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Proceedings 2017, 1(4), 493; doi:10.3390/proceedings1040493

A Reversible Method to Characterize the Mass Sensitivity of a 3-Dof Mode Localized Coupled Resonator under Atmospheric Pressure

1
University of Liege, Department of Electrical Engineering and Computer Science, Montefiore Institute, 4000 Liege, Belgium
2
University of Cambridge, Department of Engineering, CB2 1PZ Cambridge, UK
3
University of Liege, Department of Infectious and Parasitic Diseases, Fundamental and Applied Research for Animals & Health (FARAH), Faculty of Veterinary Medicine, 4000 Liege, Belgium
sented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 11 August 2017
Download PDF [800 KB, uploaded 11 October 2017]

Abstract

In this paper, for the first time, the mass sensitivity of a 3-DoF mode localized electrostatic coupled resonator was characterized under atmospheric pressure. A reversible method was used in which nanoparticles are added on and removed from one resonator of the 3-DOF coupled resonator system. Besides, a comparison of three mass sensitivity characterization methods was carried out: resonance frequency shift, amplitude change and resonance vibration amplitude ratio. The results show that a 3-DOF mode localized coupled resonator has potential to be employed for biosensing applications.
Keywords: MEMS; micro-system; mode-localized sensors; coupled resonator sensors; mass sensors; bio-MEMS MEMS; micro-system; mode-localized sensors; coupled resonator sensors; mass sensors; bio-MEMS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Wang, Y.; Zhao, C.; Wang, C.; Cerica, D.; Baijot, M.; Pachkawade, V.; Ghorbani, A.; Boutier, M.; Vanderplasschen, A.; Kraft, M. A Reversible Method to Characterize the Mass Sensitivity of a 3-Dof Mode Localized Coupled Resonator under Atmospheric Pressure. Proceedings 2017, 1, 493.

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