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Proceedings 2017, 1(4), 371; doi:10.3390/proceedings1040371

Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries

1
Institute of Semiconductor Technology (IHT), Braunschweig University of Technology, Hans-Sommer-Straße 66, 38106 Braunschweig, Germany
2
Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6a, 38106 Braunschweig, Germany
*
Author to whom correspondence should be addressed.
Published: 24 August 2017
Download PDF [1209 KB, uploaded 24 August 2017]

Abstract

A piezo resistive, phase locked loop (PLL) controlled micro tactile measurement system for contact resonance spectroscopy (CRS) at high-aspect-ratio geometries was developed and characterised. Therefore, a piezo resistive silicon cantilever with a silicon tip at its free end was brought into contact with a sample surface and excited into resonance by a piezo actuator. The resonance frequency of the contacted cantilever was tracked by a homemade closed-loop PLL circuit. Different materials and layer thicknesses of photo resist (PR) on silicon were used to validate the system. To optimise the sensitivity and efficiency of the measurement system, amplitude and phase of the cantilever in surface contact were analysed under different contact forces and excitation amplitudes.
Keywords: contact resonance spectroscopy; high-aspect-ratio layer analysis; material analysis; piezoresistive; tactile cantilever contact resonance spectroscopy; high-aspect-ratio layer analysis; material analysis; piezoresistive; tactile cantilever
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Bertke, M.; Reinheimer, U.W.; Fahrbach, M.; Hamdana, G.; Wasisto, H.S.; Peiner, E. Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries. Proceedings 2017, 1, 371.

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