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Proceedings 2017, 1(4), 614; doi:10.3390/proceedings1040614

Design, Fabrication and Testing of the First 3D-Printed and Wet Metallized z-Axis Accelerometer

1
Department of Chemistry, Material and Chemical Engineering “Giulio Natta”, Politecnico di Milano, 20133 Milano, Italy
2
Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milano, Italy
3
Department of Electronics, Information and Bioengineering, Politecnico di Milano, 20133 Milano, Italy
4
Department of Mechanical Engineering, Politecnico di Milano, 20133 Milano, Italy
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 8 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
Download PDF [604 KB, uploaded 4 September 2017]

Abstract

In this work the design, fabrication and testing of the first 3D-printed and wet metallized capacitive z-axis accelerometer with a volume of 3.4 cm × 8 mm × 2.5 mm is presented. Preliminary results well match the modelling, both in terms of electromechanical parameters and of measured sensitivity, thus validating the proposed concept and fabrication process. With a spring thickness of 300 µm and a gap size of 200 µm for capacitive read-out, the presented device and the shown results can be considered as the first step toward 3D-printed MEMS (Micro-Electro-Mechanical Systems) inertial sensors.
Keywords: 3D-printing; wet metallization; MEMS; accelerometer 3D-printing; wet metallization; MEMS; accelerometer
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Credi, C.; Zega, V.; Bernasconi, R.; Langfelder, G.; Cigada, A.; Magagnin, L.; Levi, M.; Corigliano, A. Design, Fabrication and Testing of the First 3D-Printed and Wet Metallized z-Axis Accelerometer. Proceedings 2017, 1, 614.

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