dr. Xichun Luo

E-Mail Website
Guest Editor
Centre for Precision Manufacturing, Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XJ, UK
Interests: ultra-precision machining; hybrid micromachining; nanofabrication; digital manufacturing
Special Issues, Collections and Topics in MDPI journals
Dr. Wenlong Chang

E-Mail Website
Guest Editor
Centre for Precision Manufacturing, Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow, UK
Interests: micro-milling; micro EDM; laser micromachining; hybrid micromachining
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Jining Sun

E-Mail Website
Guest Editor
Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian, China
Interests: FIB micro- and nano-machining; micro-grinding; numerical simulation; applications of micro/nano machining in smart surfaces; photonics and quantum sciences
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Micromachining is an enabling technology for manufacturing micro-products of which functional features, or at least one dimension, are in the order of μm. It is pivotal to our economy, as micro-products, such as micro displays, micro batteries, micro fluidics, etc., are becoming established in all major areas of our daily lives, and can already be found across a broad spectrum of application areas, especially in sectors such as automotive, aerospace, photonics, renewable energy and medical instruments. 

Nowadays, micromachining technologies are clearly advancing towards the economical manufacturing of customized high-precision 3D micro-products made of a variety of materials, including difficult-to-machine materials, such as glass, sappier, ceramics, hard steels, and CoCr. They propose significant research challenges from the aspects of fundamental machining mechanisms, micro-tooling technologies, machine dynamics, machining dynamics, thermal control, etc., but, meanwhile, provide great opportunities to research and develop new advanced micromachining technologies, such as multi-scale modelling, hybrid micromachining, and dynamic error compensation to name a few. 

Therefore, we invite contributions to showcase recent novel technological advances in micromachining technologies. Papers in all areas of micromachining technologies will be considered; including, but not limited to, micro-cutting, micro-milling, micro-grinding, polishing, micro-EDM, micro-ECM, laser micromachining, FIB micromachining, and hybrid micromachining. Original research papers, review articles and short communications are all welcome.  

Prof. Xichun Luo
Dr. Wenlong Chang
Dr. Jining Sun
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • micro-cutting

  • micro-milling

  • micro-grinding

  • micro-ECM

  • micro-EDM

  • laser micromachining

  • FIB micromachining

  • hybrid micromachining

  • multi-sale modelling

Related Special Issues

Published Papers (18 papers)

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Editorial

Jump to: Research, Review

4 pages, 168 KiB  
Editorial
Editorial for the Special Issue on Micro-Machining: Challenges and Opportunities
by Xichun Luo, Wenlong Chang and Jining Sun
Micromachines 2018, 9(11), 564; https://doi.org/10.3390/mi9110564 - 31 Oct 2018
Viewed by 2250
Abstract
Micro-machining is an enabling technology for the manufacture of micro-products in which functional features, or at least one dimension, are in the order of μm. [...] Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)

