Nanogap Pirani Sensor Operating in Constant Temperature Mode for Near Atmospheric Pressure Measurements†
AbstractThis paper presents a high sensitive micro-sensor designed for pressure measurements in a wide range around atmospheric pressure, for application in aerodynamics. The sensor is a temperature-resistance transducer operating with the Pirani effect, which states that below a certain pressure limit, the thermal conductivity of a gas is pressure-dependent. The sensor presents a wide measurement range between 10 kPa and about 800 kPa, in both constant current and constant temperature mode. The last mode enables high-sensitive measurements with a maximum of sensitivity around atmospheric pressure, enabling the use of the sensor for applications in aerodynamics and fluid dynamics, such as active flow control.
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Ghouila-Houri, C.; Sindjui, R.; Moutaouekkil, M.; Elmazria, O.; Gallas, Q.; Garnier, E.; Merlen, A.; Viard, R.; Talbi, A.; Pernod, P. Nanogap Pirani Sensor Operating in Constant Temperature Mode for Near Atmospheric Pressure Measurements. Proceedings 2017, 1, 377.
Ghouila-Houri C, Sindjui R, Moutaouekkil M, Elmazria O, Gallas Q, Garnier E, Merlen A, Viard R, Talbi A, Pernod P. Nanogap Pirani Sensor Operating in Constant Temperature Mode for Near Atmospheric Pressure Measurements. Proceedings. 2017; 1(4):377.Chicago/Turabian Style
Ghouila-Houri, Cécile; Sindjui, Ralph; Moutaouekkil, Mohammed; Elmazria, Omar; Gallas, Quentin; Garnier, Eric; Merlen, Alain; Viard, Romain; Talbi, Abdelkrim; Pernod, Philippe. 2017. "Nanogap Pirani Sensor Operating in Constant Temperature Mode for Near Atmospheric Pressure Measurements." Proceedings 1, no. 4: 377.
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