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Proceedings 2017, 1(4), 540; doi:10.3390/proceedings1040540

Diamond Coated LW-SAW Sensors-Study of Diamond Thickness Effect

1
Institute of Physics, Academy of Sciences Czech Republic v.v.i, Prague 8, Czech Republic
2
Czech Technical University, Faculty of Biomedical Engineering, Kladno, Czech Republic
3
University Lille, Centrale Lille, UVHC, ISEN, LIA LICS/LEMAC-IEMN UMR CNRS 8520, F-59000 Paris, France
4
LN2, Université de Sherbrooke, 3IT, 3000 Bld de l'Université, Sherbrooke, QC, Canada
5
Institute of Organic Chemistry and Biochemistry, v.v.i., Academy of Sciences of the Czech Republic, Flemingovo nam. 2, 166 10 Prague 6, Czech Republic
6
Faculty of Science, Charles University, Hlavova 2030, 128 40 Prague 2, Czech Republic
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 9 August 2017
Download PDF [649 KB, uploaded 6 September 2017]

Abstract

This study focuses on the fabrication and characterization of Love wave surface acoustic wave (LW-SAW) sensors with a thin nano-crystalline diamond (NCD) coating with an integrated microfluidics system. The effect of diamond layer thickness on the acoustic wave phase velocity and the sensor’s sensitivity have been investigated experimentally and compared with theoretical simulations. The fabricated sensors have been tested with a several liquids using a home-made microfluidics system.
Keywords: Love waves; acoustic sensors; CVD diamond; sensing in liquids Love waves; acoustic sensors; CVD diamond; sensing in liquids
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Drbohlavová, L.; Gerbedoen, J.C.; Taylor, A.; Talbi, A.; Fekete, L.; Ashcheulov, P.; Soltani, A.; Bovtun, V.; Kempa, M.; Bartoň, J.; Cígler, P.; Mortet, V. Diamond Coated LW-SAW Sensors-Study of Diamond Thickness Effect. Proceedings 2017, 1, 540.

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