Research

Jump to: Editorial, Review

14 pages, 5921 KiB  
Article
Molecular Dynamics Investigation of Residual Stress and Surface Roughness of Cerium under Diamond Cutting
by Yao Li, Maobing Shuai, Junjie Zhang, Haibing Zheng, Tao Sun and Yang Yang
Micromachines 2018, 9(8), 386; https://doi.org/10.3390/mi9080386 - 03 Aug 2018
Cited by 18 | Viewed by 3251
Abstract
Machined surface quality in terms of residual stress and surface roughness has an important influence on the performance of devices and components. In the present work, we elucidate the formation mechanisms of residual stress and surface roughness of single crystalline cerium under ultraprecision [...] Read more.
Machined surface quality in terms of residual stress and surface roughness has an important influence on the performance of devices and components. In the present work, we elucidate the formation mechanisms of residual stress and surface roughness of single crystalline cerium under ultraprecision diamond cutting by means of molecular dynamics simulations. Influences of machining parameters, such as the rake angle of a cutting tool, depth of cut, and crystal orientation of the workpiece on the machined surface quality were also investigated. Simulation results revealed that dislocation activity and lattice distortion are the two parallel factors that govern the formation of both residual stress and surface roughness. It was found that both distributions of residual stress and surface roughness of machined surface are significantly affected by machining parameters. The optimum machining parameters for achieving high machined surface quality of cerium by diamond cutting are revealed. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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17 pages, 6067 KiB  
Article
Microchannels Fabrication in Alumina Ceramic Using Direct Nd:YAG Laser Writing
by Muneer Khan Mohammed, Usama Umer, Ateekh Ur Rehman, Abdulrahman M. Al-Ahmari and Abdulaziz M. El-Tamimi
Micromachines 2018, 9(8), 371; https://doi.org/10.3390/mi9080371 - 27 Jul 2018
Cited by 8 | Viewed by 3554
Abstract
Ceramic microchannels have important applications in different microscale systems like microreactors, microfluidic devices and microchemical systems. However, ceramics are considered difficult to manufacture owing to their wear and heat resistance capabilities. In this study, microchannels are developed in alumina ceramic using direct Nd:YAG [...] Read more.
Ceramic microchannels have important applications in different microscale systems like microreactors, microfluidic devices and microchemical systems. However, ceramics are considered difficult to manufacture owing to their wear and heat resistance capabilities. In this study, microchannels are developed in alumina ceramic using direct Nd:YAG laser writing. The laser beam with a characteristic pulse width of 10 µs and a beam spot diameter of 30 µm is used to make 200 µm width microchannels with different depths. The effects of laser beam intensity and pulse overlaps on dimensional accuracy and material removal rate have been investigated using different scanning patterns. It is found that beam intensity has a major influence on dimensional accuracy and material removal rate. Optimum parameter settings are found using grey relational grade analysis. It is concluded that low intensity and low to medium pulse overlap should be used for better dimensional accuracy. This study facilitates further understanding of laser material interaction for different process parameters and presents optimum laser process parameters for the fabrication of microchannel in alumina ceramic. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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18 pages, 5160 KiB  
Article
A New Grinding Force Model for Micro Grinding RB-SiC Ceramic with Grinding Wheel Topography as an Input
by Zhipeng Li, Feihu Zhang, Xichun Luo, Xiaoguang Guo, Yukui Cai, Wenlong Chang and Jining Sun
Micromachines 2018, 9(8), 368; https://doi.org/10.3390/mi9080368 - 26 Jul 2018
Cited by 24 | Viewed by 5433
Abstract
The ability to predict the grinding force for hard and brittle materials is important to optimize and control the grinding process. However, it is a difficult task to establish a comprehensive grinding force model that takes into account the brittle fracture, grinding conditions, [...] Read more.
The ability to predict the grinding force for hard and brittle materials is important to optimize and control the grinding process. However, it is a difficult task to establish a comprehensive grinding force model that takes into account the brittle fracture, grinding conditions, and random distribution of the grinding wheel topography. Therefore, this study developed a new grinding force model for micro-grinding of reaction-bonded silicon carbide (RB-SiC) ceramics. First, the grinding force components and grinding trajectory were analysed based on the critical depth of rubbing, ploughing, and brittle fracture. Afterwards, the corresponding individual grain force were established and the total grinding force was derived through incorporating the single grain force with dynamic cutting grains. Finally, a series of calibration and validation experiments were conducted to obtain the empirical coefficient and verify the accuracy of the model. It was found that ploughing and fracture were the dominate removal modes, which illustrate that the force components decomposed are correct. Furthermore, the values predicted according to the proposed model are consistent with the experimental data, with the average deviation of 6.793% and 8.926% for the normal and tangential force, respectively. This suggests that the proposed model is acceptable and can be used to simulate the grinding force for RB-SiC ceramics in practice. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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12 pages, 6317 KiB  
