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Proceedings 2017, 1(4), 349; doi:10.3390/proceedings1040349

Analysis on Chattering Phenomena by the Tilt of the Proof Mass in MEMS Switch

1
Agency for Defense Development, Yuseong, P.O. Box 35, Daejeon 34186, Korea
2
Department of Electrical and Computer Engineering, Seoul National University 301-1116 (#007), 1 Gwanak-ro, Gwanak-gu, Seoul 151-600, Korea
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 29 August 2017
Download PDF [831 KB, uploaded 29 August 2017]

Abstract

This paper reports an analysis on the relationship between the tilt of the proof mass in MEMS switch and the chattering phenomena. Low-g MEMS acceleration switch developed by Kim’s group was modelled in 2D and displacements of each end of the proof mass were analysed using RK 4th method. Some elementary assumptions were made to ease the modelling and analysis. The chattering time of the MEMS switch gets longer as the tilt of the proof mass increases. The reason is that the elongated travel distance of one end of proof mass increases the impact velocity and lengthens the bouncing back time. From the results, we found that the chattering phenomena can last very long even if the tilt of the proof mass is very small.
Keywords: MEMS (micro electromechanical systems); acceleration switch; inertial switch; low threshold acceleration; proof mass; AFDs (arm fire device) MEMS (micro electromechanical systems); acceleration switch; inertial switch; low threshold acceleration; proof mass; AFDs (arm fire device)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Hwang, J.-M.; Hwang, J.; Ryu, D.; Jang, S.-G.; Kim, Y.-K. Analysis on Chattering Phenomena by the Tilt of the Proof Mass in MEMS Switch. Proceedings 2017, 1, 349.

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