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Proceedings 2017, 1(4), 334; doi:10.3390/proceedings1040334

Low-Power Heating Platform for the Characterization and Calibration of Scanning Thermal Probes

EPFL-LMTS, Neuchatel, Switzerland
FEMTO-ST, MN2S, 25000 Besançon, France
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 25 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
Download PDF [1283 KB, uploaded 26 August 2017]


We report on a micro-hotplate technology platform optimized for the calibration of Scanning Thermal Microscopy probes (SThM) used in surface temperature measurement mode. The three chips designed include the same heating area with a calibration area of 10 × 10 µm2 where the SThM probes can land. The 1st design allows to study the influence of the nature of the material on the SThM probes thermal contact resistance. The 2nd design includes a resistive temperature sensor (RTD) integrated on the contact area, which is dedicated to evaluate the capability of a probe to measure a surface temperature. The 3rd design has a contact area made of a suspended platinum membrane for coupling SThM probes with optical thermal measurements. The thermal response of a thermocouple (TC) SThM probe was extracted demonstrating the relevance of these chips for SThM probes characterization and calibration.
Keywords: thermal calibration; calibration chip; SThM probe; micro-hotplate; thermocouple thermal calibration; calibration chip; SThM probe; micro-hotplate; thermocouple
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Briand, D.; Nguyen, T.P.; Lemaire, E.; Thiery, L.; Vairac, P. Low-Power Heating Platform for the Characterization and Calibration of Scanning Thermal Probes. Proceedings 2017, 1, 334.

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