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Proceedings 2017, 1(4), 316; doi:10.3390/proceedings1040316

Aerosol Jet Printing of Miniaturized, Low Power Flexible Micro-Hotplates

1
Microsystems for Space Technologies Laboratory, EPFL, Neuchâtel 2000, Switzerland
2
FEMTO-ST Institute, UMR 6174, Université de Franche-Comté, CNRS, ENSMM, UTBM, Besancon 25030, France
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 17 August 2017
Download PDF [814 KB, uploaded 17 August 2017]

Abstract

We report on printed flexible micro-hotplates operating at high temperature at lower power consμmption than ever reported using aerosol jet printing of fine metallic conductor features. Efficient heating (i.e., 40 mW at 325 °C) was produced by reducing the effective heating area and substrates thickness. Gold (Au) nanoparticles solution was used for printing micro-hotplates of two different sizes, i.e., 500 × 500 μm2 and 300 × 300 μm2, on 50 μm- and 13 μm-thick PI substrates, respectively. Comsol simulations were used to optimize the thermal design of micro-hotplates. Their power consμmption at 325 °C was of 54 mW for the large hotplate and of 40 mW for the smaller design. These results validate the simple manufacturing of high temperature and power efficient flexible micro-hotplates for applications such as in portable gas and chemical sensors, thermal metrology, etc.
Keywords: micro-hotplate; flexible; printed; Aerosol-Jet; gold micro-hotplate; flexible; printed; Aerosol-Jet; gold
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Khan, S.; Nguyen, T.P.; Thiery, L.; Vairac, P.; Briand, D. Aerosol Jet Printing of Miniaturized, Low Power Flexible Micro-Hotplates. Proceedings 2017, 1, 316.

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