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Proceedings 2017, 1(4), 617; doi:10.3390/proceedings1040617

Aerosol/Ink Jet Printing Technology for High-Temperature MEMS Sensors

1
Kurchatov Complex of Physical and Chemical Technologies, National Research Center Kurchatov Institute, Moscow 123182, Russia
2
Sensor Laboratory, ITMO University, Saint-Petersburg, Russia
3
LLC RIIIT, Ostec Group, Moscow, Russia
4
National Research Nuclear University “MEPhI”, Moscow, Russia
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 18 August 2017
Download PDF [282 KB, uploaded 5 September 2017]

Abstract

In this work we present the results on the application of additive technology that is aerosol and ink jet technique for the fabrication of high-temperature metal oxide gas sensors. The application of thin (12 μm) alumina membrane, aerosol jet printing of Pt microheater (line width 40–60 μm), printed sensing layer made of nanocristalline tin dioxide based material, laser cutting of the membrane enabled the fabrication of full-printed cantilever-shaped high-temperature sensor with optimal power consumption (~80 mW at 450 °C) applicable in wireless instruments for the detection of combustible and toxic gases including methane.
Keywords: additive technology; aerosol and ink jet printing; high-temperature full printed sensor; metal oxide sensors; thermocatalytical sensor additive technology; aerosol and ink jet printing; high-temperature full printed sensor; metal oxide sensors; thermocatalytical sensor
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Vasiliev, A.A.; Nisan, A.V.; Samotaev, N.N. Aerosol/Ink Jet Printing Technology for High-Temperature MEMS Sensors. Proceedings 2017, 1, 617.

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