Article
Effects of Process Parameters on Material Removal in Vibration-Assisted Polishing of Micro-Optic Mold
by Jiang Guo and Hirofumi Suzuki
Micromachines 2018, 9(7), 349; https://doi.org/10.3390/mi9070349 - 12 Jul 2018
Cited by 9 | Viewed by 3498
Abstract
Process parameter conditions such as vibrating motion, abrasives, pressure and tool wear play an important role in vibration-assisted polishing of micro-optic molds as they strongly affect material removal efficiency and stability. This paper presents an analytical and experimental investigation on the effects of [...] Read more.
Process parameter conditions such as vibrating motion, abrasives, pressure and tool wear play an important role in vibration-assisted polishing of micro-optic molds as they strongly affect material removal efficiency and stability. This paper presents an analytical and experimental investigation on the effects of process parameters, aimed at clarifying interrelations between material removal and process parameters which affect polishing quantitatively. The material removal rate (MRR) and surface roughness which represent the polishing characteristics were examined under different vibrating motions, grain sizes of abrasives and polishing pressure. The effects of pressure and tool wear conditions on tool influence function were analyzed. The results showed that 2D vibrating motion generated better surface roughness with higher material removal efficiency while a smaller grain size of abrasives created better surface roughness but lower material removal efficiency. MRR gradually decreases with the increase of polishing pressure when it exceeds 345 kPa, and it was greatly affected by the wear of polisher when wear diameter on the polisher’s head exceeds 300 μm. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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15 pages, 6562 KiB  
Article
Kinematics Error Compensation for a Surface Measurement Probe on an Ultra-Precision Turning Machine
by Duo Li, Xiangqian Jiang, Zhen Tong and Liam Blunt
Micromachines 2018, 9(7), 334; https://doi.org/10.3390/mi9070334 - 02 Jul 2018
Cited by 23 | Viewed by 4819
Abstract
In order to enhance the measurement availability for manufacturing applications, on-machine surface measurement (OMSM) is integrated onto the machine tools, which avoids the errors caused by re-positioning workpieces and utilizes the machine axes to extend the measuring range as well. However, due to [...] Read more.
In order to enhance the measurement availability for manufacturing applications, on-machine surface measurement (OMSM) is integrated onto the machine tools, which avoids the errors caused by re-positioning workpieces and utilizes the machine axes to extend the measuring range as well. However, due to the fact that measurement probe actuation is performed using the machine tool axes, the inherent kinematics error will inevitably induce additional deviations onto the OMSM results. This paper presents a systematic methodology of kinematics error modelling, measurement, and compensation for OMSM on an ultra-precision turning lathe. According to the measurement task, a selective kinematics error model is established with four primary error components in the sensitive measurement direction, based on multi-body theory and a homogeneous transformation matrix (HTM). In order to separate the artefact error from the measurement results, the selected error components are measured using the reversal method. The measured error value agrees well with the machine tool’s specification and a kinematics error map is generated for further compensation. To verify the effectiveness of the proposed kinematics error modelling, measurement, and compensation, an OMSM experiment of an optically flat mirror is carried out. The result indicates the OMSM is the superposition of the sample surface form error and the machine tool kinematics error. With the implementation of compensation, the accuracy of the characterized flatness error from the OMSM improves by 67%. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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11 pages, 6191 KiB  
Article
Novel Disc Hydrodynamic Polishing Process and Tool for High-Efficiency Polishing of Ultra-Smooth Surfaces
by Bin Lin, Xiang-Min Jiang, Zhong-Chen Cao and Yan Li
Micromachines 2018, 9(7), 333; https://doi.org/10.3390/mi9070333 - 02 Jul 2018
Cited by 14 | Viewed by 3949
Abstract
Nowadays, large aspheric surfaces, including non-rotationally symmetric surfaces, are increasingly used in ground- and space-based astronomical instruments. The fabrication of these surfaces with sub-micrometric form accuracy and nanometric surface finish, especially for hard and difficult-to-machine materials, has always been a challenge to the [...] Read more.
