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Proceedings 2017, 1(4), 350; doi:10.3390/proceedings1040350

Torsional Moving Electric Field Sensor with Modulated Sensitivity and without Reference Ground

Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB, Canada
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
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Published: 8 August 2017
Download PDF [536 KB, uploaded 27 August 2017]

Abstract

A MEMS electric field sensor is presented with wide measurement resolution and adjustable sensitivity. The sense membrane is mounted using torsional springs and employs opposite biased electrodes on its surface, causing rotation in presence of an electric field, enabling operation without reference ground. Control of electrode bias enables adjustable linear measurement range from V/m to MV/m. Compared to earlier works with vertical moving sense membranes, higher sensitivity is achieved for the same bias voltage. Employing on-board electronics to enable independent resonant operation, a noise limited resolution of 3 V/m was achieved.
Keywords: MEFM; electric field; electric field measurement; electric field mill; MEMS MEFM; electric field; electric field measurement; electric field mill; MEMS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Liyanage, S.; Shafai, C.; Chen, T.; Rajapakse, A. Torsional Moving Electric Field Sensor with Modulated Sensitivity and without Reference Ground. Proceedings 2017, 1, 350.

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