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Proceedings 2017, 1(4), 556; doi:10.3390/proceedings1040556

A Miniaturized UV-LED Based Optical Gas Sensor Utilizing Silica Waveguides for the Measurement of Nitrogen Dioxide and Sulphur Dioxide

1
Corporate Sector Research & Advance Engineering, Robert Bosch GmbH, Renningen 71272, Germany
2
Institute of Solid State Physics, Technische Universität Berlin, Berlin 10623, Germany
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 15 August 2017
Download PDF [576 KB, uploaded 15 August 2017]

Abstract

Continuing advances in the development of light-emitting diodes (LEDs) in the deep ultraviolet spectral range (DUV) enable miniaturized, mobile, and cost-effective DUV gas sensors. Efficient light coupling, guiding, and splitting plays a key role for stable sensor systems and is realized by lowloss silica based waveguides, fabricated by ultrashort pulsed laser etching and laser polishing. The tapered waveguide leads to a significantly higher efficiency with less required space compared to optical fibers or free beam setups, respectively. Toxic gases like NO2 and SO2 were successfully measured down to 1 ppm utilizing LEDs with wavelengths of 395 nm and 280 nm.
Keywords: gas sensor; waveguide; UV; LED; absorption spectroscopy; laser processing; glass gas sensor; waveguide; UV; LED; absorption spectroscopy; laser processing; glass
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Elmlinger, P.; Schreivogel, M.; Weida, S.; Kneissl, M. A Miniaturized UV-LED Based Optical Gas Sensor Utilizing Silica Waveguides for the Measurement of Nitrogen Dioxide and Sulphur Dioxide. Proceedings 2017, 1, 556.

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