Nowadays, large aspheric surfaces, including non-rotationally symmetric surfaces, are increasingly used in ground- and space-based astronomical instruments. The fabrication of these surfaces with sub-micrometric form accuracy and nanometric surface finish, especially for hard and difficult-to-machine materials, has always been a challenge to the optics industry. To produce ultra-smooth surfaces efficiently without subsurface damage and surface scratches, a novel disc hydrodynamic polishing (DHDP) process is proposed through the combination of elastic emission machining and fluid jet polishing. Firstly, the polishing tool for DHDP was carefully designed and the feasibility of the proposed method was experimentally verified. The liquid film was found to act as a carrier of abrasive grains between the polishing tool and the polished surface. Next, computational fluid dynamics (CFD) was used to study the effects of process parameters on the slurry film flow in DHDP. Finally, preliminary experiments were conducted to verify the CFD simulations. The experimental data reasonably agree with the simulation results, which show that increasing rotational speed has no influence on the film thickness for the polishing tool without grooves, but leads to increased film thickness for the polishing tool with grooves. Moreover, DHDP can efficiently reduce the surface roughness and acquire ultra-smooth surfaces without subsurface damage and scratches. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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12 pages, 3634 KiB  
Article
A Generic Control Architecture for Hybrid Micro-Machines
by Xichun Luo, Wenbin Zhong and Wenlong Chang
Micromachines 2018, 9(6), 305; https://doi.org/10.3390/mi9060305 - 19 Jun 2018
Cited by 2 | Viewed by 4427
Abstract
Hybrid micro-machining, which integrates several micro-manufacturing processes on one platform, has emerged as a solution to utilize the so-called “1 + 1 = 3” effect to tackle the manufacturing challenges for high value-added 3D micro-products. Hybrid micro-machines tend to integrate multiple functional modules [...] Read more.
Hybrid micro-machining, which integrates several micro-manufacturing processes on one platform, has emerged as a solution to utilize the so-called “1 + 1 = 3” effect to tackle the manufacturing challenges for high value-added 3D micro-products. Hybrid micro-machines tend to integrate multiple functional modules from different vendors for the best value and performance. However, the lack of plug-and-play solutions leads to tremendous difficulty in system integration. This paper proposes a novel three-layer control architecture for the first time for the system integration of hybrid micro-machines. The interaction of hardware is encapsulated into software components, while the data flow among different components is standardized. The proposed control architecture enhances the flexibility of the computer numerical control (CNC) system to accommodate a broad range of functional modules. The component design also improves the scalability and maintainability of the whole system. The effectiveness of the proposed control architecture has been successfully verified through the integration of a six-axis hybrid micro-machine. Thus, it provides invaluable guidelines for the development of next-generation CNC systems for hybrid micro-machines. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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14 pages, 8152 KiB  
Article
Effect of Machining Parameters and Tool Wear on Surface Uniformity in Micro-Milling
by Zhanwen Sun and Suet To
Micromachines 2018, 9(6), 268; https://doi.org/10.3390/mi9060268 - 29 May 2018
Cited by 19 | Viewed by 3857
Abstract
In micro-milling, the periodically varying chip thickness, which varies with tool rotation, leads to varying degrees of minimum chip thickness effect and ploughing effect during surface generation. This results in a change of roughness in the cross-sectional direction of the micro-grooves, giving a [...] Read more.
In micro-milling, the periodically varying chip thickness, which varies with tool rotation, leads to varying degrees of minimum chip thickness effect and ploughing effect during surface generation. This results in a change of roughness in the cross-sectional direction of the micro-grooves, giving a non-uniform surface quality. However, the factors influencing surface uniformity in micro-milling are not fully understood. In the present work, the effect of the machining parameters and tool wear on surface uniformity in micro-milling is theoretically and experimentally studied. A mathematical model is proposed to predict the varying surface roughness in the cross-sectional direction of the micro-grooves, which is experimentally validated by fabricating a set of 800 µm wide micro-grooves. The theoretical and experimental results reveal that, compared to the normally adopted Ra or Sa, the relative standard deviation of roughness (RSDS) is more appropriate to evaluating surface uniformity. When machining under small feed rates and small cutting depths, the surface uniformity deteriorates as the feed rate increases and improves as the cutting depth increases. The blunt cutting edge induced by tool wear enhances the surface uniformity and increases the surface roughness at the same time. This research furthers understanding of the various cutting mechanisms in micro-milling and can be applied to the optimization of machining parameters in micro-milling. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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8 pages, 16459 KiB  
