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Proceedings 2017, 1(4), 377; doi:10.3390/proceedings1040377

Nanogap Pirani Sensor Operating in Constant Temperature Mode for Near Atmospheric Pressure Measurements

1
University Lille, CNRS, Centrale Lille, ISEN, University Valenciennes, UMR 8520—IEMN, LIA LICS/LEMAC, Lille, France
2
ONERA, Chemin de la Hunière, 91123 Palaiseau, France
3
Institut Jean Lamour, UMR 7198, Université de Lorraine-CNRS, Vandoeuvre les Nancy, France
4
Fluiditech, Thurmelec, 68840 Pulversheim, France
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 5 September 2017
(This article belongs to the Proceedings of Eurosensors 2017)
Download PDF [721 KB, uploaded 7 September 2017]

Abstract

This paper presents a high sensitive micro-sensor designed for pressure measurements in a wide range around atmospheric pressure, for application in aerodynamics. The sensor is a temperature-resistance transducer operating with the Pirani effect, which states that below a certain pressure limit, the thermal conductivity of a gas is pressure-dependent. The sensor presents a wide measurement range between 10 kPa and about 800 kPa, in both constant current and constant temperature mode. The last mode enables high-sensitive measurements with a maximum of sensitivity around atmospheric pressure, enabling the use of the sensor for applications in aerodynamics and fluid dynamics, such as active flow control.
Keywords: MEMS sensors; pressure sensors; pirani sensors; flow control MEMS sensors; pressure sensors; pirani sensors; flow control
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Ghouila-Houri, C.; Sindjui, R.; Moutaouekkil, M.; Elmazria, O.; Gallas, Q.; Garnier, E.; Merlen, A.; Viard, R.; Talbi, A.; Pernod, P. Nanogap Pirani Sensor Operating in Constant Temperature Mode for Near Atmospheric Pressure Measurements. Proceedings 2017, 1, 377.

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