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Proceedings 2017, 1(4), 547; doi:10.3390/proceedings1040547

Photonic Gas Sensor Using a Silicon Strip Waveguide

1
Carinthian Tech Research AG, 9524 Villach, Austria
2
Infineon Technologies Austria AG, 9500 Villach, Austria
3
Johannes Kepler University, Institute for Microelectronics and Microsensors, 4040 Linz, Austria
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 25 August 2017
Download PDF [868 KB, uploaded 26 August 2017]

Abstract

Sensing of gases is a promising area for applications of photonic systems operating in the mid-infrared spectral range. We present an infrared evanescent-field absorption gas sensor based on a silicon strip waveguide, which was specifically designed for CO2 sensing. We discuss finite element simulations that were used to design the strip waveguide and furthermore present experimental data of quantitative CO2 measurements with the devised structures. The first demonstrator device detects concentrations down to 5000 ppm CO2 which is the workplace exposure limit in most jurisdictions.
Keywords: infrared gas sensing; silicon waveguide; evanescent-field absorption infrared gas sensing; silicon waveguide; evanescent-field absorption
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Ranacher, C.; Tortschanoff, A.; Consani, C.; Moridi, M.; Grille, T.; Jakoby, B. Photonic Gas Sensor Using a Silicon Strip Waveguide. Proceedings 2017, 1, 547.

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