Article
Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source
by Axiu Cao, Hui Pang, Jiazhou Wang, Lifang Shi, Qiling Deng and Song Hu
Micromachines 2018, 9(6), 256; https://doi.org/10.3390/mi9060256 - 24 May 2018
Cited by 3 | Viewed by 2513
Abstract
Quantum correlated imaging using the intensity fluctuations of thermal light possesses advantages of high resolution and strong anti-interference ability. The common method to produce pseudo-thermal light source is using a rotary ground glass and transmission of laser beam. In the present work, we [...] Read more.
Quantum correlated imaging using the intensity fluctuations of thermal light possesses advantages of high resolution and strong anti-interference ability. The common method to produce pseudo-thermal light source is using a rotary ground glass and transmission of laser beam. In the present work, we propose a method for the fabrication of microwell arrays with randomly varied diameters, which could be used as a new structural element for pseudo-thermal speckle light source. If these are etched with random sizes then they may also have random and complex varying curvatures (diffusion limited etching) leading to random destructive interference of the coherent beam which could be a good thing. The microwell arrays, with diameters randomly varying from 5 μm to 40 μm, height varying from 200 nm to 20 μm, were fabricated by photolithography combined with acid etching. The experimental conditions are simple and can be scaled up to for large structures. The produced microwell arrays can transform the laser beam to a pseudo-thermal light source with a certain divergent angle by rational designing of mask and adjustable process parameters. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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10 pages, 3251 KiB  
Article
Fabrication of a Hydrophilic Line on a Hydrophobic Surface by Laser Ablation Processing
by Minkyung Kim and Jiwhan Noh
Micromachines 2018, 9(5), 208; https://doi.org/10.3390/mi9050208 - 28 Apr 2018
Cited by 6 | Viewed by 4873
Abstract
A hydrophilic line on a hydrophobic surface was fabricated by using plasma etching and laser ablation processing in this paper. We fabricated the nanospikes on a polyimide surface by using the plasma etching processing. CHF3 plasma treatment for hydrophobic coating was conducted [...] Read more.
A hydrophilic line on a hydrophobic surface was fabricated by using plasma etching and laser ablation processing in this paper. We fabricated the nanospikes on a polyimide surface by using the plasma etching processing. CHF3 plasma treatment for hydrophobic coating was conducted on these nanospikes. We fabricated the microgrooves on the hydrophobic nanospikes surface using laser ablation processing. The microgroove had hydrophilic characteristics. In order to measure the hydrophilic characteristics of the microgroove, a solution that was dispersed with silver nanoparticles was used. The hydrophilic line on the hydrophobic surface was dipped in the silver nanoparticle solution. The silver nanoparticles were attached on the hydrophilic microgroove and not on the hydrophobic surface. We concluded that the laser heat affected zone should be reduced for reducing the hydrophilic line width. This hydrophilic pattern on the hydrophobic surface can be used for cell growth, protein manipulation, the spotting of biomolecules, micro-fluidics and water collection. This functional surface can especially be used for an electric flexible circuit, which is newly proposed in this paper. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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13 pages, 33679 KiB  
Article
Progress on the Use of Commercial Digital Optical Disc Units for Low-Power Laser Micromachining in Biomedical Applications
by Aarón Cruz-Ramírez, Raúl Sánchez-Olvera, Diego Zamarrón-Hernández, Mathieu Hautefeuille, Lucia Cabriales, Edgar Jiménez-Díaz, Beatriz Díaz-Bello, Jehú López-Aparicio, Daniel Pérez-Calixto, Mariel Cano-Jorge and Genaro Vázquez-Victorio
Micromachines 2018, 9(4), 187; https://doi.org/10.3390/mi9040187 - 16 Apr 2018
Cited by 6 | Viewed by 5773
Abstract
The development of organ-on-chip and biological scaffolds is currently requiring simpler methods for microstructure biocompatible materials in three dimensions, to fabricate structural and functional elements in biomaterials, or modify the physicochemical properties of desired substrates. Aiming at addressing this need, a low-power CD-DVD-Blu-ray [...] Read more.
