Next Article in Journal
Surface Integrated Printed Interdigital Structure for Process Monitoring the Curing of an Adhesive Joint
Previous Article in Journal
Detection of Nitrate/Nitrite Using BDD Electrodes Coated with Metal Nano-Catalysts
Article Menu
Issue 4 (September) cover image

Article Versions

Export Article

Open AccessProceedings
Proceedings 2017, 1(4), 379; doi:10.3390/proceedings1040379

High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator

Beijing Research Institute of Telemetry, Beijing 100000, China
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 11 August 2017
Download PDF [526 KB, uploaded 6 September 2017]

Abstract

This paper reports a high accuracy oil-filled MEMS absolute pressure sensor based on quartz crystal double-ended tuning fork (DETF) resonator, which is suitable for application in ocean, petroleum, meteorological, aerospace and spacecraft field, etc. The pressure sensing unit is mainly composed of DETF resonator, diaphragm and back cavity structure. These pieces are all fabricated by quartz crystal using MEMS process, and are bonded together as ‘sandwich’ structure to form the absolute pressure sensing unit using glass frit under low temperature and vacuum condition. This process could effectively eliminate the thermal stress effect and form the reference vacuum cavity. The isolated packaged pressure sensor is composed of corrugated stainless steel diaphragm, silicone oil, pressure sensing unit and ceramic base package. The experimental results show that the accuracy is up to ±0.033% FS in the pressure range 0~300 kPa over the temperature range −20 °C~+45 °C.
Keywords: MEMS pressure sensor; high accuracy; quartz crystal resonator MEMS pressure sensor; high accuracy; quartz crystal resonator
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Wang, J.; Zhao, C.; Han, D.X.; Jin, X.F.; Zhang, S.M.; Zou, J.B.; Wang, M.M.; Li, W.B.; Guo, Y.B. High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator. Proceedings 2017, 1, 379.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Proceedings EISSN 2504-3900 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top