Next Article in Journal
Real-Time Monitoring of Stem Cells by Diamond-Based Impedance Sensors
Previous Article in Journal
Efficient Vertical-Cavity Mid-IR Thermal Radiation to Silicon-Slab Waveguide Coupling Using a Shallow Blazed Grating
Article Menu
Issue 4 (Eurosensors 2017) cover image

Article Versions

Export Article

Open AccessProceedings
Proceedings 2017, 1(4), 372; doi:10.3390/proceedings1040372

Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting Applications

1
Institute for Physics of Electrotechnology, Technical University of Munich, 80333 München, Germany
2
Micromechanical Systems Group, Technical University Ilmenau, 98693 Ilmenau, Germany
3
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT, Munich, Germany
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 23 August 2017
Download PDF [536 KB, uploaded 23 August 2017]

Abstract

A novel, integrated micromechanical actuator based on the principle of undulatory fish locomotion and intended for efficient on-chip cooling or venting applications is conceived and designed for an aluminum nitride-based thin-film technology applying coupled piezoelectric, mechanical, and fluidic analyses. The results of the investigations prove that an undulatory motion of the fin-like micro-flapper yields a significant higher, directed fluidic net flow compared to resonant-like motion. First prototypes have been manufactured and characterized applying laser Doppler vibrometry (LDV).
Keywords: piezoelectricity; fluidic actuator; laser doppler vibrometry; thin-film technology piezoelectricity; fluidic actuator; laser doppler vibrometry; thin-film technology
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Behlert, R.; Gehring, M.; Mehner, H.; Wieland, R.; Schrag, G. Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting Applications. Proceedings 2017, 1, 372.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Proceedings EISSN 2504-3900 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top