The development of organ-on-chip and biological scaffolds is currently requiring simpler methods for microstructure biocompatible materials in three dimensions, to fabricate structural and functional elements in biomaterials, or modify the physicochemical properties of desired substrates. Aiming at addressing this need, a low-power CD-DVD-Blu-ray laser pickup head was mounted on a programmable three-axis micro-displacement system in order to modify the surface of polymeric materials in a local fashion. Thanks to a specially-designed method using a strongly absorbing additive coating the materials of interest, it has been possible to establish and precisely control processes useful in microtechnology for biomedical applications. The system was upgraded with Blu-ray laser for additive manufacturing and ablation on a single platform. In this work, we present the application of these fabrication techniques to the development of biomimetic cellular culture platforms thanks to the simple integration of several features typically achieved with traditional, less cost-effective microtechnology methods in one step or through replica-molding. Our straightforward approach indeed enables great control of local laser microablation or polymerization for true on-demand biomimetic micropatterned designs in transparent polymers and hydrogels and is allowing integration of microfluidics, microelectronics, surface microstructuring, and transfer of superficial protein micropatterns on a variety of biocompatible materials. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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13 pages, 44354 KiB  
Article
Investigation on Surface Integrity of Rapidly Solidified Aluminum RSA 905 by Magnetic Field-Assisted Finishing
by Jiang Guo, Hao Wang, Min Hao Goh and Kui Liu
Micromachines 2018, 9(4), 146; https://doi.org/10.3390/mi9040146 - 25 Mar 2018
Cited by 13 | Viewed by 4967
Abstract
RSA 905, a rapidly solidified aluminum alloy, has been widely utilized in optical, automotive, and aerospace industries owing to its superior mechanical properties such as hardness and strength compared to conventional aluminum alloys. However, the surface finishing of RSA 905 to achieve submicron [...] Read more.
RSA 905, a rapidly solidified aluminum alloy, has been widely utilized in optical, automotive, and aerospace industries owing to its superior mechanical properties such as hardness and strength compared to conventional aluminum alloys. However, the surface finishing of RSA 905 to achieve submicron surface roughness is quite challenging and was rarely addressed. This paper presents an experimental and analytical study on magnetic field-assisted finishing (MFAF) of RSA 905 through a systematic investigation on surface integrity in relation to the MFAF process parameters. The effect of abrasive and polishing speed conditions on material removal and surface roughness was quantitatively investigated. The surface and subsurface quality were evaluated by optical microscope and scanning electron microscope (SEM) observations, residual stress measurement, surface microhardness and tribology test. The results show that relatively high material removal and low surface roughness were obtained under conditions using the SiC abrasive with a grit size of 12 µm at polishing speed of 400 rpm or using the Al2O3 abrasive with a grit size of 5 µm at polishing speed of 800 rpm. Heat melt layer caused by wire electrical discharge machining (EDM) during the sample preparation was removed by MFAF without inducing new subsurface damage. The MFAF process also helps release the surface residual stress and improve the tribological performance although the surface microhardness was slightly reduced. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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16 pages, 8399 KiB  
Article
Experimental Investigation on Ductile Mode Micro-Milling of ZrO2 Ceramics with Diamond-Coated End Mills
by Rong Bian, Eleonora Ferraris, Yinfei Ynag and Jun Qian
Micromachines 2018, 9(3), 127; https://doi.org/10.3390/mi9030127 - 14 Mar 2018
Cited by 23 | Viewed by 5592
Abstract
ZrO2 ceramics are currently used in a broad range of industrial applications. However, the machining of post-sintered ZrO2 ceramic is a difficult task, due to its high hardness and brittleness. In this study, micro-milling of ZrO2 with two kinds of [...] Read more.
ZrO2 ceramics are currently used in a broad range of industrial applications. However, the machining of post-sintered ZrO2 ceramic is a difficult task, due to its high hardness and brittleness. In this study, micro-milling of ZrO2 with two kinds of diamond-coated end mills has been conducted on a Kern MMP 2522 micro-milling center (Kern Microtechnik GmbH, Eschenlohe, Germany). To achieve a ductile mode machining of ZrO2, the feed per tooth and depth of cut was set in the range of a few micrometers. Cutting force and machined surface roughness have been measured by a Kistler MiniDynamometer (Kistler Group, Winterthur, Switzerland) and a Talysurf 120 L profilometer (Taylor Hobson Ltd., Leicester, UK), respectively. Machined surface topography and tool wear have been examined under SEM. Experiment results show that the material can be removed in ductile mode, and mirror quality surface with Ra low as 0.02 μm can be achieved. Curled and smooth chips have been collected and observed. The axial cutting force Fz is always bigger than Fx and Fy, and presents a rising trend with increasing of milling length. Tool wear includes delamination of diamond coating and wear of tungsten carbide substrate. Without the protection of diamond coating, the tungsten carbide substrate was worn out quickly, resulting a change of tool tip geometry. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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13 pages, 4016 KiB  
Article
The Design of Rare-Earth Giant Magnetostrictive Ultrasonic Transducer and Experimental Study on Its Application of Ultrasonic Surface Strengthening
by Shanxiang Fang, Qinjian Zhang, Huiling Zhao, Jingzhou Yu and Yongchen Chu
Micromachines 2018, 9(3), 98; https://doi.org/10.3390/mi9030098 - 27 Feb 2018
Cited by 19 | Viewed by 4426
Abstract
Ultrasonic transducer based on rare-earth giant magnetostrictive materials was designed in accordance with the technical requirements of ultrasonic surface strengthening. The whole structure of the transducer was designed. Modal analysis is made to get the natural frequency of the compound oscillator. The working [...] Read more.
Ultrasonic transducer based on rare-earth giant magnetostrictive materials was designed in accordance with the technical requirements of ultrasonic surface strengthening. The whole structure of the transducer was designed. Modal analysis is made to get the natural frequency of the compound oscillator. The working frequency of the transducer should be guaranteed at about 15.2 kHz and the composite oscillator should have relatively better vibration mode. The magnetic field of the transducer is well sealed and the transducer will not show obvious magnetic flux leakage phenomenon. Which shows the rationality of structural design. Based on this transducer, the ultrasonic surface strengthening experiment on 40 steel was conducted. The surface roughness and hardness of the parts were analyzed after the experiment. The results show that the surface of the parts reach the mirror surface result after the ultrasonic strengthening. When compared to the previous process, the roughness decreases by about 75%, and the surface hardness increases by more than 20%. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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12 pages, 15646 KiB  
Article
Fabrication of a Micro-Lens Array Mold by Micro Ball End-Milling and Its Hot Embossing
by Peng Gao, Zhiqiang Liang, Xibin Wang, Tianfeng Zhou, Jiaqing Xie, Shidi Li and Wenhua Shen
Micromachines 2018, 9(3), 96; https://doi.org/10.3390/mi9030096 - 26 Feb 2018
Cited by 22 | Viewed by 6367
Abstract
Hot embossing is an efficient technique for manufacturing high-quality micro-lens arrays. The machining quality is significant for hot embossing the micro-lens array mold. This study investigates the effects of micro ball end-milling on the machining quality of AISI H13 tool steel used in [...] Read more.
Hot embossing is an efficient technique for manufacturing high-quality micro-lens arrays. The machining quality is significant for hot embossing the micro-lens array mold. This study investigates the effects of micro ball end-milling on the machining quality of AISI H13 tool steel used in the micro-lens array mold. The micro ball end-milling experiments were performed under different machining strategies, and the surface roughness and scallop height of the machined micro-lens array mold are measured. The experimental results showed that a three-dimensional (3D) offset spiral strategy could achieve a higher machining quality in comparison with other strategies assessed in this study. Moreover, the 3D offset spiral strategy is more appropriate for machining the micro-lens array mold. With an increase of the cutting speed and feed rate, the surface roughness of the micro-lens array mold slightly increases, while a small step-over can greatly reduce the surface roughness. In addition, a hot embossing experiment was undertaken, and the obtained results indicated higher-quality production of the micro-lens array mold by the 3D offset spiral strategy. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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11 pages, 3395 KiB  
Article
Ultrasonically Assisted Single Point Diamond Turning of Optical Mold of Tungsten Carbide
by Zhanjie Li, Gang Jin, Fengzhou Fang, Hu Gong and Haili Jia
Micromachines 2018, 9(2), 77; https://doi.org/10.3390/mi9020077 - 12 Feb 2018
Cited by 27 | Viewed by 6411
Abstract
To realize high efficiency, low/no damage and high precision machining of tungsten carbide used for lens mold, a high frequency ultrasonic vibration cutting system was developed at first. Then, tungsten carbide was precisely machined with a polycrystalline diamond (PCD) tool assisted by the [...] Read more.
To realize high efficiency, low/no damage and high precision machining of tungsten carbide used for lens mold, a high frequency ultrasonic vibration cutting system was developed at first. Then, tungsten carbide was precisely machined with a polycrystalline diamond (PCD) tool assisted by the self-developed high frequency ultrasonic vibration cutting system. Tool wear mechanism was investigated in ductile regime machining of tungsten carbide. The cutter back-off phenomenon in the process was analyzed. The subsequent experimental results of ultra-precision machining with a single crystal diamond tool showed that: under the condition of high frequency ultrasonic vibration cutting, nano-scale surface roughness can be obtained by the diamond tool with smaller tip radius and no defects like those of ground surface were found on the machined surface. Tool wear mechanisms of the single crystal diamond tool are mainly abrasive wear and micro-chipping. To solve the problem, a method of inclined ultrasonic vibration cutting with negative rake angle was put forward according to force analysis, which can further reduce tool wear and roughness of the machined surface. The investigation was important to high efficiency and quality ultra-precision machining of tungsten carbide. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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Review

Jump to: Editorial, Research

23 pages, 10408 KiB  
Review
Topic Review: Application of Raman Spectroscopy Characterization in Micro/Nano-Machining
by Zongwei Xu, Zhongdu He, Ying Song, Xiu Fu, Mathias Rommel, Xichun Luo, Alexander Hartmaier, Junjie Zhang and Fengzhou Fang
Micromachines 2018, 9(7), 361; https://doi.org/10.3390/mi9070361 - 21 Jul 2018
Cited by 107 | Viewed by 10218
Abstract
The defects and subsurface damages induced by crystal growth and micro/nano-machining have a significant impact on the functional performance of machined products. Raman spectroscopy is an efficient, powerful, and non-destructive testing method to characterize these defects and subsurface damages. This paper aims to [...] Read more.
The defects and subsurface damages induced by crystal growth and micro/nano-machining have a significant impact on the functional performance of machined products. Raman spectroscopy is an efficient, powerful, and non-destructive testing method to characterize these defects and subsurface damages. This paper aims to review the fundamentals and applications of Raman spectroscopy on the characterization of defects and subsurface damages in micro/nano-machining. Firstly, the principle and several critical parameters (such as penetration depth, laser spot size, and so on) involved in the Raman characterization are introduced. Then, the mechanism of Raman spectroscopy for detection of defects and subsurface damages is discussed. The Raman spectroscopy characterization of semiconductor materials’ stacking faults, phase transformation, and residual stress in micro/nano-machining is discussed in detail. Identification and characterization of phase transformation and stacking faults for Si and SiC is feasible using the information of new Raman bands. Based on the Raman band position shift and Raman intensity ratio, Raman spectroscopy can be used to quantitatively calculate the residual stress and the thickness of the subsurface damage layer of semiconductor materials. The Tip-Enhanced Raman Spectroscopy (TERS) technique is helpful to dramatically enhance the Raman scattering signal at weak damages and it is considered as a promising research field. Full article
(This article belongs to the Special Issue Micro-Machining: Challenges and Opportunities)
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